Abstract

An exact expression for calculating the complex reflectance ratio of a surface, from data obtained with a rotating-analyzer ellipsometer system using optically active quartz Rochon prisms, shows that optical activity affects relative values of measured quantities by an amount of the order of 1%. For component settings near the normal modes of the system, these effects can be much greater. By contrast to null ellipsometry, there is no surface for which these effects vanish in calibration. Therefore, corrections of the order of 1% (0.5°) are necessary in the calibration of the azimuth scales of these ellipsometer systems, even in the most-favorable cases.

© 1974 Optical Society of America

Effects of detector nonlinearity on calibration and data reduction of rotating-analyzer ellipsometers

William Ralph Hunter
J. Opt. Soc. Am. 66(2) 94-97 (1976)

Analysis of systematic errors in rotating-analyzer ellipsometers*

R. M. A. Azzam and N. M. Bashara
J. Opt. Soc. Am. 64(11) 1459-1469 (1974)

Optimizing precision of rotating-analyzer ellipsometers

D. E. Aspnes
J. Opt. Soc. Am. 64(5) 639-646 (1974)

Errors in “Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers”

D. M. Radman and B. D. Cahan
J. Opt. Soc. Am. 71(12) 1546-1546 (1981)

Measurement and Correction of First-Order Errors in Ellipsometry

D. E. Aspnes
J. Opt. Soc. Am. 61(8) 1077-1085 (1971)