Abstract

An exact expression for calculating the complex reflectance ratio of a surface, from data obtained with a rotating-analyzer ellipsometer system using optically active quartz Rochon prisms, shows that optical activity affects relative values of measured quantities by an amount of the order of 1%. For component settings near the normal modes of the system, these effects can be much greater. By contrast to null ellipsometry, there is no surface for which these effects vanish in calibration. Therefore, corrections of the order of 1% (0.5º) are necessary in the calibration of the azimuth scales of these ellipsometer systems, even in the most-favorable cases.

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  1. E. O. Ammann and G. A. Massey, J. Opt. Soc. Am. 58, 1427 (1968).
  2. B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).
  3. R. Greef, Rev. Sci. Instr. 41, 532 (1970).
  4. D. E. Aspnes, Optics Commun. 8, 222 (1973).
  5. P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).
  6. R. C. O'Handley, J. Opt. Soc. Am. 63, 523 (1973).
  7. J. F. Nye, Physical Properties of Crystals (Oxford U. P., London, 1957), pp. 260ff.
  8. D. E. Aspnes, J. Opt. Soc. Am. 61, 1077 (1971).
  9. R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 1236 (1971) J. Opt. Soc. Am. 62, 700 (1972).
  10. D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).
  11. S. N. Jasperson and S. E. Schnatterly, Rev. Sci. Instr. 40, 761 (1969); S. N. Jasperson, D. K. Burge, and R. C. O'Handley, Surf. Sci. 37, 548 (1973).
  12. R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 1118 (1971).
  13. M. Ghezzo, Brit. J. Appl. Phys. 2, 1483 (1969).
  14. R. M. A. Azzam and N. H. Bashara, J. Opt. Soc. Am. 61, 600 (1971); J. Opt. Soc. Am. 61, 773 (1971); J. Opt. Soc. Am. 61, 1380 (1971).
  15. G. Szivessy and C. Munster, Ann. Phys. 20, 703 (1934); G. Bruhat and P. Grivet, J. Phys. Radium 6, 12 (1935); C. Munster and G. Szivessy, Phys. Z. 36, 101 (1935).
  16. J. R. Meyer-Arendt, Introduction to Classical and Modern Optics (Prentice-Hall, Englewood Cliffs, N. J., 1972), pp. 288ff.
  17. C. V. Kent and J. Lawson, J. Opt. Soc. Am. 27, 117 (1937).
  18. D. E. Aspnes, Appl. Opt. 10, 2545 (1971).
  19. M. J. Dignam and M. Moskovits, Appl. Opt. 9, 1868 (1970).
  20. N. Draper and H. Smith, Applied Regression Analysis (Wiley, New York, 1966), p. 129.

Meyer-Arendt, J. R.

J. R. Meyer-Arendt, Introduction to Classical and Modern Optics (Prentice-Hall, Englewood Cliffs, N. J., 1972), pp. 288ff.

Ammann, E. O.

E. O. Ammann and G. A. Massey, J. Opt. Soc. Am. 58, 1427 (1968).

Aspnes, D. E.

D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).

D. E. Aspnes, J. Opt. Soc. Am. 61, 1077 (1971).

D. E. Aspnes, Appl. Opt. 10, 2545 (1971).

D. E. Aspnes, Optics Commun. 8, 222 (1973).

Azzam, R. M. A.

R. M. A. Azzam and N. H. Bashara, J. Opt. Soc. Am. 61, 600 (1971); J. Opt. Soc. Am. 61, 773 (1971); J. Opt. Soc. Am. 61, 1380 (1971).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 1118 (1971).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 1236 (1971) J. Opt. Soc. Am. 62, 700 (1972).

Bashara, N. H.

R. M. A. Azzam and N. H. Bashara, J. Opt. Soc. Am. 61, 600 (1971); J. Opt. Soc. Am. 61, 773 (1971); J. Opt. Soc. Am. 61, 1380 (1971).

Bashara, N. M.

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 1118 (1971).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 1236 (1971) J. Opt. Soc. Am. 62, 700 (1972).

Cahan, B. D.

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

Dignam, M. J.

M. J. Dignam and M. Moskovits, Appl. Opt. 9, 1868 (1970).

Dill, F. H.

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

Draper, N.

N. Draper and H. Smith, Applied Regression Analysis (Wiley, New York, 1966), p. 129.

Ghezzo, M.

M. Ghezzo, Brit. J. Appl. Phys. 2, 1483 (1969).

Greef, R.

R. Greef, Rev. Sci. Instr. 41, 532 (1970).

Hauge, P. S.

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

Jasperson, S. N.

S. N. Jasperson and S. E. Schnatterly, Rev. Sci. Instr. 40, 761 (1969); S. N. Jasperson, D. K. Burge, and R. C. O'Handley, Surf. Sci. 37, 548 (1973).

Kent, C. V.

C. V. Kent and J. Lawson, J. Opt. Soc. Am. 27, 117 (1937).

Lawson, J.

C. V. Kent and J. Lawson, J. Opt. Soc. Am. 27, 117 (1937).

Massey, G. A.

E. O. Ammann and G. A. Massey, J. Opt. Soc. Am. 58, 1427 (1968).

Moskovits, M.

M. J. Dignam and M. Moskovits, Appl. Opt. 9, 1868 (1970).

Munster, C.

G. Szivessy and C. Munster, Ann. Phys. 20, 703 (1934); G. Bruhat and P. Grivet, J. Phys. Radium 6, 12 (1935); C. Munster and G. Szivessy, Phys. Z. 36, 101 (1935).

Nye, J. F.

J. F. Nye, Physical Properties of Crystals (Oxford U. P., London, 1957), pp. 260ff.

O’Handley, R. C.

R. C. O'Handley, J. Opt. Soc. Am. 63, 523 (1973).

Schnatterly, S. E.

S. N. Jasperson and S. E. Schnatterly, Rev. Sci. Instr. 40, 761 (1969); S. N. Jasperson, D. K. Burge, and R. C. O'Handley, Surf. Sci. 37, 548 (1973).

Smith, H.

N. Draper and H. Smith, Applied Regression Analysis (Wiley, New York, 1966), p. 129.

Spanier, R. F.

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

Szivessy, G.

G. Szivessy and C. Munster, Ann. Phys. 20, 703 (1934); G. Bruhat and P. Grivet, J. Phys. Radium 6, 12 (1935); C. Munster and G. Szivessy, Phys. Z. 36, 101 (1935).

Other

E. O. Ammann and G. A. Massey, J. Opt. Soc. Am. 58, 1427 (1968).

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

R. Greef, Rev. Sci. Instr. 41, 532 (1970).

D. E. Aspnes, Optics Commun. 8, 222 (1973).

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

R. C. O'Handley, J. Opt. Soc. Am. 63, 523 (1973).

J. F. Nye, Physical Properties of Crystals (Oxford U. P., London, 1957), pp. 260ff.

D. E. Aspnes, J. Opt. Soc. Am. 61, 1077 (1971).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 1236 (1971) J. Opt. Soc. Am. 62, 700 (1972).

D. E. Aspnes, J. Opt. Soc. Am. 64, 639 (1974).

S. N. Jasperson and S. E. Schnatterly, Rev. Sci. Instr. 40, 761 (1969); S. N. Jasperson, D. K. Burge, and R. C. O'Handley, Surf. Sci. 37, 548 (1973).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 1118 (1971).

M. Ghezzo, Brit. J. Appl. Phys. 2, 1483 (1969).

R. M. A. Azzam and N. H. Bashara, J. Opt. Soc. Am. 61, 600 (1971); J. Opt. Soc. Am. 61, 773 (1971); J. Opt. Soc. Am. 61, 1380 (1971).

G. Szivessy and C. Munster, Ann. Phys. 20, 703 (1934); G. Bruhat and P. Grivet, J. Phys. Radium 6, 12 (1935); C. Munster and G. Szivessy, Phys. Z. 36, 101 (1935).

J. R. Meyer-Arendt, Introduction to Classical and Modern Optics (Prentice-Hall, Englewood Cliffs, N. J., 1972), pp. 288ff.

C. V. Kent and J. Lawson, J. Opt. Soc. Am. 27, 117 (1937).

D. E. Aspnes, Appl. Opt. 10, 2545 (1971).

M. J. Dignam and M. Moskovits, Appl. Opt. 9, 1868 (1970).

N. Draper and H. Smith, Applied Regression Analysis (Wiley, New York, 1966), p. 129.

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