Abstract

A computer-assisted, ellipsometric system performs in situ measurements on substrates and thin films in various atmospheres, at temperatures up to 1450 K. A laser is used as the light source. The light flux exiting from a rotating analyzer is measured at 512 equally spaced intervals, to yield a flux ellipse that is used for further analysis. Data acquisition and data reduction are under control of an IBM System/7 computer. Ab initio calibration of the optical components using a fixed angle of incidence is possible; the cell windows are considered as small-retardation wave plates. Effects of non-ideality of polarizer and analyzer were negligible. Refractive indices of silicon (<i>n</i><sub>SI</sub><sup>*</sup>) and thermally grown silicon dioxide (<i>n</i><sub>SiO</sub><sub>2</sub>) are reported as functions of temperature up to 1350 K.

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  1. Proceedings of the Symposium on Ellipsometry in the Measurement of Surfaces and Thin Films, Washington, D. C., 1963, edited by E. Passaglia, R. R. Stromberg, and J. Kruger, Natl. Bur. Stand. (U. S.) Misc. Publ. No. 256 (U. S. Government Printing Office, Washington, D. C., 1964).
  2. Proceedings of the Symposium on Recent Developmnents in Ellipsometry, Lincoln, Nebr., 1968, edited by N. M. Bashara, A. B. Buckman, and A. C. Hall, in Surf. Sci. 16, 137–192 (1969).
  3. R. J. Archer, J. Opt. Soc. Am. 52, 970 (1962).
  4. J. M. Eldridge and D. W. Dong, Surf. Science 40, 512 (1973).
  5. P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).
  6. J. W. Hartwell, IBM J. Res. Dev. 15, 355 (1971).
  7. N. C. Hien and R. V. Dobransky, IBM Internal Report No. RC 4307 (April 1973).
  8. Laboratory Automation Basic Supervisor for the IBM S/7. IBM Internal Report No. RJ 1185 (April 1973).
  9. B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).
  10. R. Greef, Rev. Sci. Instr. 41, 532 (1970).
  11. W. R. Hunter, J. Opt. Soc. Am. 63, 951 (1973).
  12. F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Stand. (U. S.) A67, 363 (1963).
  13. R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 600 (1971).
  14. R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 773 (1971).
  15. F. L. McCrackin, J. Opt. Soc. Am. 60, 57 (1970).
  16. W. C. Dash and R. Newman, Phys. Rev. 99, 1151 (1955).
  17. A. S. Grove, Physics and Technology of Semiconductor Devices (Wiley, New York, 1967), p. 102.
  18. Y. J. van der Meulen, C. M. Osburn, and J. F. Ziegler, The Electrochemical Society, Spring Meeting 1973, Extended Abstract No. 45.

van der Meulen, Y. J.

Y. J. van der Meulen, C. M. Osburn, and J. F. Ziegler, The Electrochemical Society, Spring Meeting 1973, Extended Abstract No. 45.

Archer, R. J.

R. J. Archer, J. Opt. Soc. Am. 52, 970 (1962).

Azzam, R. M. A.

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 773 (1971).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 600 (1971).

Bashara, N. M.

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 600 (1971).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 773 (1971).

Cahan, B. D.

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

Dash, W. C.

W. C. Dash and R. Newman, Phys. Rev. 99, 1151 (1955).

Dill, F. H.

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

Dobransky, R. V.

N. C. Hien and R. V. Dobransky, IBM Internal Report No. RC 4307 (April 1973).

Dong, D. W.

J. M. Eldridge and D. W. Dong, Surf. Science 40, 512 (1973).

Eldridge, J. M.

J. M. Eldridge and D. W. Dong, Surf. Science 40, 512 (1973).

Greef, R.

R. Greef, Rev. Sci. Instr. 41, 532 (1970).

Grove, A. S.

A. S. Grove, Physics and Technology of Semiconductor Devices (Wiley, New York, 1967), p. 102.

Hartwell, J. W.

J. W. Hartwell, IBM J. Res. Dev. 15, 355 (1971).

Hauge, P. S.

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

Hien, N. C.

N. C. Hien and R. V. Dobransky, IBM Internal Report No. RC 4307 (April 1973).

Hunter, W. R.

W. R. Hunter, J. Opt. Soc. Am. 63, 951 (1973).

McCrackin, F. L.

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Stand. (U. S.) A67, 363 (1963).

F. L. McCrackin, J. Opt. Soc. Am. 60, 57 (1970).

Newman, R.

W. C. Dash and R. Newman, Phys. Rev. 99, 1151 (1955).

Osburn, C. M.

Y. J. van der Meulen, C. M. Osburn, and J. F. Ziegler, The Electrochemical Society, Spring Meeting 1973, Extended Abstract No. 45.

Passaglia, E.

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Stand. (U. S.) A67, 363 (1963).

Spanier, R. F.

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

Steinberg, H. L.

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Stand. (U. S.) A67, 363 (1963).

Stromberg, R. R.

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Stand. (U. S.) A67, 363 (1963).

Ziegler, J. F.

Y. J. van der Meulen, C. M. Osburn, and J. F. Ziegler, The Electrochemical Society, Spring Meeting 1973, Extended Abstract No. 45.

Other (18)

Proceedings of the Symposium on Ellipsometry in the Measurement of Surfaces and Thin Films, Washington, D. C., 1963, edited by E. Passaglia, R. R. Stromberg, and J. Kruger, Natl. Bur. Stand. (U. S.) Misc. Publ. No. 256 (U. S. Government Printing Office, Washington, D. C., 1964).

Proceedings of the Symposium on Recent Developmnents in Ellipsometry, Lincoln, Nebr., 1968, edited by N. M. Bashara, A. B. Buckman, and A. C. Hall, in Surf. Sci. 16, 137–192 (1969).

R. J. Archer, J. Opt. Soc. Am. 52, 970 (1962).

J. M. Eldridge and D. W. Dong, Surf. Science 40, 512 (1973).

P. S. Hauge and F. H. Dill, IBM J. Res. Dev. 17, 472 (1973).

J. W. Hartwell, IBM J. Res. Dev. 15, 355 (1971).

N. C. Hien and R. V. Dobransky, IBM Internal Report No. RC 4307 (April 1973).

Laboratory Automation Basic Supervisor for the IBM S/7. IBM Internal Report No. RJ 1185 (April 1973).

B. D. Cahan and R. F. Spanier, Surf. Sci. 16, 166 (1969).

R. Greef, Rev. Sci. Instr. 41, 532 (1970).

W. R. Hunter, J. Opt. Soc. Am. 63, 951 (1973).

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Stand. (U. S.) A67, 363 (1963).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 600 (1971).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 61, 773 (1971).

F. L. McCrackin, J. Opt. Soc. Am. 60, 57 (1970).

W. C. Dash and R. Newman, Phys. Rev. 99, 1151 (1955).

A. S. Grove, Physics and Technology of Semiconductor Devices (Wiley, New York, 1967), p. 102.

Y. J. van der Meulen, C. M. Osburn, and J. F. Ziegler, The Electrochemical Society, Spring Meeting 1973, Extended Abstract No. 45.

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