Abstract

Methods are developed for the successive determination of the refractive index, thickness, and extinction coefficient of a slightly absorbing thin film situated on a slightly absorbing or transparent substrate. The refractive index is found from a measurement of the Brewster angle for the film-substrate interface. This Brewster angle, termed the second-surface Brewster angle, is shown to be highly insensitive to small values of the extinction coefficient. The film thickness is deduced from measurements of the angles at which maxima and minima occur in the measured distribution of reflectance vs angle of incidence. Thus, neither the refractive index nor the thickness determinations requires the magnitude of the reflectance as input. On the other hand, the extinction coefficient is deduced from the value of the reflectance at a maximum point in the distribution of reflectance vs incidence angle.

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  1. F. Abelès, J. Phys. Radium 11, 310 (1950).
  2. O. S. Heavens, in Physics of Thin Films, Vol. 2, edited by G. Hass and R. Thun (Academic, New York, 1964), p. 193.
  3. R. P. Madden, L. R. Canfield, and G. Hass, J. Opt. Soc. Am. 53, 620 (1963).
  4. M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).
  5. One of the referees suggested that the present method for determining the film thickness is implicit in two papers by W. R. Hunter [J. Appl. Phys. 34, 1565 (1963); J. Opt. Soc. Am. 54, 15 (1964)]. The problem considered by Hunter was the determination of the refractive index n2 from fringe positions, when the film thickness is known.

Abelès, F.

F. Abelès, J. Phys. Radium 11, 310 (1950).

Canfield, L. R.

R. P. Madden, L. R. Canfield, and G. Hass, J. Opt. Soc. Am. 53, 620 (1963).

Eckert, E. R. G.

M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

Hass, G.

R. P. Madden, L. R. Canfield, and G. Hass, J. Opt. Soc. Am. 53, 620 (1963).

Heavens, O. S.

O. S. Heavens, in Physics of Thin Films, Vol. 2, edited by G. Hass and R. Thun (Academic, New York, 1964), p. 193.

Hunter, W. R.

One of the referees suggested that the present method for determining the film thickness is implicit in two papers by W. R. Hunter [J. Appl. Phys. 34, 1565 (1963); J. Opt. Soc. Am. 54, 15 (1964)]. The problem considered by Hunter was the determination of the refractive index n2 from fringe positions, when the film thickness is known.

Madden, R. P.

R. P. Madden, L. R. Canfield, and G. Hass, J. Opt. Soc. Am. 53, 620 (1963).

Ruiz-Urbieta, M.

M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

Sparrow, E. M.

M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

Other

F. Abelès, J. Phys. Radium 11, 310 (1950).

O. S. Heavens, in Physics of Thin Films, Vol. 2, edited by G. Hass and R. Thun (Academic, New York, 1964), p. 193.

R. P. Madden, L. R. Canfield, and G. Hass, J. Opt. Soc. Am. 53, 620 (1963).

M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

One of the referees suggested that the present method for determining the film thickness is implicit in two papers by W. R. Hunter [J. Appl. Phys. 34, 1565 (1963); J. Opt. Soc. Am. 54, 15 (1964)]. The problem considered by Hunter was the determination of the refractive index n2 from fringe positions, when the film thickness is known.

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