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  1. Ellipsometry in the Measurement of Surfaces and Thin Films, edited by E. Passaglia, R. R. Stromberg, and J. Kruger, Natl. Bur. Std. (U. S.) Misc. Publ. No. 256 (U. S. Government Printing Office, Washington, D. C., 1962).
  2. Proceedingso of the Symposium on Recent Developments in Ellipsometry, edited by N. M. Bashara, A. B. Buckman, and A. C. Hall (North-Holland, Amsterdam, 1969); also Surface Sci. 16 (1969).
  3. R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 62, 222 (1972).
  4. R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 62, 336 (1972).
  5. R. M. A. Azzam and N. M. Bashara, Opt. Commun. 5, 5 (1972).
  6. The higher-order beams propagate away from the plane of incidence and are not accessible in an ordinary planar ellipsometer (where the axes of the two telescopes are in one plane, the plane of incidence). For the present example of a diffraction grating (with lines oblique to the plane of incidence) and for other possible applications of generalized ellipsometry a more versatile ellipsometer is needed, e.g., one in which the analyzer telescope can be rotated around two axes.
  7. D. Beaglehole, Phys. Rev. Letters 22, 708 (1969); IEEE Trans. ED-17, 240 (1970).
  8. J. J. Cowan and E. T. Arakawa, Z. Physik 235, 97 (1970); Phys. Status Solidi 1, 695 (1970).
  9. R. M. A. Azzam and N. M. Bashara, Phys. Rev. B 5, 4721 (1972).

Arakawa, E. T.

J. J. Cowan and E. T. Arakawa, Z. Physik 235, 97 (1970); Phys. Status Solidi 1, 695 (1970).

Azzam, R. M. A.

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 62, 222 (1972).

R. M. A. Azzam and N. M. Bashara, Phys. Rev. B 5, 4721 (1972).

R. M. A. Azzam and N. M. Bashara, Opt. Commun. 5, 5 (1972).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 62, 336 (1972).

Bashara, N. M.

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 62, 336 (1972).

R. M. A. Azzam and N. M. Bashara, Opt. Commun. 5, 5 (1972).

R. M. A. Azzam and N. M. Bashara, Phys. Rev. B 5, 4721 (1972).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 62, 222 (1972).

Beaglehole, D.

D. Beaglehole, Phys. Rev. Letters 22, 708 (1969); IEEE Trans. ED-17, 240 (1970).

Cowan, J. J.

J. J. Cowan and E. T. Arakawa, Z. Physik 235, 97 (1970); Phys. Status Solidi 1, 695 (1970).

Other (9)

Ellipsometry in the Measurement of Surfaces and Thin Films, edited by E. Passaglia, R. R. Stromberg, and J. Kruger, Natl. Bur. Std. (U. S.) Misc. Publ. No. 256 (U. S. Government Printing Office, Washington, D. C., 1962).

Proceedingso of the Symposium on Recent Developments in Ellipsometry, edited by N. M. Bashara, A. B. Buckman, and A. C. Hall (North-Holland, Amsterdam, 1969); also Surface Sci. 16 (1969).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 62, 222 (1972).

R. M. A. Azzam and N. M. Bashara, J. Opt. Soc. Am. 62, 336 (1972).

R. M. A. Azzam and N. M. Bashara, Opt. Commun. 5, 5 (1972).

The higher-order beams propagate away from the plane of incidence and are not accessible in an ordinary planar ellipsometer (where the axes of the two telescopes are in one plane, the plane of incidence). For the present example of a diffraction grating (with lines oblique to the plane of incidence) and for other possible applications of generalized ellipsometry a more versatile ellipsometer is needed, e.g., one in which the analyzer telescope can be rotated around two axes.

D. Beaglehole, Phys. Rev. Letters 22, 708 (1969); IEEE Trans. ED-17, 240 (1970).

J. J. Cowan and E. T. Arakawa, Z. Physik 235, 97 (1970); Phys. Status Solidi 1, 695 (1970).

R. M. A. Azzam and N. M. Bashara, Phys. Rev. B 5, 4721 (1972).

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