Abstract

We have found that the thickness and refractive indices for the film–substrate problem in ellipsometry can frequently be calculated with a least-squares technique. It is shown that one algorithm can be used with a variety of data to solve problems that were formerly solved with step-by-step searches through parameter space. Moreover, the least-squares technique leads to a statistically meaningful estimate of the variances of the parameters. It is shown that the variances obtained from a correct error analysis can be at least one hundred times as large as those obtained from a naive analysis. It is also shown how the error analysis can provide information that is helpful in deciding if a given experiment is worthwhile.

© 1971 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription