Abstract

A general analysis of the effect of cell windows shows more error terms in each of the four ellipsometry zones than is found in the conventional small-retardation wave-plate approximation. The value of ψ from a two-zone average requires a correction that is generally dependent on both the window and the reflecting surface under study. A difference of the flux transmission in the s direction from that in the p direction as small as 10−6 leads to an appreciable correction ∼0.06°. An experimental procedure to correct for window error is described and is applied to three different types of windows with Δ errors from 0.05° to 1.5°.

© 1971 Optical Society of America

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