Abstract

Methods are described for determining the refractive indices of dielectric films and substrates and the thickness of the film. The determination makes use of a single measured distribution of monochromatic, specular reflectance as a function of incidence angle. The methods are based on certain properties of the reflectance maxima and minima, which properties are deduced from electromagnetic theory. Either perpendicular-polarized or parallel-polarized light may be employed; the latter has some advantage, in that it provides a cross check on one of the results and also facilitates the treatment of very thin films.

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