Abstract

By numerical analysis of the general formulas for standard ellipsometiric measurement, positions of the compensator, polarizer, and analyzer can be found such that the errors of Δ and ψ are minimized. Such optimal conditions can be found for any value of Δ and ψ from plots that are given. The improvement of precision over that of usual methods can be one order of magnitude or better in some Δ, ψ regions.

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References

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  1. R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp., Chicago, 1968).
  2. A. Vašíček, Měřeni a vylvářeni tenkých vrstev v optice (Publishing House of CSAV, Prague, 1957).
  3. F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).
  4. A. B. Winterbottom, Optical Studies of Metal Surfaces, Roy. Norwegian Sci. Soc. Rep. 1 (F. Bruns, Trondheim, Norway, 1955).
  5. A. Vašíček, Optics of Thin Films (North-Holland Publishing Co., Amsterdam, 1960).
  6. O. S. Heavens, in Physics of Thin Films, Vol. 2, G. Hass and R. Thun, Eds. (Academic Press Inc., New York, 1964), p. 193.
  7. F. Abelès, in Progress in Optics II, E. Wolf, Ed. (North-Holland Publishing Co., Amsterdam, 1963).

Abelès, F.

F. Abelès, in Progress in Optics II, E. Wolf, Ed. (North-Holland Publishing Co., Amsterdam, 1963).

Archer, R. J.

R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp., Chicago, 1968).

Heavens, O. S.

O. S. Heavens, in Physics of Thin Films, Vol. 2, G. Hass and R. Thun, Eds. (Academic Press Inc., New York, 1964), p. 193.

McCrackin, F. L.

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

Passaglia, E.

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

Steinberg, H. L.

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

Stromberg, R. R.

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

Vašícek, A.

A. Vašíček, Optics of Thin Films (North-Holland Publishing Co., Amsterdam, 1960).

A. Vašíček, Měřeni a vylvářeni tenkých vrstev v optice (Publishing House of CSAV, Prague, 1957).

Winterbottom, A. B.

A. B. Winterbottom, Optical Studies of Metal Surfaces, Roy. Norwegian Sci. Soc. Rep. 1 (F. Bruns, Trondheim, Norway, 1955).

Other (7)

R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp., Chicago, 1968).

A. Vašíček, Měřeni a vylvářeni tenkých vrstev v optice (Publishing House of CSAV, Prague, 1957).

F. L. McCrackin, E. Passaglia, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

A. B. Winterbottom, Optical Studies of Metal Surfaces, Roy. Norwegian Sci. Soc. Rep. 1 (F. Bruns, Trondheim, Norway, 1955).

A. Vašíček, Optics of Thin Films (North-Holland Publishing Co., Amsterdam, 1960).

O. S. Heavens, in Physics of Thin Films, Vol. 2, G. Hass and R. Thun, Eds. (Academic Press Inc., New York, 1964), p. 193.

F. Abelès, in Progress in Optics II, E. Wolf, Ed. (North-Holland Publishing Co., Amsterdam, 1963).

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