Abstract

In the spectral range 0.5 <<i>hv</i><11.9 eV, reflectance data were obtained from molybdenum and ruthenium films, vapor deposited in ultra-high vacuum and extended to 14 eV using the reflectance of a polished bulk sample. The Mo data are different from previously reported data. The optical constants are obtained by a Kramers—Kronig analysis of the normal-incidence reflectance. In the analysis for hv> 14 eV (23 eV for Mo) the reflectance was represented by an inverse power function where the exponent was determined with the aid of the reflectance measured at 50° incidence for hv<11.9 eV. The imaginary part of the dielectric constant, ε<sub>2</sub>, has shoulders at about 2.2 and 4.0 eV for Mo and 1.6 eV for Ru. The loss functions Im[l/εε] and Im [1/(1+ε)] have peaks at 10.8 and 9.9 eV, respectively, for Mo, and 10.2 and 8.7 eV, respectively, for Ru. Interband transitions dominate for 0.5≴<i>hv</i>≴10.0 eV.

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  1. D. W. Juenker, L. J. LeBlanc, and C. R. Martin, J. Opt. Soc. Am. 58, 164 (1968).
  2. K. A. Kress and G. J. Lapeyre, Proc. 3rd IMR Symposium, Electronic Density of States, Nat. Bur. Std. (U.S.), Spec. Publ. 323 (U. S. Govt. Printing Office, Washington, D. C., 1970).
  3. K. A. Kress and G. J. Lapeyre, Phys. Rev. 2, 2532 (1970).
  4. Because the center of rotation of the substrate was slightly off the optic axis, the optical path of the reflected light increased, with angle of reflectance. As a consequence, the apparent reflectance decreased slightly as the reflectance angle increased. The effect becomes appreciable for angles ≳ 60°.
  5. Details of the numerical analysis are found in the thesis by K. A. Kress, Montana State University, 1969.
  6. For example, see J. Feinleib, W. J. Scouler, and A. Ferretti, Phys. Rev. 165, 765 (1968).
  7. W. R. Hunter, J. Opt. Soc. Am. 55, 1197 (1965).
  8. D. W. Vance, Phys. Rev. 164, 372 (1967).
  9. V. W. Kleiner, Optiks 11, 226 (1954).
  10. L. J. Haworth, Phys. Rev. 48, 88 (1935).
  11. L. J. Haworth, Phys. Rev. 50, 216 (1936).
  12. For example, see S. Robin, in Optical Properties and Electronic Structure of Metal and Alloys, edited by F. Abelés (North-Holland, Amsterdam, 1966), pp. 202–209.
  13. H. Ehrenreich and H. R. Philipp, Phys. Rev. 128, 1622 (1962).
  14. N. V. Smith and W. C. Spicer, in Ref. 2.
  15. J. F. Janals, D. C. Eastman, and A. R. Williams, in Ref. 2.

Eastman, D. C.

J. F. Janals, D. C. Eastman, and A. R. Williams, in Ref. 2.

Ehrenreich, H.

H. Ehrenreich and H. R. Philipp, Phys. Rev. 128, 1622 (1962).

Feinleib, J.

For example, see J. Feinleib, W. J. Scouler, and A. Ferretti, Phys. Rev. 165, 765 (1968).

Ferretti, A.

For example, see J. Feinleib, W. J. Scouler, and A. Ferretti, Phys. Rev. 165, 765 (1968).

Haworth, L. J.

L. J. Haworth, Phys. Rev. 48, 88 (1935).

L. J. Haworth, Phys. Rev. 50, 216 (1936).

Hunter, W. R.

W. R. Hunter, J. Opt. Soc. Am. 55, 1197 (1965).

Janals, J. F.

J. F. Janals, D. C. Eastman, and A. R. Williams, in Ref. 2.

Juenker, D. W.

D. W. Juenker, L. J. LeBlanc, and C. R. Martin, J. Opt. Soc. Am. 58, 164 (1968).

Kleiner, V. W.

V. W. Kleiner, Optiks 11, 226 (1954).

Kress, K. A.

Details of the numerical analysis are found in the thesis by K. A. Kress, Montana State University, 1969.

K. A. Kress and G. J. Lapeyre, Proc. 3rd IMR Symposium, Electronic Density of States, Nat. Bur. Std. (U.S.), Spec. Publ. 323 (U. S. Govt. Printing Office, Washington, D. C., 1970).

K. A. Kress and G. J. Lapeyre, Phys. Rev. 2, 2532 (1970).

Lapeyre, G. J.

K. A. Kress and G. J. Lapeyre, Phys. Rev. 2, 2532 (1970).

K. A. Kress and G. J. Lapeyre, Proc. 3rd IMR Symposium, Electronic Density of States, Nat. Bur. Std. (U.S.), Spec. Publ. 323 (U. S. Govt. Printing Office, Washington, D. C., 1970).

LeBlanc, L. J.

D. W. Juenker, L. J. LeBlanc, and C. R. Martin, J. Opt. Soc. Am. 58, 164 (1968).

Martin, C. R.

D. W. Juenker, L. J. LeBlanc, and C. R. Martin, J. Opt. Soc. Am. 58, 164 (1968).

Philipp, H. R.

H. Ehrenreich and H. R. Philipp, Phys. Rev. 128, 1622 (1962).

Robin, S.

For example, see S. Robin, in Optical Properties and Electronic Structure of Metal and Alloys, edited by F. Abelés (North-Holland, Amsterdam, 1966), pp. 202–209.

Scouler, W. J.

For example, see J. Feinleib, W. J. Scouler, and A. Ferretti, Phys. Rev. 165, 765 (1968).

Smith, N. V.

N. V. Smith and W. C. Spicer, in Ref. 2.

Spicer, W. C.

N. V. Smith and W. C. Spicer, in Ref. 2.

Vance, D. W.

D. W. Vance, Phys. Rev. 164, 372 (1967).

Williams, A. R.

J. F. Janals, D. C. Eastman, and A. R. Williams, in Ref. 2.

Other (15)

D. W. Juenker, L. J. LeBlanc, and C. R. Martin, J. Opt. Soc. Am. 58, 164 (1968).

K. A. Kress and G. J. Lapeyre, Proc. 3rd IMR Symposium, Electronic Density of States, Nat. Bur. Std. (U.S.), Spec. Publ. 323 (U. S. Govt. Printing Office, Washington, D. C., 1970).

K. A. Kress and G. J. Lapeyre, Phys. Rev. 2, 2532 (1970).

Because the center of rotation of the substrate was slightly off the optic axis, the optical path of the reflected light increased, with angle of reflectance. As a consequence, the apparent reflectance decreased slightly as the reflectance angle increased. The effect becomes appreciable for angles ≳ 60°.

Details of the numerical analysis are found in the thesis by K. A. Kress, Montana State University, 1969.

For example, see J. Feinleib, W. J. Scouler, and A. Ferretti, Phys. Rev. 165, 765 (1968).

W. R. Hunter, J. Opt. Soc. Am. 55, 1197 (1965).

D. W. Vance, Phys. Rev. 164, 372 (1967).

V. W. Kleiner, Optiks 11, 226 (1954).

L. J. Haworth, Phys. Rev. 48, 88 (1935).

L. J. Haworth, Phys. Rev. 50, 216 (1936).

For example, see S. Robin, in Optical Properties and Electronic Structure of Metal and Alloys, edited by F. Abelés (North-Holland, Amsterdam, 1966), pp. 202–209.

H. Ehrenreich and H. R. Philipp, Phys. Rev. 128, 1622 (1962).

N. V. Smith and W. C. Spicer, in Ref. 2.

J. F. Janals, D. C. Eastman, and A. R. Williams, in Ref. 2.

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