Abstract

In a form analogous to the methods for the measurement of optical constants, a set of methods for the measurement of their changes is described. The methods compared measure light reflected at different angles, with different experimental arrangements; the conclusions reached are demonstrated experimentally with Ge, by electroreflectance measurements.

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  1. J. Tauc, in Progress in Semiconductors, A. F. Gibson, Ed. (Heywood, London, 1965), Vol. 9, p. 87.
  2. J. C. Phillips, in Solid State Physics, Vol. 18, F. Seitz and D. Turnbull, Eds. (Academic Press Inc., New York, 1966).
  3. H. R. Philipp and E. A. Taft, Phys. Rev. 113, 1002 (1959).
  4. D. G. Avery, Proc. Phys. Soc. (London) B65, 425 (1952).
  5. R. F. Potter, J. Opt. Soc. Am. 54, 904 (1964).
  6. A. Vašiček, Optics of Thin Films (North-Holland Publ. Co., Amsterdam, 1960).
  7. R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp. Chicago, 1968).
  8. K. Vedam, W. Knausenberger, and F. Lukes, J. Opt. Soc. Am. 59, 64 (1969).
  9. B. O. Seraphin, R. B. Hess, and N. Bottka, J. Appl. Phys. 36, 2242 (1965).
  10. M. Cardona, K. L. Shaklee, and F. H. Pollak, Phys. Rev. 154, 696 (1967).
  11. W. E. Engeler, H. Fritzsche, M. Garfinkel, and J. J. Tiemann, Phys. Rev. Letters 14, 1069 (1965).
  12. G. O. Gobeli, E. O. Kane, Phys. Rev. Letters 15, 142 (1965).
  13. B. Batz, Solid State Comm. 4, 241 (1966).
  14. C. N. Berglund, J. Appl. Phys. 37, 3019 (1966).
  15. F. Lukes, private communication; see Ref. 16.
  16. J. E. Fischer and B. O. Seraphin, Solid State Comm. 5, 973 (1967).
  17. A. B. Buckman and N. M. Bashara, J. Opt. Soc. Am. 58, 700 (1968).
  18. B. Velický, Czech. J. Phys. B11, 787 (1961).
  19. A. Reisman and R. Rohr, J. Electrochem Soc. 111, 1425 (1964).
  20. R. F. Potter, Phys. Rev. 150, 562 (1966).

Archer, R. J.

R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp. Chicago, 1968).

Avery, D. G.

D. G. Avery, Proc. Phys. Soc. (London) B65, 425 (1952).

Bashara, N. M.

A. B. Buckman and N. M. Bashara, J. Opt. Soc. Am. 58, 700 (1968).

Batz, B.

B. Batz, Solid State Comm. 4, 241 (1966).

Berglund, C. N.

C. N. Berglund, J. Appl. Phys. 37, 3019 (1966).

Bottka, N.

B. O. Seraphin, R. B. Hess, and N. Bottka, J. Appl. Phys. 36, 2242 (1965).

Buckman, A. B.

A. B. Buckman and N. M. Bashara, J. Opt. Soc. Am. 58, 700 (1968).

Cardona, M.

M. Cardona, K. L. Shaklee, and F. H. Pollak, Phys. Rev. 154, 696 (1967).

Engeler, W. E.

W. E. Engeler, H. Fritzsche, M. Garfinkel, and J. J. Tiemann, Phys. Rev. Letters 14, 1069 (1965).

Fischer, J. E.

J. E. Fischer and B. O. Seraphin, Solid State Comm. 5, 973 (1967).

Fritzsche, H.

W. E. Engeler, H. Fritzsche, M. Garfinkel, and J. J. Tiemann, Phys. Rev. Letters 14, 1069 (1965).

Garfinkel, M.

W. E. Engeler, H. Fritzsche, M. Garfinkel, and J. J. Tiemann, Phys. Rev. Letters 14, 1069 (1965).

Gobeli, G. O.

G. O. Gobeli, E. O. Kane, Phys. Rev. Letters 15, 142 (1965).

Hess, R. B.

B. O. Seraphin, R. B. Hess, and N. Bottka, J. Appl. Phys. 36, 2242 (1965).

Kane, E. O.

G. O. Gobeli, E. O. Kane, Phys. Rev. Letters 15, 142 (1965).

Knausenberger, W.

K. Vedam, W. Knausenberger, and F. Lukes, J. Opt. Soc. Am. 59, 64 (1969).

Lukes, F.

K. Vedam, W. Knausenberger, and F. Lukes, J. Opt. Soc. Am. 59, 64 (1969).

F. Lukes, private communication; see Ref. 16.

Philipp, H. R.

H. R. Philipp and E. A. Taft, Phys. Rev. 113, 1002 (1959).

Phillips, J. C.

J. C. Phillips, in Solid State Physics, Vol. 18, F. Seitz and D. Turnbull, Eds. (Academic Press Inc., New York, 1966).

Pollak, F. H.

M. Cardona, K. L. Shaklee, and F. H. Pollak, Phys. Rev. 154, 696 (1967).

Potter, R. F.

R. F. Potter, Phys. Rev. 150, 562 (1966).

R. F. Potter, J. Opt. Soc. Am. 54, 904 (1964).

Reisman, A.

A. Reisman and R. Rohr, J. Electrochem Soc. 111, 1425 (1964).

Rohr, R.

A. Reisman and R. Rohr, J. Electrochem Soc. 111, 1425 (1964).

Seraphin, B. O.

J. E. Fischer and B. O. Seraphin, Solid State Comm. 5, 973 (1967).

B. O. Seraphin, R. B. Hess, and N. Bottka, J. Appl. Phys. 36, 2242 (1965).

Shaklee, K. L.

M. Cardona, K. L. Shaklee, and F. H. Pollak, Phys. Rev. 154, 696 (1967).

Taft, E. A.

H. R. Philipp and E. A. Taft, Phys. Rev. 113, 1002 (1959).

Tauc, J.

J. Tauc, in Progress in Semiconductors, A. F. Gibson, Ed. (Heywood, London, 1965), Vol. 9, p. 87.

Tiemann, J. J.

W. E. Engeler, H. Fritzsche, M. Garfinkel, and J. J. Tiemann, Phys. Rev. Letters 14, 1069 (1965).

Vašicek, A.

A. Vašiček, Optics of Thin Films (North-Holland Publ. Co., Amsterdam, 1960).

Vedam, K.

K. Vedam, W. Knausenberger, and F. Lukes, J. Opt. Soc. Am. 59, 64 (1969).

Velický, B.

B. Velický, Czech. J. Phys. B11, 787 (1961).

Other (20)

J. Tauc, in Progress in Semiconductors, A. F. Gibson, Ed. (Heywood, London, 1965), Vol. 9, p. 87.

J. C. Phillips, in Solid State Physics, Vol. 18, F. Seitz and D. Turnbull, Eds. (Academic Press Inc., New York, 1966).

H. R. Philipp and E. A. Taft, Phys. Rev. 113, 1002 (1959).

D. G. Avery, Proc. Phys. Soc. (London) B65, 425 (1952).

R. F. Potter, J. Opt. Soc. Am. 54, 904 (1964).

A. Vašiček, Optics of Thin Films (North-Holland Publ. Co., Amsterdam, 1960).

R. J. Archer, Manual of Ellipsometry (Gaertner Scientific Corp. Chicago, 1968).

K. Vedam, W. Knausenberger, and F. Lukes, J. Opt. Soc. Am. 59, 64 (1969).

B. O. Seraphin, R. B. Hess, and N. Bottka, J. Appl. Phys. 36, 2242 (1965).

M. Cardona, K. L. Shaklee, and F. H. Pollak, Phys. Rev. 154, 696 (1967).

W. E. Engeler, H. Fritzsche, M. Garfinkel, and J. J. Tiemann, Phys. Rev. Letters 14, 1069 (1965).

G. O. Gobeli, E. O. Kane, Phys. Rev. Letters 15, 142 (1965).

B. Batz, Solid State Comm. 4, 241 (1966).

C. N. Berglund, J. Appl. Phys. 37, 3019 (1966).

F. Lukes, private communication; see Ref. 16.

J. E. Fischer and B. O. Seraphin, Solid State Comm. 5, 973 (1967).

A. B. Buckman and N. M. Bashara, J. Opt. Soc. Am. 58, 700 (1968).

B. Velický, Czech. J. Phys. B11, 787 (1961).

A. Reisman and R. Rohr, J. Electrochem Soc. 111, 1425 (1964).

R. F. Potter, Phys. Rev. 150, 562 (1966).

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