Abstract

Resolution limits of topographical measurements with multiple-beam interferometry were studied with the fringes of equal chromatic order in reflection. Depth can be measured to 0.5 Å (Δe) for areas of lateral dimensions as small as 4 μ (Δx). The product Δx · Δe is thus found to be much less than predicted by Inglestam’s uncertainty relation. A modified relation for the product Δx · Δe is proposed and is in approximate agreement with the experimental results.

© 1968 Optical Society of America

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