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Theory of an Ellipsometric Technique for Investigating Weakly Absorbing Substances

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Abstract

The theory of a technique with which ellipsometry can be used to determine the complex refractive index of a weakly absorbing, isotropic, homogeneous substance is presented. The material must be fabricated into a slab thin enough so that multiple internal reflections appreciably influence the polarization state of the reflected beam. Measurements must be taken at two angles of incidence. A numerical example, including a discussion of errors, illustrates the use of the method.

© 1967 Optical Society of America

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Equations (11)

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