Abstract

The equations of ellipsometry are derived relating the specimen properties, ρ = tanψe<sup><i>i</i>Δ</sup>, to the instrument settings <i>P</i>, <i>A</i>, and <i>Q</i>. The treatment differs from previous works in that both of the important parameters of the retardation plate are considered, namely, the retardation δ and the transmission ratio <i>T</i>, of the slow to the fast axis. Equations are developed which determine δ and <i>T</i> from the instrument readings. Conventional averaging procedures to obtain ψ from readings of <i>A</i> are shown to be valid; however, it is demonstrated that the usual procedures for obtaining Δ from readings of <i>P</i> are invalid and a correction is derived. Further-more, an unsuspected source of error, namely, orientation of the plate oblique to the light beam, is shown to produce large errors in some measurements.

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