Abstract

The equations of ellipsometry are derived relating the specimen properties, ρ = tanψeiΔ, to the instrument settings P, A, and Q. The treatment differs from previous works in that both of the important parameters of the retardation plate are considered, namely, the retardation δ and the transmission ratio T, of the slow to the fast axis. Equations are developed which determine δ and T from the instrument readings. Conventional averaging procedures to obtain ψ from readings of A are shown to be valid; however, it is demonstrated that the usual procedures for obtaining Δ from readings of P are invalid and a correction is derived. Further-more, an unsuspected source of error, namely, orientation of the plate oblique to the light beam, is shown to produce large errors in some measurements.

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  1. A collection of typical recent papers is available in Ellipsometry in the Measurement of Surfaces and Thin Films, Natl. Bur. Std. (U. S.) Misc. Publ. 256 (1964); a recent review paper is K. H. Zaininger and A. G. Revesz, RCA Review 25, 85 (1964). See also Refs. 2 and 4.
  2. F. L. McCrackin, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).
  3. Reference 2, Table 2.
  4. A. B. Winterbottom, Optical Studies of Metal Surfaces, Royal Norwegian Sci. Soc. Rept. 1 (F. Bruns, Trondheim, Norway 1955), p. 68.
  5. D. A. Holmes, J. Opt. Soc. Am. 54, 1115 (1964).
  6. H. H. Landolt and R. Boernstein, Pihys. ChIem. Tabellen, II Band, 8 Teil, 2-123 (Julius Springer-Verlag, Berlin, 1962).
  7. R. J. Archer, J. Opt. Soc. Am. 52, 970 (1962).
  8. We note from Fig. 1 that for a given plate of arbitrary thickness at an arbitrary angle, there is a 16% chance that |T-1| <0.025.

Archer, R. J.

R. J. Archer, J. Opt. Soc. Am. 52, 970 (1962).

Boernstein, R.

H. H. Landolt and R. Boernstein, Pihys. ChIem. Tabellen, II Band, 8 Teil, 2-123 (Julius Springer-Verlag, Berlin, 1962).

Holmes, D. A.

D. A. Holmes, J. Opt. Soc. Am. 54, 1115 (1964).

Landolt, H. H.

H. H. Landolt and R. Boernstein, Pihys. ChIem. Tabellen, II Band, 8 Teil, 2-123 (Julius Springer-Verlag, Berlin, 1962).

McCrackin, F. L.

F. L. McCrackin, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

Steinberg, H. L.

F. L. McCrackin, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

Stromberg, R. R.

F. L. McCrackin, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

Winterbottom, A. B.

A. B. Winterbottom, Optical Studies of Metal Surfaces, Royal Norwegian Sci. Soc. Rept. 1 (F. Bruns, Trondheim, Norway 1955), p. 68.

Other (8)

A collection of typical recent papers is available in Ellipsometry in the Measurement of Surfaces and Thin Films, Natl. Bur. Std. (U. S.) Misc. Publ. 256 (1964); a recent review paper is K. H. Zaininger and A. G. Revesz, RCA Review 25, 85 (1964). See also Refs. 2 and 4.

F. L. McCrackin, R. R. Stromberg, and H. L. Steinberg, J. Res. Natl. Bur. Std. (U. S.) 67A, 363 (1963).

Reference 2, Table 2.

A. B. Winterbottom, Optical Studies of Metal Surfaces, Royal Norwegian Sci. Soc. Rept. 1 (F. Bruns, Trondheim, Norway 1955), p. 68.

D. A. Holmes, J. Opt. Soc. Am. 54, 1115 (1964).

H. H. Landolt and R. Boernstein, Pihys. ChIem. Tabellen, II Band, 8 Teil, 2-123 (Julius Springer-Verlag, Berlin, 1962).

R. J. Archer, J. Opt. Soc. Am. 52, 970 (1962).

We note from Fig. 1 that for a given plate of arbitrary thickness at an arbitrary angle, there is a 16% chance that |T-1| <0.025.

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