Abstract
The reflection efficiencies for the various orders of diffraction produced by a grating are calculated under the following assumptions. The grating is for the most part flat, but with a fraction ∊ of the periodicity interval a described by a profile function z=f(x). The reflection and transmission efficiencies are calculated as a series expansion in ∊. Numerical calculations have been performed for the case of ultrasoft x rays incident at near grazing angles, using a complex index of refraction η=1−δ0λ2+iβ0λ3.25 or tabulated values. No effects of shadowing by the grating profile have been considered, and the numerical work has been done for a symmetrical triangular trench incised in the flat surface.
© 1964 Optical Society of America
Full Article | PDF ArticleMore Like This
Jack C. Miller and James P. Butler
J. Opt. Soc. Am. 58(12) 1604-1606 (1968)
Jean M. Bennett
J. Opt. Soc. Am. 54(5) 612-624 (1964)
Harold Osterberg and Luther W. Smith
J. Opt. Soc. Am. 54(9) 1073-1078 (1964)