Abstract

The total illumination (or encircled energy) in a diffraction image containing spherical aberration is studied for various amounts of third- and fifth-order aberration. The Zernike polynomials are used to represent spherical aberration. The evaluation of the total illumination was done numerically, using double Gauss quadrature and 49 quadrature points. Contour maps of the total illumination were constructed and compared with the aberration-free case examined previously by E. Wolf.

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