Abstract

A method is described in which a Fabry-Perot interferometer is used to measure the thickness of uniform thin films to an accuracy of ±15A. The separation of the D-lines of sodium light is used as a standard of length. The method is evaluated by comparison with other methods and in terms of its applications and limitations.

© 1950 Optical Society of America

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References

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  1. S. Tolansky, Multiple-Beam Interferometry (Oxford University Press, London, 1948).
  2. L. G. Schulz, J. Opt. Soc. Am. 40, 177 (1950).
    [Crossref]
  3. L. G. Schulz and E. J. Scheibner, J. Opt. Soc. Am. (to be published).

1950 (1)

Scheibner, E. J.

L. G. Schulz and E. J. Scheibner, J. Opt. Soc. Am. (to be published).

Schulz, L. G.

L. G. Schulz, J. Opt. Soc. Am. 40, 177 (1950).
[Crossref]

L. G. Schulz and E. J. Scheibner, J. Opt. Soc. Am. (to be published).

Tolansky, S.

S. Tolansky, Multiple-Beam Interferometry (Oxford University Press, London, 1948).

J. Opt. Soc. Am. (1)

Other (2)

L. G. Schulz and E. J. Scheibner, J. Opt. Soc. Am. (to be published).

S. Tolansky, Multiple-Beam Interferometry (Oxford University Press, London, 1948).

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Figures (2)

Fig. 1
Fig. 1

Drawings showing the fringe configurations for measurements with sodium light. In drawing B the fringe systems for λ1 and λ2 are in coincidence; in C and D they are separated. Drawing E shows the sequence in which positions I, II, and III appear repeatedly as the mirror separation is increased. The best working range is for separations smaller than 2K.

Fig. 2
Fig. 2

The case of thicknesses t smaller than 100A. Drawing A shows the intensity contours for t<100A; drawing B is for T>100A. In each case the solid curve refers to the fringes above the horizontal step edge whereas the broken line refers to the fringes below this edge. In C and D is shown the manner of combining a small thickness t with a larger one T. Drawings E and F illustrate a second method of fringe matching.

Equations (2)

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T = ( M x + M y ) λ 4 K .
T = ( M x + M y ) λ 8 K .