The descriptions of diffraction by pure reflection gratings (fringes parallel to surfaces) and by reflection gratings with slanted fringes are clarified. The rigorous coupled-wave analysis, the chain-matrix analysis, and the new method presented by Zylberberg and Marom [J. Opt. Soc. Am. 73, 392 (1983)] are compared and their regions of applicability determined. Zylberberg and Marom refer to their method as a coupled-wave analysis, a description that is inconsistent with previous use of this terminology.
© 1983 Optical Society of AmericaPDF Article