Abstract

Methods are described for determining the refractive indices of dielectric films and substrates and the thickness of the film. The determination makes use of a single measured distribution of monochromatic, specular reflectance as a function of incidence angle. The methods are based on certain properties of the reflectance maxima and minima, which properties are deduced from electromagnetic theory. Either perpendicular-polarized or parallel-polarized light may be employed; the latter has some advantage, in that it provides a cross check on one of the results and also facilitates the treatment of very thin films.

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  1. M. Born and E. Wolf, Principles of Optics (Pergamon, New York, 1964).
  2. M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

Born, M.

M. Born and E. Wolf, Principles of Optics (Pergamon, New York, 1964).

Eckert, E. R. G.

M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

Ruiz-Urbieta, M.

M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

Sparrow, E. M.

M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

Wolf, E.

M. Born and E. Wolf, Principles of Optics (Pergamon, New York, 1964).

Other

M. Born and E. Wolf, Principles of Optics (Pergamon, New York, 1964).

M. Ruiz-Urbieta, E. M. Sparrow, and E. R. G. Eckert, J. Opt. Soc. Am. 61, 351 (1971).

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