Abstract

<p><a href="http://www.osa-jon.org/virtual_issue.cfm?vid=26">Feature Issue on Photonics in Switching</a></p>We report development activities towards realization of fully integrated1×2, 2×2, and 4×4 cross-point optical switches for WDM-packet-based data networking. Two enabling technologies, quantum-well intermixing and etched turning mirrors, are developed and demonstrated in InGaAs/InAlGaAs InP-based material at a wavelength of 1.55 μm. We describe the use of both technologies to fabricate switch chips with different port counts.

© 2007 Optical Society of America

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    [CrossRef]
  2. D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
    [CrossRef]
  3. J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
    [CrossRef]
  4. R. G. Walker, ''Simple and accurate loss measurement technique for semiconductor optical waveguides,'' Electron. Lett. 21, 581-583 (1985).
  5. J. E. Johnson and C. L. Tang, ''Precise determination of turning mirror loss using GaAs/AlGaAs lasers with up to ten 90° interactivity turning mirrors,'' IEEE Photon. Technol. Lett. 4, 24-26 (1992).
  6. Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.
  7. R. F. Kalman, L. G. Kazovsky, and J. W. Goodman, ''Space division switches based on semiconductor optical amplifiers,'' IEEE Photon. Technol. Lett. 4, 1048-1051 (1992).
    [CrossRef]

2003

1999

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

1998

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

1992

D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
[CrossRef]

R. F. Kalman, L. G. Kazovsky, and J. W. Goodman, ''Space division switches based on semiconductor optical amplifiers,'' IEEE Photon. Technol. Lett. 4, 1048-1051 (1992).
[CrossRef]

J. E. Johnson and C. L. Tang, ''Precise determination of turning mirror loss using GaAs/AlGaAs lasers with up to ten 90° interactivity turning mirrors,'' IEEE Photon. Technol. Lett. 4, 24-26 (1992).

1985

R. G. Walker, ''Simple and accurate loss measurement technique for semiconductor optical waveguides,'' Electron. Lett. 21, 581-583 (1985).

Balestra, C. L.

D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
[CrossRef]

Blackwell, R. J.

D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
[CrossRef]

Bryce, A. C.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

De La Rue, R. M.

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

Drogers, D.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

Goodman, J. W.

R. F. Kalman, L. G. Kazovsky, and J. W. Goodman, ''Space division switches based on semiconductor optical amplifiers,'' IEEE Photon. Technol. Lett. 4, 1048-1051 (1992).
[CrossRef]

Hamilton, C. J.

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

Johnson, B. C.

D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
[CrossRef]

Johnson, J. E.

J. E. Johnson and C. L. Tang, ''Precise determination of turning mirror loss using GaAs/AlGaAs lasers with up to ten 90° interactivity turning mirrors,'' IEEE Photon. Technol. Lett. 4, 24-26 (1992).

Kalman, R. F.

R. F. Kalman, L. G. Kazovsky, and J. W. Goodman, ''Space division switches based on semiconductor optical amplifiers,'' IEEE Photon. Technol. Lett. 4, 1048-1051 (1992).
[CrossRef]

Kazovsky, L. G.

R. F. Kalman, L. G. Kazovsky, and J. W. Goodman, ''Space division switches based on semiconductor optical amplifiers,'' IEEE Photon. Technol. Lett. 4, 1048-1051 (1992).
[CrossRef]

Kowalski, O. P.

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

Marsh, J. H.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

McDougall, S. D.

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

McKee, A.

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

Owen, M.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

Papadimitriou, G. I.

Papazoglou, C.

Penty, R. V.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

Perrin, S.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

Perrymore, L. G.

D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
[CrossRef]

Pomportsis, A. S.

Priest, J. A.

D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
[CrossRef]

Probst, D. K.

D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
[CrossRef]

Qian, Y. H.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

Qiu, B. C.

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

Robertson, H.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

Tang, C. L.

J. E. Johnson and C. L. Tang, ''Precise determination of turning mirror loss using GaAs/AlGaAs lasers with up to ten 90° interactivity turning mirrors,'' IEEE Photon. Technol. Lett. 4, 24-26 (1992).

Walker, R. G.

R. G. Walker, ''Simple and accurate loss measurement technique for semiconductor optical waveguides,'' Electron. Lett. 21, 581-583 (1985).

White, I. H.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

Wilkinson, C. D. W.

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

Electron. Lett.

R. G. Walker, ''Simple and accurate loss measurement technique for semiconductor optical waveguides,'' Electron. Lett. 21, 581-583 (1985).

IEEE Photon. Technol. Lett.

J. E. Johnson and C. L. Tang, ''Precise determination of turning mirror loss using GaAs/AlGaAs lasers with up to ten 90° interactivity turning mirrors,'' IEEE Photon. Technol. Lett. 4, 24-26 (1992).

D. K. Probst, L. G. Perrymore, B. C. Johnson, R. J. Blackwell, J. A. Priest, and C. L. Balestra, ''Demonstration of an integrated, active 4×4 photonic crossbar,'' IEEE Photon. Technol. Lett. 4, 1139-1140 (1992).
[CrossRef]

R. F. Kalman, L. G. Kazovsky, and J. W. Goodman, ''Space division switches based on semiconductor optical amplifiers,'' IEEE Photon. Technol. Lett. 4, 1048-1051 (1992).
[CrossRef]

J. Lightwave Technol.

J. Vac. Sci. Technol. A

J. H. Marsh, O. P. Kowalski, S. D. McDougall, B. C. Qiu, A. McKee, C. J. Hamilton, R. M. De La Rue, and A. C. Bryce, ''Quantum well intermixing in material systems for 1.5 micron,'' J. Vac. Sci. Technol. A 16, 810-814 (1998).
[CrossRef]

Other

Y. H. Qian, M. Owen, A. C. Bryce, J. H. Marsh, C. D. W. Wilkinson, R. V. Penty, I. H. White, S. Perrin, D. Drogers, and H. Robertson, ''Process development on the monolithic fabrication of an ultra-compact 4×4 optical switch matrix on InP/InGaAsP material,'' in Proceedings of 11th Conference on Indium Phosphide and Related Materials (IPRM), Davos, Switzerland, May 16-20, 1999, pp. 103-106.

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