Abstract
A novel photoacoustic spectroscopy gas sensor based on a micro-resonator has been developed. The photoacoustic cell was designed and fabricated using 3-D printing and the photoacoustic cell volume was compressed significantly. This design greatly reduces the time of manufacturing the micro-resonator and the weight was lighter compared to traditional cells. Furthermore, the acoustic pressure distribution in the 3-D printed photoacoustic cell was analyzed by COMSOL Multiphysics software, which indicated that the strongest acoustic pressure occurred in the middle of the resonant cavity. The performance of the sensor was evaluated by detection of CH4 at normal atmospheric pressure used a near infrared distributed feedback laser emitted at 1653 nm. The characteristic of the photoacoustic signal under different pressures was also investigated. An Allan variance shows that the 3-D printed photoacoustic spectroscopy sensor has the detection limit of 1.44 ppmv (3σ) for CH4 detection at about 200 s integration time.
© 2020 The Author(s)
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