Abstract

We experimentally demonstrated a high sensitive gas pressure sensor, which also has more concise processing steps and lower cost. The sensor was fabricated by splicing the single-mode fiber (SMF) and a short section of hollow-core fiber (HCF) which was filled with a Polydimethylsiloxane (PDMS) film to form an enclosed air microcavity with the length of 55 μm. The thin PDMS film also plays a role in reflecting the beam. The thermo-optical effect and the thickness of PDMS film can affect the cavity that is sensitive to external pressure. When the thickness of the PDMS membrane is 3 μm, the measured gas pressure sensitivity reaches to 52.143 nm/Mpa, the linearity is 99.86%, and the cross-sensitivity of the gas pressure over temperature is lower than 2.51 × 10⁻³ Mpa/°C. Moreover, the compact structure, high sensitivity, high mechanical strength, and convenient fabrication make it suitable for measuring gas pressure in harsh conditions.

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