Abstract

Green micro-cavity (MC) with a quality factor (Q) exceeding 6000 was demonstrated under current injection. The MC consists of two dielectric distributed Bragg reflectors (DBRs) and InGaN/GaN quantum wells (QWs) in between. To form a lateral optical confinement (LOC) structure, a low-index thin AlN layer was used to replace part of the p-GaN. The device showed multi-longitudinal mode emission, from 460 to 540 nm, and higher-order lateral confined modes were clearly observed. By optimizing the cavity fabrication processes and lateral optical confinement, the linewidth of resonant mode is as narrow as 0.082 nm, indicating a high Q value of 6039 in green spectral region. This is the highest value in electrically injected GaN-based MC to the best of our knowledge. In addition, three-dimensional (3D) confined optical states were observed and studied via angle resolved measurement for the first time in an electrically injected GaN-based MC. The emission characteristics of devices as a function of cavity length, as well as the loss mechanism inside the cavity were also systematically analyzed.

High-Q-factor Al₂O₃ micro-trench cavities integrated with silicon nitride waveguides on silicon

Zhan Su, Nanxi Li, Henry C. Frankis, E. Salih Magden, Thomas N. Adam, Gerald Leake, Douglas Coolbaugh, Jonathan D. B. Bradley, and Michael R. Watts
Opt. Express 26(9) 11161-11170 (2018)

Electrically tunable high Q-factor micro-ring resonator based on blue phase liquid crystal cladding

Chun-Ta Wang, Yuan-Cheng Li, Jui-Hao Yu, Cheng Yu Wang, Chih-Wei Tseng, Hung-Chang Jau, Yung-Jui Chen, and Tsung-Hsien Lin
Opt. Express 22(15) 17776-17781 (2014)

High quality factor nitride-based optical cavities: microdisks with embedded GaN/Al(Ga)N quantum dots

M. Mexis, S. Sergent, T. Guillet, C. Brimont, T. Bretagnon, B. Gil, F. Semond, M. Leroux, D. Néel, S. David, X. Chécoury, and P. Boucaud
Opt. Lett. 36(12) 2203-2205 (2011)

Dependencies of micro-pillar cavity quality factors calculated with finite element methods

M. Karl, B. Kettner, S. Burger, F. Schmidt, H. Kalt, and M. Hetterich
Opt. Express 17(2) 1144-1158 (2009)

High Q factor InP photonic crystal nanobeam cavities on silicon wire waveguides

Guillaume Crosnier, Dorian Sanchez, Alexandre Bazin, Paul Monnier, Sophie Bouchoule, Rémy Braive, Grégoire Beaudoin, Isabelle Sagnes, Rama Raj, and Fabrice Raineri
Opt. Lett. 41(3) 579-582 (2016)