Abstract

High temperature sensor with robust performance, minimum footprint, and fast response is desirable for many applications in extreme environments. This article introduces a miniature high temperature sensor based on fiber Fabry-Perot interferometer. The interferometric cavity is directly fabricated on the tip of a 125 μm single-crystal sapphire fiber through femtosecond laser micromachining and CO₂ laser welding with the sapphire fiber as a light-guiding element. The sensor has an all-sapphire structure to ensure both physical and chemical stability. The sensor was tested in the lab from room temperature up to 1455 °C and shows an excellent temperature response with 1.32 nm/ °C at room temperature and full-range average resolution of 0.68 °C. The thermal response of the sensor is evaluated via both numerical simulation and experiment. Owing to the small size and fast thermal diffusivity of sapphire, the thermal response time of ∼1.25 ms has been experimentally demonstrated.

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