Abstract

This paper presents the design, fabrication, and optical characterization of silicon-based thin film Fabry–Pérot filters for spectroscopic sensing applications at short-wave infrared (SWIR: 1.5–2.5 $\mu$ m) and mid-wave infrared (MWIR: 3–5 $\mu$ m) wavelengths. Filter performance is enhanced using distributed Bragg reflectors composed of silicon and air-gap layers for enhanced refractive index contrast. A peak-to-peak surface variation of less than 20 nm in the fabricated micromachined structures was achieved across a large spatial area of 1 mm × 1 mm. Spectral measurements on released Fabry–Pérot filters show excellent agreement with optical simulations. The fabricated Fabry–Pérot filters demonstrate peak transmittance values greater than 50% across all spectral ranges, with measured full width at half maximum values in the range of 50 nm rendering them suitable for use in spectral sensing and imaging in the SWIR and MWIR wavelength ranges.

© 2018 IEEE

Cryogenic mid-wave infrared hyperspectral Fabry-Perot filter based on a tensile-strained single-layer subwavelength grating mirror

Haifeng Mao, Xianshan Dong, Yihui Liu, Dilusha Silva, and Lorenzo Faraone
Opt. Express 30(24) 44071-44084 (2022)

Large-area, low-cost near-infrared meta-surface reflector based on a pixelated two-dimensional silicon disk array

Cheng Chen, Zhao-yi Wang, Zhi-gang Zheng, Yanhua Liu, Wenbin Huang, and Linsen Chen
Opt. Express 28(25) 38355-38365 (2020)

Large-aperture, widely and linearly tunable, electromagnetically actuated MEMS Fabry-Perot filtering chips for longwave infrared spectral imaging

Kui Zhou, Xiejun Wang, Xialei Jing, Fei Wang, Qian Zhang, Fei Chen, Jia Hao, Chenwei Deng, Jian Zhou, and Yiting Yu
Opt. Express 30(23) 42541-42552 (2022)

Design of a Bragg fiber with large mode area for mid-infrared applications

Somnath Ghosh, Sonali Dasgupta, Ravi K. Varshney, David. J. Richardson, and Bishnu P. Pal
Opt. Express 19(22) 21295-21304 (2011)

Silicon-gap Fabry–Perot filter for far-infrared wavelengths

J. J. Bock, M. Kawada, H. Matsuhara, P. L. Richards, and A. E. Lange
Appl. Opt. 34(19) 3651-3657 (1995)