Abstract
Symmetric 1 × 2 splitters of metal–insulator–silicon–insulator–metal (MISIM)
waveguides, which are hybrid plasmonic waveguides with a 190-nm-wide silicon strip
covered by 30-nm-thick SiO2 and sandwiched by copper, are theoretically and
experimentally investigated. The splitters consist of a Y-branch, two 90°
submicrometer-radius bends (SRBs), and two straight MISIM waveguides connecting the
Y-branch and the two SRBs. The Y-branch is an overlap of two oppositely directed SRBs.
All the SRBs of the splitter have the same radius of curvature. The splitter has a
feature that the length of the in-between MISIM waveguides is adjusted to make its input
waveguide split over a short distance into its widely separated output waveguides.
Simulation of the splitters indicates that the radius of curvature of the SRB needs to
be ≥ 0.8 μm to make small the excess losses of the splitters. When the radius of
curvature is 0.8 μm, the splitter which can connect its input waveguide just over 1.6 μm
to its output waveguides spaced 6.4 μm apart has an excess loss of 1.4 dB. The splitters
are realized by using the standard CMOS technology. The measured excess losses of the
fabricated splitters are larger than the calculated excess losses. However, the measured
dependence of the excess loss on the radius of curvature is similar to the calculated
one. Finally, the splitter feature is theoretically confirmed, and the addition of a
tapering region to the Y-branch is discussed to reduce the excess loss of the
Y-branch.
© 2015 IEEE
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