Abstract

This study presents a cost-effective method of producing SiN_x nanopillars on the surfaces of GaN LEDs to enhance light extraction using successive ionic layer adsorption and reaction (SILAR). The size and density distribution of ZnO nanoparticles deposited on SiN_x can be controlled by altering the ratio of water and ethylene glycol during SILAR. The nanoparticles are then used as an etching mask during ICP etching of the SiN_x film. Compared to traditional GaN-based LEDs, the proposed LEDs with SiN_x nanopillars increased light output power by 7.5%–15.2% at 20 mA. This improvement can be attributed mainly to a reduction in Fresnel reflection and increased scattering caused by the addition of SiN_x nanopillars across the emission surface of GaN LEDs.

© 2013 IEEE

Enhanced light extraction efficiency of GaN-based green micro-LED modulating by a thickness-tunable SiO₂ passivation structure

Xing Yan, Xun Hu, Rui Zhou, Na Gao, Yuchao Yao, Yujie Gao, and Junyong Kang
Opt. Express 31(24) 39717-39726 (2023)

Enhancing the light extraction efficiency for AlGaN-based DUV LEDs with a laterally over-etched p-GaN layer at the top of truncated cones

Gai Zhang, Hua Shao, Muyao Zhang, Ziqiang Zhao, Chunshuang Chu, Kangkai Tian, Chao Fan, Yonghui Zhang, and Zi-Hui Zhang
Opt. Express 29(19) 30532-30542 (2021)

Enhanced optical output performance in InGaN/GaN light-emitting diode embedded with SiO₂ nanoparticles

Dae-Woo Jeon, Lee-Woon Jang, Han-Su Cho, Kyeong-Seob Kwon, Myeong-Ji Dong, A. Y. Polyakov, Jin-Woo Ju, Tae-Hoon Chung, Jong Hyeob Baek, and In-Hwan Lee
Opt. Express 22(18) 21454-21459 (2014)

Light extraction efficiency enhancement of GaN-based blue LEDs based on ITO/ InxO ohmic contacts with microstructure formed by annealing in oxygen

Yi Luo, Yiming Bai, Yanjun Han, Hongtao Li, Lai Wang, Jian Wang, Changzheng Sun, Zhibiao Hao, and Bing Xiong
Opt. Express 24(10) A797-A809 (2016)

Enhancement of light extraction in GaN-based light-emitting diodes using rough beveled ZnO nanocone arrays

Zhengmao Yin, Xiaoyan Liu, Yongzhong Wu, Xiaopeng Hao, and Xiangang Xu
Opt. Express 20(2) 1013-1021 (2012)