This paper addresses the systematic approach to optimize series inductance in the inductively peaked pin photodiode for high speed operation beyond 100 Gb/s. For this end, peak distortion analysis is introduced in addition to group delay dispersion technique. Through analytical analysis and comprehensive numerical simulations, inductance values are calculated to optimize vertical eye-opening and signal-to-noise ratio. For verification, an optical waveguide integrated pin photodiode with optimized inductance is fabricated and measured. Using the optical pulse measurement setup, its pulse response is measured, and a full-width at half maximum of 7.34 ps is obtained. The fabricated module is tested using 107 Gb/s return-to-zero signal and shows excellent eye-opening.
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