H. Nishi, T. Tsuchizawa, R. Kou, H. Shinojima, T. Yamada, H.
Kimura, Y. Ishikawa, K. Wada, K. Yamada, "Monolithic integration of a silica AWG and Ge
photodiodes on Si photonic platform for one-chip WDM receiver," Opt. Exp. 20, 9312-9321
(2012).

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B.
J. Luff, M. Asghari, "Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,"
Opt. Exp. 19, 6125 (2011).

C. R. Doerr, L. Chen, L. L. Buhl, Y. Chen, "Eight-channel SiO/Si
N/Si/Ge CWDM receiver," IEEE Photon. Technol. Lett. 23, 1201-1203 (2011).

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R.
Kou, H. Shinojima, S. Itabashi, "Monolithic integration of silicon-, germanium-, and
silica-based optical devices for telecommunications applications," IEEE J. Sel. Top.
Quantum. Electron. 17, 516-525 (2011).

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, R. A. Aroca,
"Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,"
IEEE Photon. Technol. Lett. 23, 869-871 (2011).

D. Dai, Z. Wang, J. F. Bauters, M. Tien, M. J. R. Heck, J.
Daniel, J. E. Bowers, "Low-loss Si_{3}N_{4} arrayed-waveguide grating (de)
multiplexer using nano-core optical waveguide," Opt. Exp. 19, 940-942
(2011).

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, K. Yamada,
S. Itabashi, "Compact and polarization-independent variable optical attenuator based on a
silicon wire waveguide with a carrier injection structure," Jpn. J. Appl. Phys. 49, 04DG20
(2010).

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, K.
Rai, K. Yamada, S. Itabashi, "Monolithic integration of a silica-based arrayed waveguide
grating filter and silicon variable optical attenuators based on p-i-n carrier-injection
structures," Appl. Phys. Exp. 3, 102203 (2010).

K. Wörhoff, C. G. H. Roeloffzen, R. M. de Ridder, A. Driessen,
P. V. Lambeck, "Design and application of compact and highly tolerant
polarization-independent waveguides," Journal of Lightwave Technology 25, 1276-1283
(2007).

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen,
J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in
silicon-on-insulator photonic wires," IEEE J. Sel. Quantum Electron. 12, 1394-1401
(2006).

K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide
grating of 70 × 60 μm^{2} size based on Si photonic wire waveguides,"
Electron. Lett. 41, 801 (2005).

G.-L. Bona, R. Germann, B. J. Offrein, "SiON
high-refractive-index waveguide and planar lightwave circuits," IBM J. Res. Develop. 47,
239-249 (2003).

R. Kasahara, M. Itoh, Y. Hida, T. Saida, Y. Inoue, Y. Hibino,
"Birefringence compensated silica-based waveguide with undercladding ridge," Electron. Lett.
38, 1178 (2002).

S. Bae, D. G. Farber, S. J. Fonash, "Characteristics of
low-temperature silicon nitride (SiN_{x}:H) using electron cyclotron
resonance plasma," Solid-State Electron. 44, 1355-1360 (2000).

C. K. Nadler, E. K. Wildermuth, M. Lanker, W. Hunziker, H.
Melchior, "Polarization insensitive, low-loss, low-crosstalk wavelength multiplexer
modules," IEEE J. Sel. Quantum Electron. 5, 1407-1412 (1999).

K. Wörhoff, B. J. Offrein, P. V. Lambeck, G. L. Bona, A.
Driessen, "Birefringence compensation applying double-core waveguiding structures," IEEE
Photon. Technol. Lett. 11, 206-208 (1999).

S. Suzuki, S. Sumida, Y. Inoue, M. Ishii, Y. Ohmori,
"Polarisation-insensitive arrayed-waveguide gratings using dopant-rich silica-based glass
with thermal expansion adjusted to Si substrate," Electron. Lett. 33, 1173
(1997).

O. Mitomi, K. Kasaya, H. Miyazawa, "Design of a single-mode
tapered waveguide for low-loss chip-to-fiber coupling," IEEE J. Quantum Electron. 30,
1787-1793 (1994).

A. S. Sudbo, "Film mode matching: a versatile numerical method
for vector mode field calculations in dielectric waveguides," Pure Appl. Opt. 2, 211-233
(1993).

H. Takahashi, Y. Hibino, Y. Ohmori, M. Kawachi,
"Polarization-insensitive arrayed-waveguide wavelength multiplexer with birefringence
compensating film," IEEE Photon. Technol. Lett. 5, 707-709 (1993).

M. Kawachi, "Silica waveguides on silicon and their application
to integrated-optic components," Opt. Quantum Electron. 22, 391-416 (1990).

T. Fuyuki, T. Saitoh, H. Matsunami, "Low-temperature deposition
of hydrogen-free silicon oxynitride without stress by the remote plasma technique," Jpn. J.
Appl. Phys. 2247-2250 (1990).

S. Matsuo, M. Kiuchi, "Low temperature chemical vapor deposition
method utilizing an electron cyclotron resonance plasma," Jpn. J. Appl. Phys. 22, L210-L212
(1983).

G. W. Scherer, "Stress-induced index profile distortion in
optical waveguides," Appl. Opt. 19, 2000 (1980).

H. J. Lee, C. H. Henry, K. J. Orlowsky, R. F. Kazarinov, T. Y.
Kometani, "Refractive-index dispersion of phosphosilicate glass, thermal oxide, and silicon
nitride films on silicon," Appl. Opt. 27, 4104 (1988).

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, S. Park, K.
Rai, K. Yamada, S. Itabashi, "Monolithic integration of a silica-based arrayed waveguide
grating filter and silicon variable optical attenuators based on p-i-n carrier-injection
structures," Appl. Phys. Exp. 3, 102203 (2010).

S. Suzuki, S. Sumida, Y. Inoue, M. Ishii, Y. Ohmori,
"Polarisation-insensitive arrayed-waveguide gratings using dopant-rich silica-based glass
with thermal expansion adjusted to Si substrate," Electron. Lett. 33, 1173
(1997).

K. Sasaki, F. Ohno, A. Motegi, T. Baba, "Arrayed waveguide
grating of 70 × 60 μm^{2} size based on Si photonic wire waveguides,"
Electron. Lett. 41, 801 (2005).

R. Kasahara, M. Itoh, Y. Hida, T. Saida, Y. Inoue, Y. Hibino,
"Birefringence compensated silica-based waveguide with undercladding ridge," Electron. Lett.
38, 1178 (2002).

G.-L. Bona, R. Germann, B. J. Offrein, "SiON
high-refractive-index waveguide and planar lightwave circuits," IBM J. Res. Develop. 47,
239-249 (2003).

O. Mitomi, K. Kasaya, H. Miyazawa, "Design of a single-mode
tapered waveguide for low-loss chip-to-fiber coupling," IEEE J. Quantum Electron. 30,
1787-1793 (1994).

C. K. Nadler, E. K. Wildermuth, M. Lanker, W. Hunziker, H.
Melchior, "Polarization insensitive, low-loss, low-crosstalk wavelength multiplexer
modules," IEEE J. Sel. Quantum Electron. 5, 1407-1412 (1999).

W. Bogaerts, P. Dumon, D. V. Thourhout, D. Taillaert, P. Jaenen,
J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in
silicon-on-insulator photonic wires," IEEE J. Sel. Quantum Electron. 12, 1394-1401
(2006).

T. Tsuchizawa, K. Yamada, T. Watanabe, S. Park, H. Nishi, R.
Kou, H. Shinojima, S. Itabashi, "Monolithic integration of silicon-, germanium-, and
silica-based optical devices for telecommunications applications," IEEE J. Sel. Top.
Quantum. Electron. 17, 516-525 (2011).

C. R. Doerr, L. Chen, L. L. Buhl, Y. Chen, "Eight-channel SiO/Si
N/Si/Ge CWDM receiver," IEEE Photon. Technol. Lett. 23, 1201-1203 (2011).

H. Takahashi, Y. Hibino, Y. Ohmori, M. Kawachi,
"Polarization-insensitive arrayed-waveguide wavelength multiplexer with birefringence
compensating film," IEEE Photon. Technol. Lett. 5, 707-709 (1993).

K. Wörhoff, B. J. Offrein, P. V. Lambeck, G. L. Bona, A.
Driessen, "Birefringence compensation applying double-core waveguiding structures," IEEE
Photon. Technol. Lett. 11, 206-208 (1999).

L. Chen, C. Doerr, L. Buhl, Y. Baeyens, R. A. Aroca,
"Monolithically integrated 40-wavelength demultiplexer and photodetector array on silicon,"
IEEE Photon. Technol. Lett. 23, 869-871 (2011).

K. Wörhoff, C. G. H. Roeloffzen, R. M. de Ridder, A. Driessen,
P. V. Lambeck, "Design and application of compact and highly tolerant
polarization-independent waveguides," Journal of Lightwave Technology 25, 1276-1283
(2007).

T. Fuyuki, T. Saitoh, H. Matsunami, "Low-temperature deposition
of hydrogen-free silicon oxynitride without stress by the remote plasma technique," Jpn. J.
Appl. Phys. 2247-2250 (1990).

H. Nishi, T. Tsuchizawa, T. Watanabe, H. Shinojima, K. Yamada,
S. Itabashi, "Compact and polarization-independent variable optical attenuator based on a
silicon wire waveguide with a carrier injection structure," Jpn. J. Appl. Phys. 49, 04DG20
(2010).

S. Matsuo, M. Kiuchi, "Low temperature chemical vapor deposition
method utilizing an electron cyclotron resonance plasma," Jpn. J. Appl. Phys. 22, L210-L212
(1983).

D. Dai, Z. Wang, J. F. Bauters, M. Tien, M. J. R. Heck, J.
Daniel, J. E. Bowers, "Low-loss Si_{3}N_{4} arrayed-waveguide grating (de)
multiplexer using nano-core optical waveguide," Opt. Exp. 19, 940-942
(2011).

H. Nishi, T. Tsuchizawa, R. Kou, H. Shinojima, T. Yamada, H.
Kimura, Y. Ishikawa, K. Wada, K. Yamada, "Monolithic integration of a silica AWG and Ge
photodiodes on Si photonic platform for one-chip WDM receiver," Opt. Exp. 20, 9312-9321
(2012).

D. Feng, N.-N. Feng, C.-C. Kung, H. Liang, W. Qian, J. Fong, B.
J. Luff, M. Asghari, "Compact single-chip VMUX/DEMUX on the silicon-on-insulator platform,"
Opt. Exp. 19, 6125 (2011).

M. Kawachi, "Silica waveguides on silicon and their application
to integrated-optic components," Opt. Quantum Electron. 22, 391-416 (1990).

A. S. Sudbo, "Film mode matching: a versatile numerical method
for vector mode field calculations in dielectric waveguides," Pure Appl. Opt. 2, 211-233
(1993).

S. Bae, D. G. Farber, S. J. Fonash, "Characteristics of
low-temperature silicon nitride (SiN_{x}:H) using electron cyclotron
resonance plasma," Solid-State Electron. 44, 1355-1360 (2000).

(2012) “FIMMWAVE Version 5.4.1,” Photon Design.

R. Kou, H. Fukuda, T. Tsuchizawa, H. Nishi, T. Hiraki, K.
Yamada, "Silicon/silica-hybrid delay line interferometer for DPSK demodulation," Proc. IEEE
Group IV Photonics 2012 (GFP2012) (2012).