Abstract

We propose a new technique for the multiorder dispersion engineering of nanophotonic strip waveguides. Unlike other techniques, the method does not require wafers with customized parameters and is fully compatible with standard wafers used in nanophotonics. The dispersion management is based on the application of nanometer-thick TiO<sub>2</sub> layer formed by atomic layer deposition. The method is simple and reliable and allows good control of dispersion up to the fourth-order terms. The additional advantages are the reduction of propagation losses and partial compensation of fabrication tolerances.

© 2012 IEEE

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2011 (2)

2010 (2)

2008 (3)

2007 (3)

M. A. Foster, A. C. Turner, R. Salem, M. Lipson, A. L. Gaeta, "Broad-band continuous-wave parametric wavelength conversion in silicon nanowaveguides," Opt. Express 15, 12949-12958 (2007).

I.-W. Hsieh, X. Chen, X. Liu, J. I. Dadap, N. C. Panoiu, C.-Y. Chou, F. Xia, W. M. Green, Y. A. Vlasov, R. M. Osgood, "Supercontinuum generation in silicon photonic wires," Opt. Express 15, 15242-15249 (2007).

J. Jágerská, N. Le Thomas, R. Houdré, J. Bolten, C. Moormann, T. Wahlbrink, J. Ctyroký, M. Waldow, M. Först, "Dispersion properties of silicon nanophotonic waveguides investigated with Fourier optics," Opt. Lett. 32, 2723-2725 (2007).

2006 (4)

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, A. L. Gaeta, "Broad-band optical parametric gain on a silicon photonic chip," Nature 441, 960-963 (2006).

Q. Lin, J. Zhang, P. M. Fauchet, G. P. Agrawal, "Ultrabroadband parametric generation and wavelength conversion in silicon waveguides," Opt. Express 14, 4786-4799 (2006).

E. Dulkeith, F. Xia, L. Schares, W. M. Green, L. Sekaric, Y. A. Vlasov, "Group index and group velocity dispersion in silicon-on-insulator photonic wires," Opt. Express 14, 3853-3863 (2006).

A. C. Turner, C. Manolatou, B. S. Schmidt, M. Lipson, M. A. Foster, J. E. Sharping, A. L. Gaeta, "Tailored anomalous group-velocity dispersion in silicon channel waveguides," Opt. Express 14, 4357-4362 (2006).

2005 (2)

R. L. Puurunen, "Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process," J. Appl. Phys. 97, 121301-1-121301-52 (2005).

C. M. B. Cordeiro, W. J. Wadsworth, T. A. Birks, P. St. J. Russell, "Engineering the dispersion of tapered fibers for supercontinuum generation with a 1064 nm pump laser," Opt. Lett. 30, 1980-1982 (2005).

2003 (1)

2002 (1)

H. K. Tsang, C. S. Wong, T. K. Liang, I. E. Day, S. W. Roberts, A. Harpin, J. Drake, M. Asghari, "Optical dispersion, two-photon absorption and self-phase modulation in silicon waveguides at 1.5 μm wavelength," Appl. Phys. Lett. 80, 416-418 (2002).

1984 (1)

B. Tatian, "Fitting refractive-index data with the Sellmeier dispersion formula," Appl. Opt. 23, 4477-4485 (1984).

Appl. Opt. (1)

B. Tatian, "Fitting refractive-index data with the Sellmeier dispersion formula," Appl. Opt. 23, 4477-4485 (1984).

Appl. Phys. Lett. (1)

H. K. Tsang, C. S. Wong, T. K. Liang, I. E. Day, S. W. Roberts, A. Harpin, J. Drake, M. Asghari, "Optical dispersion, two-photon absorption and self-phase modulation in silicon waveguides at 1.5 μm wavelength," Appl. Phys. Lett. 80, 416-418 (2002).

Appl. Opt. (1)

J. Appl. Phys. (1)

R. L. Puurunen, "Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process," J. Appl. Phys. 97, 121301-1-121301-52 (2005).

Nature (1)

M. A. Foster, A. C. Turner, J. E. Sharping, B. S. Schmidt, M. Lipson, A. L. Gaeta, "Broad-band optical parametric gain on a silicon photonic chip," Nature 441, 960-963 (2006).

Opt. Express (5)

I.-W. Hsieh, X. Chen, X. Liu, J. I. Dadap, N. C. Panoiu, C.-Y. Chou, F. Xia, W. M. Green, Y. A. Vlasov, R. M. Osgood, "Supercontinuum generation in silicon photonic wires," Opt. Express 15, 15242-15249 (2007).

Q. Lin, J. Zhang, P. M. Fauchet, G. P. Agrawal, "Ultrabroadband parametric generation and wavelength conversion in silicon waveguides," Opt. Express 14, 4786-4799 (2006).

M. A. Foster, A. C. Turner, R. Salem, M. Lipson, A. L. Gaeta, "Broad-band continuous-wave parametric wavelength conversion in silicon nanowaveguides," Opt. Express 15, 12949-12958 (2007).

A. C. Turner, C. Manolatou, B. S. Schmidt, M. Lipson, M. A. Foster, J. E. Sharping, A. L. Gaeta, "Tailored anomalous group-velocity dispersion in silicon channel waveguides," Opt. Express 14, 4357-4362 (2006).

E. Dulkeith, F. Xia, L. Schares, W. M. Green, L. Sekaric, Y. A. Vlasov, "Group index and group velocity dispersion in silicon-on-insulator photonic wires," Opt. Express 14, 3853-3863 (2006).

Opt. Express (6)

Opt. Lett. (3)

Other (3)

COMSOL, Inc.BurlingtonMAUSACOMSOL Multiphysics http://www.comsol.com/.

M. Bass, Handbook of Optics (McGraw-Hill, 1995).

G. P. Agrawal, Nonlinear Fiber Optics (Academic, 2001).

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