Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Journal of Lightwave Technology
  • Vol. 30,
  • Issue 11,
  • pp. 1764-1770
  • (2012)

Compact Integration of Optical Sources and Detectors on SOI for Optical Interconnects Fabricated in a 200 mm CMOS Pilot Line

Not Accessible

Your library or personal account may give you access

Abstract

As the demand for bandwidth increases, optical interconnects are coming closer and closer to the chip. Optical interconnects on silicon-on-insulator (SOI) are desirable as this allows for integration with CMOS and the mature processing can be used for photonic integrated circuits. A heterogeneous integration process can be used to include III-V active optical components on SOI. For dense integration compact sources and detectors are required, but they typically need different epitaxial structures to be efficient which limits the integration density. We propose to use an epitaxial structure, which contains both the layers for a laser and for a detector, hereby enabling very compact integration of sources and detectors. Microdisk lasers and waveguide detectors using this epi were completely fabricated in a 200 mm CMOS pilot line and the results are discussed here.

© 2012 IEEE

PDF Article
More Like This
Heterogeneously integrated III-V laser on thin SOI with compact optical vertical interconnect access

Jing Pu, Kim Peng Lim, Doris Keh Ting Ng, Vivek Krishnamurthy, Chee Wei Lee, Kun Tang, Anthony Yew Seng Kay, Ter Hoe Loh, and Qian Wang
Opt. Lett. 40(7) 1378-1381 (2015)

Demonstration of heterogeneous III–V/Si integration with a compact optical vertical interconnect access

Doris Keh Ting Ng, Qian Wang, Jing Pu, Kim Peng Lim, Yongqiang Wei, Yadong Wang, Yicheng Lai, and Seng Tiong Ho
Opt. Lett. 38(24) 5353-5356 (2013)

Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits

Gunther Roelkens, Joost Brouckaert, Dirk Taillaert, Pieter Dumon, Wim Bogaerts, Dries Van Thourhout, Roel Baets, Richard Nötzel, and Meint Smit
Opt. Express 13(25) 10102-10108 (2005)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved