S. Zamek, D. T. Tan, M. Khajavikhan, M. Ayache, M. P. Nezhad, Y. Fainman, "Compact chip-scale filter based
on curved waveguide Bragg gratings," Opt. Lett. 35, 3477-3479 (2010).

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, R. Baets, "Subnanometer linewidth uniformity in silicon nanophotonic
waveguide devices using CMOS fabrication technology," IEEE
J. Sel. Top. Quantum Elect. 16, 316-324 (2010).

C. Ciminelli, F. Dell'Olio, V. Passaro, M. Armenise, "Fully three-dimensional accurate
modeling of scattering loss in optical waveguides," Opt.
Quant. Electron 41, 285-298 (2009).

S. Sardo, F. Giacometti, S. Doneda, U. Colombo, M. Di Muri, A. Donghi, R. Morson, G. Mutinati, A. Nottola, M. Gentili, M. C. Ubaldi, "Line edge roughness (LER) reduction
strategy for SOI waveguides fabrication," Microelectron.
Eng. 85, 1210-1213 (2008).

P. P. Naulleau, J. P. Cain, "Experimental and model-based
study of the robustness of line-edge roughness metric extraction in the presence
of noise," J. Vac. Sci. Technol., B 25, 1647-1657 (2007).

M. W. Pruessner, T. H. Stievater, M. S. Ferraro, W. S. Rabinovich, "Thermo-optic tuning and switching
in SOI waveguide Fabry-Perot microcavities," Opt.
Expr. 15, 7557-7563 (2007).

C. A. Barrios, "Electrooptic modulation of
multisilicon-on-insulator photonic wires," J.
Lightw. Technol. 24, 2146-2155 (2006).

F. Gan, F. X. Kartner, "High-speed silicon electrooptic modulator
design," IEEE Photon. Technol. Lett. 17, 1007-1009 (2005).

T. Barwicz, H. A. Haus, "Three-dimensional analysis
of scattering losses due to sidewall roughness in microphotonic waveguides," J. Lightw. Technol. 23, 2719-2732 (2005).

M. A. Webster, R. M. Pafchek, G. Sukumaran, T. L. Koch, "Low-loss quasi-planar ridge
waveguides formed on thin silicon-on-Insulator," Appl.
Phys. Lett. 87, 231108 (2005).

V. Constantoudis, G. P. Patsis, E. Gogolides, "Photoresist line-edge roughness
analysis using scaling concepts," J. Microlithogr.,
Microfabr. Microsyst. 3, 429-435 (2004).

S. Spector, M. W. Geis, D. Lennon, R. C. Williamson, T. M. Lyszczarz, "Hybrid multi-mode/single-mode
waveguides for low loss," Opt. Amplif. Applicat./Integr.
Photon. Res. (2004) IThE5.

K. Dossou, M. Fontaine, "A high order isoparametric
finite element method for the computation of waveguide modes," Comput. Methods Appl. Mech. Engrg 194, 837-858 (2004).

G. P. Patsis, V. Constantoudis, A. Tserepi, E. Gogolides, G. Grozev, "Quantification of line-edge
roughness of photoresists. I. A comparison between off-line and on-line analysis
of top-down scanning electron microscopy images," J.
Vac. Sci. Technol., B 21, 1008-1018 (2003).

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agarwal, J. Foresi, L. C. Kimerling, "Effect of size and roughness
on light transmission in a Si/SiO$_2$ waveguide: Experiments and model," Appl.
Phys. Lett. 77, 1617 (2000).

F. Ladouceur, J. D. Love, T. J. Senden, "Measurement of surface roughness
in buried channel waveguides," Electron. Lett. 28, 1321-1322 (1992).

K. K. Lee, D. R. Lim, H.-C. Luan, A. Agarwal, J. Foresi, L. C. Kimerling, "Effect of size and roughness
on light transmission in a Si/SiO$_2$ waveguide: Experiments and model," Appl.
Phys. Lett. 77, 1617 (2000).

M. A. Webster, R. M. Pafchek, G. Sukumaran, T. L. Koch, "Low-loss quasi-planar ridge
waveguides formed on thin silicon-on-Insulator," Appl.
Phys. Lett. 87, 231108 (2005).

K. Dossou, M. Fontaine, "A high order isoparametric
finite element method for the computation of waveguide modes," Comput. Methods Appl. Mech. Engrg 194, 837-858 (2004).

F. Ladouceur, J. D. Love, T. J. Senden, "Measurement of surface roughness
in buried channel waveguides," Electron. Lett. 28, 1321-1322 (1992).

S. K. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, R. Baets, "Subnanometer linewidth uniformity in silicon nanophotonic
waveguide devices using CMOS fabrication technology," IEEE
J. Sel. Top. Quantum Elect. 16, 316-324 (2010).

F. Gan, F. X. Kartner, "High-speed silicon electrooptic modulator
design," IEEE Photon. Technol. Lett. 17, 1007-1009 (2005).

C. A. Barrios, "Electrooptic modulation of
multisilicon-on-insulator photonic wires," J.
Lightw. Technol. 24, 2146-2155 (2006).

G. P. Patsis, V. Constantoudis, A. Tserepi, E. Gogolides, G. Grozev, "Quantification of line-edge
roughness of photoresists. I. A comparison between off-line and on-line analysis
of top-down scanning electron microscopy images," J.
Vac. Sci. Technol., B 21, 1008-1018 (2003).

T. Barwicz, H. A. Haus, "Three-dimensional analysis
of scattering losses due to sidewall roughness in microphotonic waveguides," J. Lightw. Technol. 23, 2719-2732 (2005).

T. Erdogan, "Fiber grating spectra," J. Lightwave Technol. 15, 1277-1294 (1997).

V. Constantoudis, G. P. Patsis, E. Gogolides, "Photoresist line-edge roughness
analysis using scaling concepts," J. Microlithogr.,
Microfabr. Microsyst. 3, 429-435 (2004).

P. P. Naulleau, J. P. Cain, "Experimental and model-based
study of the robustness of line-edge roughness metric extraction in the presence
of noise," J. Vac. Sci. Technol., B 25, 1647-1657 (2007).

S. Sardo, F. Giacometti, S. Doneda, U. Colombo, M. Di Muri, A. Donghi, R. Morson, G. Mutinati, A. Nottola, M. Gentili, M. C. Ubaldi, "Line edge roughness (LER) reduction
strategy for SOI waveguides fabrication," Microelectron.
Eng. 85, 1210-1213 (2008).

M. W. Pruessner, T. H. Stievater, M. S. Ferraro, W. S. Rabinovich, "Thermo-optic tuning and switching
in SOI waveguide Fabry-Perot microcavities," Opt.
Expr. 15, 7557-7563 (2007).

C. Ciminelli, F. Dell'Olio, V. Passaro, M. Armenise, "Fully three-dimensional accurate
modeling of scattering loss in optical waveguides," Opt.
Quant. Electron 41, 285-298 (2009).

S. Spector, M. W. Geis, D. Lennon, R. C. Williamson, T. M. Lyszczarz, "Hybrid multi-mode/single-mode
waveguides for low loss," Opt. Amplif. Applicat./Integr.
Photon. Res. (2004) IThE5.

K. K. Lee, D. R. Lim, L. C. Kimerling, J. Shin, F. Cerrina, "Fabrication of ultralow-loss Si/SiO$_2$ waveguides by
roughness reduction," Opt. Lett. 26, 1888-1890 (2001).

S. Zamek, D. T. Tan, M. Khajavikhan, M. Ayache, M. P. Nezhad, Y. Fainman, "Compact chip-scale filter based
on curved waveguide Bragg gratings," Opt. Lett. 35, 3477-3479 (2010).

K. P. Yap, J. Lapointe, B. Lamontagne, A. Delâge, A. Bogdanov, S. Janz, B. Syretta, "SOI waveguide fabrication process development
using star coupler scattering loss measurements," Proc.
Device and Process Technologies for Microelectronics, MEMS, Photonics, and
Nanotechnology IV, SPIE (2008) pp. 680014.

P. Dumon, Ultra-Compact integrated optical filters in silicon-on-insulator
by means of wafer-scale technology Ph.D. dissertation Universiteit GhentGhent, Belgium (2006).

A. D. Simard, Y. Painchaud, S. LaRochelle, "Integrated Bragg gratings in
curved waveguides," 23rd Annu. Meeting of the
Photonics Society Denver (2010) ThU3.

A. H. Atabaki, M. Soltani, S. Yegnanarayanan, A. A. Eftekhar, A. Adibi, "Optimization of metallic micro-heaters for
reconfigurable silicon photonics," Conf. on
Lasers and Electro-Optics (CLEO) and the Int. Quantum Electronics Conf. (IQEC) (2009) CThB4.

J. Skaar, Synthesis and characterization of fiber Bragg gratings Ph.D. dissertation Norwegian Univ. of Sci.
Technol.Trondheim, Norway (2000).