Abstract

We present the development of application-specific silicon-on-insulator SOI nanowire ring and racetrack resonators designed to assist semiconductor optical amplifier (SOA)-based all-optical wavelength conversion. We demonstrate the fabrication of fix resonance racetrack resonators exhibiting coupling gaps as low as 160 nm and tunable ring resonators with coupling gaps ${<}90$ nm. The resonators are cascaded after commercial 40Gb/s SOAs to realize chirp filtering of the optical data signals through high-resolution spectral sampling. We experimentally demonstrate inverted and non-inverted SOI resonator-assisted all-optical wavelength conversion at 40 Gb/s and 160 Gb/s with power penalties ${<}3$ dB.

© 2011 IEEE

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  10. N. Ophir, K. Padmaraju, A. Biberman, L. Chen, K. Preston, M. Lipson, K. Bergman, "First demonstration of error-free operation of a full silicon on-chip photonic link," presented at the Opt. Fiber Commun. Conf. Los AngelesCA (2011) Paper OWZ3.
  11. K. Vyrsokinos, L. Stampoulidis, Z. Sheng, E. Kehayas, P. Bakopoulos, D. Petrantonakis, C. Stamatiadis, Ch. Kouloumentas, P. Zakynthinos, R. Dekker, E. J. Klein, D. Van Thourhout, M. T. Kothorst, H. Avramopoulos, "Higher-order micro-ring resonator assisted wavelength converters for scalable and power efficient photonic routers," presented at the Eur. Conf. Opt. Commun. ViennaAustria (2009) Paper P2.08.
  12. C. Stamatiadis, D. Petrantonakis, P. Bakopoulos, E. Kehayas, P. Zakynthinos, Ch. Kouloumentas, L. Stampoulidis, Z. Sheng, E. Kehayas, P. Bakopoulos, D. Petrantonakis, C. Stamatiadis, C. Kouloumentas, P. Zakynthinos, R. Dekker, E. J. Klein, D. Van Thourhout, M. T. Kothorst, H. Avramopoulos, "First demonstration of WDM-enabled all-optical wavelength conversion with a SOA and a 2nd order micro-ring resonator ROADM," presented at the Opt. Fiber Commun. Conf. San DiegoCA (2009) Paper PDPA8.
  13. C. Stamatiadis, K. Vyrsokinos, L. Stampoulidis, A. Maziotis, Z. Sheng, D. Van Thourhout, J. Bolten, M. Karl, T. Wahlbrink, H. Avramopoulos, "All-optical wavelength conversion at 160 Gb/s using an SOA and a 3rd order SOI nanowire periodic filter," presented at the IEEE Photon. Soc. Annu. Meet. 2010 DenverCO (2010).
  14. M. Popovic, M. Watts, T. Barwicz, P. Rakich, L. Socci, E. Ippen, F. Kartner, H. Smith, "High-index-contrast, wide-FSR microring-resonator filter design and realization with frequency-shift compensation," presented at the Opt. Fiber Commun. Conf. AnaheimCA (2005) Paper OFK1.
  15. L. Liu, T. Spuesens, D. Van Thourhout, G. Morthier, L. Grenouillet, N. Olivier, J. Fedeli, P. Romeo, P. Régreny, F. Mandorlo, R. Orobtchouk, "200 mm wafer scale III-V/SOI technology for all-optical network-on-chip and signal processing," presented at the 7th IEEE Int. Conf. Group IV Photon. (GFP) BeijingChina (2010).
  16. Y. Liu, E. Tangdiongga, Z. Li, H. de Waardt, A. M. J. Koonen, G. D. Khoe, H. J. S. Dorren, "Error-free 320 Gbit/s SOA-based wavelength conversion using optical filtering," presented at the Opt. Fiber Commun. Conf. AnaheimCA (2006) Paper PDP28.
  17. W. Henschel, Y. M. Georgiev, H. Kurz, "Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist," J. Vac. Sci. Technol. B21 5, 2018-2024 (2003).
  18. T. Wahlbrink, T. Mollenhauer, Y. M. Georgiev, W. Henschel, J. K. Efavi, H. D. B. Gottlob, M. C. Lemme, H. Kurz, J. Niehusmann, P. H. Bolivar, "Highly selective etch process for silicon-on-insulator nano devices," Microelectron. Eng. 78–79, 212-217 (2005).
  19. T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, H. Kurz, "Fabrication of high efficiency SOI taper structures," Microelectron. Eng. 86, 1117-1119 (2009).
  20. J. Dong, X. Zhang, S. Fu, J. Xu, P. Shum, D. Huang, "Ultrafast all-optical signal processing based on single semiconductor optical amplifier and optical filtering," IEEE J. Sel. Topics Quantum Electron. 14, 770-778 (2008).
  21. D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, G. Roelkens, "High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform," Opt. Exp. 18, 18278-18283 (2010).

2010 (1)

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, G. Roelkens, "High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform," Opt. Exp. 18, 18278-18283 (2010).

2009 (2)

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, H. Kurz, "Fabrication of high efficiency SOI taper structures," Microelectron. Eng. 86, 1117-1119 (2009).

B. G. Lee, A. Biberman, N. Sherwood-Droz, C. B. Poitras, M. Lipson, K. Bergman, "High-speed 2$\,\times\,$2 switch for multiwavelength silicon- photonic networks-on-chip," J. Lightw. Technol. 27, 2900-2907 (2009).

2008 (2)

U. Plachetka, N. Koo, T. Wahlbrink, J. Bolten, M. Waldow, T. Plötzing, M. Först, H. Kurz, "Fabrication of photonic ring resonator device in silicon waveguide technology using soft UV-nanoimprint lithography," IEEE Photon. Technol. Lett. 20, 490-492 (2008).

J. Dong, X. Zhang, S. Fu, J. Xu, P. Shum, D. Huang, "Ultrafast all-optical signal processing based on single semiconductor optical amplifier and optical filtering," IEEE J. Sel. Topics Quantum Electron. 14, 770-778 (2008).

2007 (1)

F. Xia, L. Sekaric, Y. Vlasov, "Ultra-compact optical buffers on a silicon chip," Nature Photon. 1, 65-71 (2007).

2006 (4)

W. Bogaerts, P. Dumon, D. Van Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonic wires," IEEE J. Sel. Topics Quantum Electron. 12, 1394-1401 (2006).

B. Jalali, S. Fathpour, "Silicon photonics," J. Lightw. Technol. 24, 4600-4615 (2006).

N. Izhaky, M. T. Morse, S. Koehl, O. Cohen, D. Rubin, A. Barkai, G. Sarid, R. Cohen, M. J. Paniccia, "Development of CMOS-compatible integrated silicon photonics devices," IEEE J. Sel. Topics Quantum Electron. 12, 1688-1698 (2006).

S. Janz, P. Cheben, D. Dalacu, A. Delage, A. Densmore, B. Lamontagne, M. J. Picard, E. Post, J. H. Schmid, P. Waldron, D. X. Xu, K. P. Yap, W. N. Ye, "Microphotonics elements for integration on the silicon-on-insulator waveguide platform," IEEE J. Sel. Topics Quantum Electron. 12, 1402-1415 (2006).

2005 (2)

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takashi, T. Shoji, E. Tamechica, S. Itabashi, H. Morita, "Microphotonics devices based on silicon microfabrication technology," IEEE J. Sel. Topics Quantum Electron. 11, 232-240 (2005).

T. Wahlbrink, T. Mollenhauer, Y. M. Georgiev, W. Henschel, J. K. Efavi, H. D. B. Gottlob, M. C. Lemme, H. Kurz, J. Niehusmann, P. H. Bolivar, "Highly selective etch process for silicon-on-insulator nano devices," Microelectron. Eng. 78–79, 212-217 (2005).

2003 (1)

W. Henschel, Y. M. Georgiev, H. Kurz, "Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist," J. Vac. Sci. Technol. B21 5, 2018-2024 (2003).

IEEE J. Sel. Topics Quantum Electron. (1)

N. Izhaky, M. T. Morse, S. Koehl, O. Cohen, D. Rubin, A. Barkai, G. Sarid, R. Cohen, M. J. Paniccia, "Development of CMOS-compatible integrated silicon photonics devices," IEEE J. Sel. Topics Quantum Electron. 12, 1688-1698 (2006).

IEEE J. Sel. Topics Quantum Electron. (1)

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takashi, T. Shoji, E. Tamechica, S. Itabashi, H. Morita, "Microphotonics devices based on silicon microfabrication technology," IEEE J. Sel. Topics Quantum Electron. 11, 232-240 (2005).

IEEE J. Sel. Topics Quantum Electron. (1)

S. Janz, P. Cheben, D. Dalacu, A. Delage, A. Densmore, B. Lamontagne, M. J. Picard, E. Post, J. H. Schmid, P. Waldron, D. X. Xu, K. P. Yap, W. N. Ye, "Microphotonics elements for integration on the silicon-on-insulator waveguide platform," IEEE J. Sel. Topics Quantum Electron. 12, 1402-1415 (2006).

IEEE J. Sel. Topics Quantum Electron. (2)

W. Bogaerts, P. Dumon, D. Van Thourhout, D. Taillaert, P. Jaenen, J. Wouters, S. Beckx, V. Wiaux, R. G. Baets, "Compact wavelength-selective functions in silicon-on-insulator photonic wires," IEEE J. Sel. Topics Quantum Electron. 12, 1394-1401 (2006).

J. Dong, X. Zhang, S. Fu, J. Xu, P. Shum, D. Huang, "Ultrafast all-optical signal processing based on single semiconductor optical amplifier and optical filtering," IEEE J. Sel. Topics Quantum Electron. 14, 770-778 (2008).

IEEE Photon. Technol. Lett. (1)

U. Plachetka, N. Koo, T. Wahlbrink, J. Bolten, M. Waldow, T. Plötzing, M. Först, H. Kurz, "Fabrication of photonic ring resonator device in silicon waveguide technology using soft UV-nanoimprint lithography," IEEE Photon. Technol. Lett. 20, 490-492 (2008).

J. Lightw. Technol. (1)

B. G. Lee, A. Biberman, N. Sherwood-Droz, C. B. Poitras, M. Lipson, K. Bergman, "High-speed 2$\,\times\,$2 switch for multiwavelength silicon- photonic networks-on-chip," J. Lightw. Technol. 27, 2900-2907 (2009).

J. Lightw. Technol. (1)

B. Jalali, S. Fathpour, "Silicon photonics," J. Lightw. Technol. 24, 4600-4615 (2006).

J. Vac. Sci. Technol. B21 (1)

W. Henschel, Y. M. Georgiev, H. Kurz, "Study of a high contrast process for hydrogen silsesquioxane as a negative tone electron beam resist," J. Vac. Sci. Technol. B21 5, 2018-2024 (2003).

Microelectron. Eng. (2)

T. Wahlbrink, T. Mollenhauer, Y. M. Georgiev, W. Henschel, J. K. Efavi, H. D. B. Gottlob, M. C. Lemme, H. Kurz, J. Niehusmann, P. H. Bolivar, "Highly selective etch process for silicon-on-insulator nano devices," Microelectron. Eng. 78–79, 212-217 (2005).

T. Wahlbrink, W. S. Tsai, M. Waldow, M. Först, J. Bolten, T. Mollenhauer, H. Kurz, "Fabrication of high efficiency SOI taper structures," Microelectron. Eng. 86, 1117-1119 (2009).

Nature Photon. (1)

F. Xia, L. Sekaric, Y. Vlasov, "Ultra-compact optical buffers on a silicon chip," Nature Photon. 1, 65-71 (2007).

Opt. Exp. (1)

D. Vermeulen, S. Selvaraja, P. Verheyen, G. Lepage, W. Bogaerts, P. Absil, D. Van Thourhout, G. Roelkens, "High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform," Opt. Exp. 18, 18278-18283 (2010).

Other (8)

N. Ophir, K. Padmaraju, A. Biberman, L. Chen, K. Preston, M. Lipson, K. Bergman, "First demonstration of error-free operation of a full silicon on-chip photonic link," presented at the Opt. Fiber Commun. Conf. Los AngelesCA (2011) Paper OWZ3.

K. Vyrsokinos, L. Stampoulidis, Z. Sheng, E. Kehayas, P. Bakopoulos, D. Petrantonakis, C. Stamatiadis, Ch. Kouloumentas, P. Zakynthinos, R. Dekker, E. J. Klein, D. Van Thourhout, M. T. Kothorst, H. Avramopoulos, "Higher-order micro-ring resonator assisted wavelength converters for scalable and power efficient photonic routers," presented at the Eur. Conf. Opt. Commun. ViennaAustria (2009) Paper P2.08.

C. Stamatiadis, D. Petrantonakis, P. Bakopoulos, E. Kehayas, P. Zakynthinos, Ch. Kouloumentas, L. Stampoulidis, Z. Sheng, E. Kehayas, P. Bakopoulos, D. Petrantonakis, C. Stamatiadis, C. Kouloumentas, P. Zakynthinos, R. Dekker, E. J. Klein, D. Van Thourhout, M. T. Kothorst, H. Avramopoulos, "First demonstration of WDM-enabled all-optical wavelength conversion with a SOA and a 2nd order micro-ring resonator ROADM," presented at the Opt. Fiber Commun. Conf. San DiegoCA (2009) Paper PDPA8.

C. Stamatiadis, K. Vyrsokinos, L. Stampoulidis, A. Maziotis, Z. Sheng, D. Van Thourhout, J. Bolten, M. Karl, T. Wahlbrink, H. Avramopoulos, "All-optical wavelength conversion at 160 Gb/s using an SOA and a 3rd order SOI nanowire periodic filter," presented at the IEEE Photon. Soc. Annu. Meet. 2010 DenverCO (2010).

M. Popovic, M. Watts, T. Barwicz, P. Rakich, L. Socci, E. Ippen, F. Kartner, H. Smith, "High-index-contrast, wide-FSR microring-resonator filter design and realization with frequency-shift compensation," presented at the Opt. Fiber Commun. Conf. AnaheimCA (2005) Paper OFK1.

L. Liu, T. Spuesens, D. Van Thourhout, G. Morthier, L. Grenouillet, N. Olivier, J. Fedeli, P. Romeo, P. Régreny, F. Mandorlo, R. Orobtchouk, "200 mm wafer scale III-V/SOI technology for all-optical network-on-chip and signal processing," presented at the 7th IEEE Int. Conf. Group IV Photon. (GFP) BeijingChina (2010).

Y. Liu, E. Tangdiongga, Z. Li, H. de Waardt, A. M. J. Koonen, G. D. Khoe, H. J. S. Dorren, "Error-free 320 Gbit/s SOA-based wavelength conversion using optical filtering," presented at the Opt. Fiber Commun. Conf. AnaheimCA (2006) Paper PDP28.

S. T. Chu, B. E. Little, V. Van, J. V. Hryniewicz, P. P. Absil, F. G. Johnson, D. Gill, O. King, F. Seiferth, M. Trakalo, J. Shanton, "Compact full C-band tunable filters for 50 GHz channel spacing based on high-order micro-ring resonators," presented at the Opt. Fiber Commun. Conf. Los AngelesCA (2004) Paper PDP9.

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