Abstract

We report on the fabrication of a 4-channel embedded waveguide array by a develop-free solgel process, adopted for the first time in waveguide fabrication to improve the sidewall roughness and simplify the fabrication procedures. A kind of novel hybrid HfO$_{2}$/SiO$_{2}$ solgel material, which can be used to form a crack-free thick film by a single spin-coating, was prepared to construct waveguide core and cladding, whose refractive index can be accurately set by adjusting ultraviolet (UV) exposure time. The average propagation losses of the fabricated single-mode channel waveguides were measured as low as $0.19 \pm 0.02$ dB/cm and $0.22 \pm 0.03$dB/cm at a wavelength of 1.55 $\mu$m for TE and TM polarizations, respectively.

© 2010 IEEE

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