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Optica Publishing Group
  • Journal of Lightwave Technology
  • Vol. 28,
  • Issue 13,
  • pp. 1913-1916
  • (2010)

Lithium Niobate Ridge Waveguides Fabricated by Ion Implantation Followed by Ion Beam Etching

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Abstract

A new fabrication method for lithium niobate ridge waveguides is reported. Lithium niobate ridge waveguide with a smooth surface was fabricated by ${\rm O}^{+}$ ions implanted combined with Ar ion beam etching. The beam propagation method (BPM) was used to simulate the properties of planar and ridge waveguides by use of a reconstructed refractive index profile. The simulation results match to the experimental results very well, and the loss value of the ridge waveguide is about 2 dB/cm.

© 2010 IEEE

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