Silicon-oxynitride waveguides fabricated by plasma-enhanced chemical vapor deposition are very attractive for passive optical components used in optical networks. We use a combination of an high-index contrast and compact core dimensions for the realization of small bending radii. To achieve the high quality requirements with the desired waveguide design the layer deposition and the waveguide fabrication are optimized. Furthermore, we discuss the interface of the high-index optical components to standard single-mode fiber (SSMF) and coupling tolerances, which is more difficult compared to common fiber-mode-matched waveguides. We show results of fabricated Mach-Zehnder interferometer-switches, tunable ring resonators and present a solution to reduce the waveguide birefringence by adjusting the mechanical stress of the cover layer.
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