Abstract

Compact microring resonator devices are realized by using a small SU-8 polymer strip waveguide that has an SU-8 polymer core $(n \sim {\hbox {1.573}})$, an SiO$_{2}$ buffer $(n \sim {\hbox {1.445}}),$ and an air cladding. Due to the high index contrast of the optical waveguide, a small bending radius (${\sim} {\hbox {150}}\ \mu$m) is used for the MRR. To enhance the coupling between the access optical waveguides and the microring, 2$\,\times\,$2 multimode interference couplers are used. The measured spectral response of the through port shows a high extinction ratio of over 15 dB and a 3-dB bandwidth of about 0.38nm (corresponding to a moderate $Q$-value of ${\sim} {\hbox {4500}}$).

© 2009 IEEE

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  1. Y. Kokubun, Y. Hatakeyama, M. Ogata, S. Suzuki, N. Zaizen, "Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radius," IEEE J. Sel. Top. Quantum Electron. 11, 4-11 (2005).
  2. Q. F. Xu, B. Schmidt, S. Pradhan, M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
  3. S. Yamagata, T. Kato, Y. Kokubun, "Non-blocking wavelength channel switch using TO effect of double series coupled microring resonator," Electron. Lett. 41, 593-10 (2005).
  4. C.-Y. Chao, L. J. Guoa, "Biochemical sensors based on polymer microrings with sharp asymmetrical resonance," Appl. Phys. Lett. 83, 1527-1529 (2003).
  5. R. Hu, D. Dai, S. He, "A small polymeric ridge waveguide with a high index contrast," J. Lightw. Technol. 26, 1964-1968 (2008).
  6. P. Dumon, W. Bogaerts, V. Wiaux, J. Wouter, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).
  7. R. Yoshimura, "Low-loss polymeric optical waveguides fabricated with deuterated polyfluoromethacrylate," J. Lightw. Technol. 16, 1030-1037 (1998).
  8. S. Y. Cheng, K. S. Chiang, H. P. Chan, "Birefringence in benzocyclobutene strip optical waveguides," IEEE Photon. Technol. Lett. 15, 700-702 (2003).
  9. P. Rabiei, W. H. Steier, "Tunable polymer double micro-ring filters," IEEE Photon. Technol. Lett. 15, 1255-1257 (2003).
  10. C. Y. Chao, L. J. Guo, "Polymer microring resonators fabricated by nanoimprint technique," J. Vac. Sci. Technol. B 20, 2862-2866 (2002).
  11. D.-X. Xu, A. Densmore, P. Waldron, J. Lapointe, E. Post, A. Delâge, S. Janz, P. Cheben, J. H. Schmid, B. Lamontagne, "High bandwidth SOI photonic wire ring resonators using MMI couplers," Opt. Exp. 15, 3149-3155 (2007).
  12. D. Dai, B. Yang, L. Yang, Z. Sheng, S. He, "Compact microracetrack resonator devices based on small SU-8 polymer strip waveguides," IEEE Photon. Technol. Lett. 21, 254-256 (2009).
  13. D. Dai, S. He, "Design of an ultrashort Si-nanowaveguide-based multimode interference coupler of arbitrary shape," Appl. Opt. 47, 38-44 (2008).
  14. L. Yang, B. Yang, Z. Sheng, J. Wang, D. Dai, S. He, "Compact 2$\,\times\,$2 tapered multimode interference couplers based on SU-8 polymer rectangular waveguides," Appl. Phys. Lett. 93, 203305-1-203305-3 (2008).
  15. M. Nordström, D. A. Zauner, A. Boisen, J. Hübner, "Single-mode waveguides with SU-8 polymer core and cladding for MOEMS applications," J. Lightw. Technol. 25, 1284-1289 (2007).
  16. D. Dai, S. He, "Proposal for diminishment of the polarization-dependency in a Si-nanowire multimode interference (MMI) coupler by tapering the MMI section," IEEE Photon. Technol. Lett. 20, 599-601 (2008).

2009 (1)

D. Dai, B. Yang, L. Yang, Z. Sheng, S. He, "Compact microracetrack resonator devices based on small SU-8 polymer strip waveguides," IEEE Photon. Technol. Lett. 21, 254-256 (2009).

2008 (4)

L. Yang, B. Yang, Z. Sheng, J. Wang, D. Dai, S. He, "Compact 2$\,\times\,$2 tapered multimode interference couplers based on SU-8 polymer rectangular waveguides," Appl. Phys. Lett. 93, 203305-1-203305-3 (2008).

D. Dai, S. He, "Proposal for diminishment of the polarization-dependency in a Si-nanowire multimode interference (MMI) coupler by tapering the MMI section," IEEE Photon. Technol. Lett. 20, 599-601 (2008).

D. Dai, S. He, "Design of an ultrashort Si-nanowaveguide-based multimode interference coupler of arbitrary shape," Appl. Opt. 47, 38-44 (2008).

R. Hu, D. Dai, S. He, "A small polymeric ridge waveguide with a high index contrast," J. Lightw. Technol. 26, 1964-1968 (2008).

2007 (2)

M. Nordström, D. A. Zauner, A. Boisen, J. Hübner, "Single-mode waveguides with SU-8 polymer core and cladding for MOEMS applications," J. Lightw. Technol. 25, 1284-1289 (2007).

D.-X. Xu, A. Densmore, P. Waldron, J. Lapointe, E. Post, A. Delâge, S. Janz, P. Cheben, J. H. Schmid, B. Lamontagne, "High bandwidth SOI photonic wire ring resonators using MMI couplers," Opt. Exp. 15, 3149-3155 (2007).

2005 (3)

Y. Kokubun, Y. Hatakeyama, M. Ogata, S. Suzuki, N. Zaizen, "Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radius," IEEE J. Sel. Top. Quantum Electron. 11, 4-11 (2005).

Q. F. Xu, B. Schmidt, S. Pradhan, M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).

S. Yamagata, T. Kato, Y. Kokubun, "Non-blocking wavelength channel switch using TO effect of double series coupled microring resonator," Electron. Lett. 41, 593-10 (2005).

2004 (1)

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouter, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).

2003 (3)

S. Y. Cheng, K. S. Chiang, H. P. Chan, "Birefringence in benzocyclobutene strip optical waveguides," IEEE Photon. Technol. Lett. 15, 700-702 (2003).

P. Rabiei, W. H. Steier, "Tunable polymer double micro-ring filters," IEEE Photon. Technol. Lett. 15, 1255-1257 (2003).

C.-Y. Chao, L. J. Guoa, "Biochemical sensors based on polymer microrings with sharp asymmetrical resonance," Appl. Phys. Lett. 83, 1527-1529 (2003).

2002 (1)

C. Y. Chao, L. J. Guo, "Polymer microring resonators fabricated by nanoimprint technique," J. Vac. Sci. Technol. B 20, 2862-2866 (2002).

1998 (1)

R. Yoshimura, "Low-loss polymeric optical waveguides fabricated with deuterated polyfluoromethacrylate," J. Lightw. Technol. 16, 1030-1037 (1998).

Appl. Opt. (1)

Appl. Phys. Lett. (2)

L. Yang, B. Yang, Z. Sheng, J. Wang, D. Dai, S. He, "Compact 2$\,\times\,$2 tapered multimode interference couplers based on SU-8 polymer rectangular waveguides," Appl. Phys. Lett. 93, 203305-1-203305-3 (2008).

C.-Y. Chao, L. J. Guoa, "Biochemical sensors based on polymer microrings with sharp asymmetrical resonance," Appl. Phys. Lett. 83, 1527-1529 (2003).

Electron. Lett. (1)

S. Yamagata, T. Kato, Y. Kokubun, "Non-blocking wavelength channel switch using TO effect of double series coupled microring resonator," Electron. Lett. 41, 593-10 (2005).

IEEE J. Sel. Top. Quantum Electron. (1)

Y. Kokubun, Y. Hatakeyama, M. Ogata, S. Suzuki, N. Zaizen, "Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radius," IEEE J. Sel. Top. Quantum Electron. 11, 4-11 (2005).

IEEE Photon. Technol. Lett. (5)

S. Y. Cheng, K. S. Chiang, H. P. Chan, "Birefringence in benzocyclobutene strip optical waveguides," IEEE Photon. Technol. Lett. 15, 700-702 (2003).

P. Rabiei, W. H. Steier, "Tunable polymer double micro-ring filters," IEEE Photon. Technol. Lett. 15, 1255-1257 (2003).

D. Dai, B. Yang, L. Yang, Z. Sheng, S. He, "Compact microracetrack resonator devices based on small SU-8 polymer strip waveguides," IEEE Photon. Technol. Lett. 21, 254-256 (2009).

P. Dumon, W. Bogaerts, V. Wiaux, J. Wouter, S. Beckx, J. V. Campenhout, D. Taillaert, B. Luyssaert, P. Bienstman, D. V. Thourhout, R. Baets, "Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography," IEEE Photon. Technol. Lett. 16, 1328-1330 (2004).

D. Dai, S. He, "Proposal for diminishment of the polarization-dependency in a Si-nanowire multimode interference (MMI) coupler by tapering the MMI section," IEEE Photon. Technol. Lett. 20, 599-601 (2008).

J. Lightw. Technol. (3)

M. Nordström, D. A. Zauner, A. Boisen, J. Hübner, "Single-mode waveguides with SU-8 polymer core and cladding for MOEMS applications," J. Lightw. Technol. 25, 1284-1289 (2007).

R. Yoshimura, "Low-loss polymeric optical waveguides fabricated with deuterated polyfluoromethacrylate," J. Lightw. Technol. 16, 1030-1037 (1998).

R. Hu, D. Dai, S. He, "A small polymeric ridge waveguide with a high index contrast," J. Lightw. Technol. 26, 1964-1968 (2008).

J. Vac. Sci. Technol. B (1)

C. Y. Chao, L. J. Guo, "Polymer microring resonators fabricated by nanoimprint technique," J. Vac. Sci. Technol. B 20, 2862-2866 (2002).

Nature (1)

Q. F. Xu, B. Schmidt, S. Pradhan, M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).

Opt. Exp. (1)

D.-X. Xu, A. Densmore, P. Waldron, J. Lapointe, E. Post, A. Delâge, S. Janz, P. Cheben, J. H. Schmid, B. Lamontagne, "High bandwidth SOI photonic wire ring resonators using MMI couplers," Opt. Exp. 15, 3149-3155 (2007).

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