Abstract

An in-line all-fiber etalon, formed by a self-enclosed Fabry–Perot cavity inside an optical fiber fabricated by using 157-nm laser micromachining, is first demonstrated in this paper. This etalon has almost perfect sensor characteristics, such as excellent interferometric fringe contrast of up to ${\sim}30$ dB, low thermal cross-sensitivity, great potential to realize mass-production with good reproducibility, low cost, super capability to operate in harsh environments, etc. The static, quasi-static, and dynamic strain characteristics of the etalon sensor are investigated, which prove that such an etalon could meet versatile applications for strain measurement.

© 2009 IEEE

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  2. Y. J. Rao, "Recent progress in applications of in-fibre Bragg grating sensors," Opt. Lasers. Eng. 13, 297-324 (1999).
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  18. H. Singh, J. S. Sirkis, "Simultaneously measuring temperature and strain using optical fiber microcavities," J. Lightw. Technol. 15, 647-653 (1997).

2007 (1)

E. Cibula, D. Donlagic, "In-line short cavity Fabry–Perot strain sensor for quasi distributed measurement utilizing standard OTDR," Opt. Exp. 15, 8719-8730 (2007).

2006 (2)

X. P. Chen, F. B. Shen, Z. Wang, Z. Y. Huang, A. B. Wang, "Micro-air-gap based intrinsic Fabry–Perot interferometric fiber-optic sensor," Appl. Opt. 45, 7760-7766 (2006).

Y. J. Rao, "Review article: Recent progress in fiber-optic extrinsic Fabry–Perot interferometric sensors ," Opt. Fiber Technol. 12, 227-237 (2006).

2001 (2)

K. Obata, K. Sugioka, T. Akane, N. Aoki, K. Toyoda, K. Midorikawa, "Influence of laser fluence and irradiation timing of F$_{2}$ laser on ablation properties of fused silica in F$_{2}$ -KrF excimer laser multi-wavelength excitation process," Appl. Phys. A 73, 755-759 (2001).

M. Schmidt, B. Werther, N. Fürstenau, "Fiber-optic extrinsic Fabry–Perot interferometer strain sensor with $< 50$ pm displacement resolution using three-wavelength digital phase demodulation ," Opt. Exp. 8, 475-480 (2001).

1999 (2)

M. Schmidt, N. Fürstenau, "Fiber-optic extrinsic Fabry–Perot interferometer sensors with three-wavelength digital phase demodulation," Opt. Lett. 24, 599-601 (1999).

Y. J. Rao, "Recent progress in applications of in-fibre Bragg grating sensors," Opt. Lasers. Eng. 13, 297-324 (1999).

1997 (2)

Y. J. Rao, "Review article: In-fiber Bragg grating sensors," Meas. Sci. Technol. 8, 355-375 (1997).

H. Singh, J. S. Sirkis, "Simultaneously measuring temperature and strain using optical fiber microcavities," J. Lightw. Technol. 15, 647-653 (1997).

1996 (2)

V. Bhatia, M. B. Sen, K. A. Murphy, R. O. Claus, "Wavelength-tracked white light interferometry for highly sensitive strain and temperature measurement ," Electron. Lett. 32, 247-249 (1996).

Y. J. Rao, D. A. Jackson, "Review article: Recent progress in fiber-optic low-coherence interferometry," Meas. Sci. Technol. 7, 981-999 (1996).

1995 (1)

J. Sirkis, T. A. Berkoff, R. T. Jones, H. Singh, A. D. Kersey, E. J. Friebele, M. A. Putnam, "In-line fiber etalon (ILFE) fiber-optic strain sensors," J. Lightw. Technol. 13, 1256-1263 (1995).

1993 (1)

1992 (2)

R. O. Claus, M. F. Gunther, A. Wang, K. A. Murphy, "Extrinsic Fabry–Perot sensor for strain and crack opening displacement measurements from ${-}200$ to 900 degrees," Smart Mater. Struct. 1, 237-242 (1992).

J. L. Santos, A. P. Leite, D. A. Jackson, "Optical fiber sensing with a low-finesse Fabry–Perot cavity," Appl. Opt. 31, 7361-7366 (1992).

1991 (1)

Appl. Opt. (2)

Appl. Phys. A (1)

K. Obata, K. Sugioka, T. Akane, N. Aoki, K. Toyoda, K. Midorikawa, "Influence of laser fluence and irradiation timing of F$_{2}$ laser on ablation properties of fused silica in F$_{2}$ -KrF excimer laser multi-wavelength excitation process," Appl. Phys. A 73, 755-759 (2001).

Electron. Lett. (1)

V. Bhatia, M. B. Sen, K. A. Murphy, R. O. Claus, "Wavelength-tracked white light interferometry for highly sensitive strain and temperature measurement ," Electron. Lett. 32, 247-249 (1996).

J. Lightw. Technol. (2)

H. Singh, J. S. Sirkis, "Simultaneously measuring temperature and strain using optical fiber microcavities," J. Lightw. Technol. 15, 647-653 (1997).

J. Sirkis, T. A. Berkoff, R. T. Jones, H. Singh, A. D. Kersey, E. J. Friebele, M. A. Putnam, "In-line fiber etalon (ILFE) fiber-optic strain sensors," J. Lightw. Technol. 13, 1256-1263 (1995).

Meas. Sci. Technol. (2)

Y. J. Rao, D. A. Jackson, "Review article: Recent progress in fiber-optic low-coherence interferometry," Meas. Sci. Technol. 7, 981-999 (1996).

Y. J. Rao, "Review article: In-fiber Bragg grating sensors," Meas. Sci. Technol. 8, 355-375 (1997).

Opt. Exp. (2)

E. Cibula, D. Donlagic, "In-line short cavity Fabry–Perot strain sensor for quasi distributed measurement utilizing standard OTDR," Opt. Exp. 15, 8719-8730 (2007).

M. Schmidt, B. Werther, N. Fürstenau, "Fiber-optic extrinsic Fabry–Perot interferometer strain sensor with $< 50$ pm displacement resolution using three-wavelength digital phase demodulation ," Opt. Exp. 8, 475-480 (2001).

Opt. Fiber Technol. (1)

Y. J. Rao, "Review article: Recent progress in fiber-optic extrinsic Fabry–Perot interferometric sensors ," Opt. Fiber Technol. 12, 227-237 (2006).

Opt. Lasers. Eng. (1)

Y. J. Rao, "Recent progress in applications of in-fibre Bragg grating sensors," Opt. Lasers. Eng. 13, 297-324 (1999).

Opt. Lett. (3)

Smart Mater. Struct. (1)

R. O. Claus, M. F. Gunther, A. Wang, K. A. Murphy, "Extrinsic Fabry–Perot sensor for strain and crack opening displacement measurements from ${-}200$ to 900 degrees," Smart Mater. Struct. 1, 237-242 (1992).

Other (2)

R. O. Claus, M. F. Gunther, A. B. Wang, K. A. Murphy, D. Sun, Applications of Fiber Optic Sensors in Engineering Mechanics (ASCE, 1993).

H. F. Taylor, Fiber Optic Sensors (Marcel Dekker, 2002).

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