Abstract

UV-based nano imprint and transfer lithography (NITL) is proposed as a flexible, low cost and versatile approach for defining sub-micron metal patterns on optical fiber facets in a single-processing step. NITL relies on a specially prepared mold carrying the pattern that is to be transferred to the facet. The fiber's light-guiding properties allow control of the position of the metal structures by optical alignment.

© 2009 IEEE

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  1. D. A. Genov, A. K. Sarychev, V. M. Shalaev, A. Wei, "Resonant field enhancements from metal nanoparticle arrays," Nano Lett. 4, 153-158 (2004).
  2. W. L Barnes, A. Dereux, T. W. Ebbesen, "Surface plasmon subwavelength optics," Nature 424, 824-830 (2003).
  3. S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets, "Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides," Opt. Exp. 15, 9639-9644 (2007).
  4. E. Cubukcu, E. A. Kort, K. B. Crozier, F. Capasso, "Plasmonic laser antenna," Appl. Phys. Lett. 89, 093120 (2006).
  5. E. J. Smythe, E. Cubukcu, F. Capasso, "Optical properties of surface plasmon resonances of coupled metallic nanorods," Opt. Exp. 15, 7439-7447 (2007).
  6. S. Scheerlinck, D. Taillaert, D. Van Thourhout, R. Baets, "Flexible metal grating based optical fiber probe for photonic integrated circuits," Appl. Phys. Lett. 92, 031104 (2008).
  7. A. Partovi, D. Peale, M. Wuttig, C. A. Murray, G. Zydzik, L. Hopkins, K. Baldwin, W. S. Hobson, J. Wynn, J. Lopata, L. Dhar, R. Chichester, J. H. Yeh, "High-power laser light source for near-field optics and its application to high-density optical data storage," Appl. Phys. Lett. 75, 1515-1517 (1999).
  8. F. Chen, A. Itagi, J. A. Bain, D. D. Stancil, T. E. Schlesinger, L. Stebounova, G. C. Walker, B. B. Akhremitchev, "Imaging of optical field confinement in ridge waveguides fabricated on a Very Small Aperture Laser (VSAL)," Appl. Phys. Lett. 83, 3245-3247 (2003).
  9. P. S. Kelkar, J. Beauvais, E. Lavallee, D. Drouin, M. Cloutier, D. Turcotte, P. Yang, L. K. Mun, R. Legario, Y. Awad, V. Aimez, "Nano patterning on optical fiber and laser diode facet with dry resist," J. Vac. Sci. Technol. A 22, 743-746 (2004).
  10. J. Schrauwen, D. Van Thourhout, R. Baets, "Focused-ion-beam fabricated vertical fiber couplers on silicon-on-insulator," Appl. Phys. Lett. 89, 141102 (2006).
  11. G. M. Kim, B. J. Kim, E. S. Ten Have, F. Segerink, N. F. Van Hulst, J. Brugger, "Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould," J. of Microscopy 209, 267-271 (2002).
  12. S. Y. Chou, P. R. Krauss, P. J. Renstrom, "Imprint of sub-25 Nm Vias and trenches in polymers," Appl. Phys. Lett. 67, 3114-3116 (1995).
  13. L. J. Guo, "Nanoimprint lithography: Methods and material requirements," Adv. Mater. 19, 495-513 (2007).
  14. J. Viheriala, T. Niemi, J. Kontio, T. Rytkonen, M. Pessa, "Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography," Electron. Lett. 43, 150-152 (2007).
  15. S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets, Optics Exp. 15, 9639 (2007).
  16. M. Bender, M. Otto, B. Hadam, B. Spangenberg, H. Kurz, "Multiple imprinting in UV-based nanoimprint lithography: Related material issues," Microelectron. Eng. 61โ€“62, 407-413 (2002).
  17. P. Bienstman, R. Baets, "Optical modeling of photonic crystals and VCSEL's using eigenmode expansion and perfectly matched layers," Opt. Quantum Electron. 349-354 (2001).

2008 (1)

S. Scheerlinck, D. Taillaert, D. Van Thourhout, R. Baets, "Flexible metal grating based optical fiber probe for photonic integrated circuits," Appl. Phys. Lett. 92, 031104 (2008).

2007 (5)

E. J. Smythe, E. Cubukcu, F. Capasso, "Optical properties of surface plasmon resonances of coupled metallic nanorods," Opt. Exp. 15, 7439-7447 (2007).

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets, "Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides," Opt. Exp. 15, 9639-9644 (2007).

L. J. Guo, "Nanoimprint lithography: Methods and material requirements," Adv. Mater. 19, 495-513 (2007).

J. Viheriala, T. Niemi, J. Kontio, T. Rytkonen, M. Pessa, "Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography," Electron. Lett. 43, 150-152 (2007).

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets, Optics Exp. 15, 9639 (2007).

2006 (2)

J. Schrauwen, D. Van Thourhout, R. Baets, "Focused-ion-beam fabricated vertical fiber couplers on silicon-on-insulator," Appl. Phys. Lett. 89, 141102 (2006).

E. Cubukcu, E. A. Kort, K. B. Crozier, F. Capasso, "Plasmonic laser antenna," Appl. Phys. Lett. 89, 093120 (2006).

2004 (2)

D. A. Genov, A. K. Sarychev, V. M. Shalaev, A. Wei, "Resonant field enhancements from metal nanoparticle arrays," Nano Lett. 4, 153-158 (2004).

P. S. Kelkar, J. Beauvais, E. Lavallee, D. Drouin, M. Cloutier, D. Turcotte, P. Yang, L. K. Mun, R. Legario, Y. Awad, V. Aimez, "Nano patterning on optical fiber and laser diode facet with dry resist," J. Vac. Sci. Technol. A 22, 743-746 (2004).

2003 (2)

W. L Barnes, A. Dereux, T. W. Ebbesen, "Surface plasmon subwavelength optics," Nature 424, 824-830 (2003).

F. Chen, A. Itagi, J. A. Bain, D. D. Stancil, T. E. Schlesinger, L. Stebounova, G. C. Walker, B. B. Akhremitchev, "Imaging of optical field confinement in ridge waveguides fabricated on a Very Small Aperture Laser (VSAL)," Appl. Phys. Lett. 83, 3245-3247 (2003).

2002 (2)

G. M. Kim, B. J. Kim, E. S. Ten Have, F. Segerink, N. F. Van Hulst, J. Brugger, "Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould," J. of Microscopy 209, 267-271 (2002).

M. Bender, M. Otto, B. Hadam, B. Spangenberg, H. Kurz, "Multiple imprinting in UV-based nanoimprint lithography: Related material issues," Microelectron. Eng. 61โ€“62, 407-413 (2002).

2001 (1)

P. Bienstman, R. Baets, "Optical modeling of photonic crystals and VCSEL's using eigenmode expansion and perfectly matched layers," Opt. Quantum Electron. 349-354 (2001).

1999 (1)

A. Partovi, D. Peale, M. Wuttig, C. A. Murray, G. Zydzik, L. Hopkins, K. Baldwin, W. S. Hobson, J. Wynn, J. Lopata, L. Dhar, R. Chichester, J. H. Yeh, "High-power laser light source for near-field optics and its application to high-density optical data storage," Appl. Phys. Lett. 75, 1515-1517 (1999).

1995 (1)

S. Y. Chou, P. R. Krauss, P. J. Renstrom, "Imprint of sub-25 Nm Vias and trenches in polymers," Appl. Phys. Lett. 67, 3114-3116 (1995).

Adv. Mater. (1)

L. J. Guo, "Nanoimprint lithography: Methods and material requirements," Adv. Mater. 19, 495-513 (2007).

Appl. Phys. Lett. (6)

J. Schrauwen, D. Van Thourhout, R. Baets, "Focused-ion-beam fabricated vertical fiber couplers on silicon-on-insulator," Appl. Phys. Lett. 89, 141102 (2006).

S. Y. Chou, P. R. Krauss, P. J. Renstrom, "Imprint of sub-25 Nm Vias and trenches in polymers," Appl. Phys. Lett. 67, 3114-3116 (1995).

E. Cubukcu, E. A. Kort, K. B. Crozier, F. Capasso, "Plasmonic laser antenna," Appl. Phys. Lett. 89, 093120 (2006).

S. Scheerlinck, D. Taillaert, D. Van Thourhout, R. Baets, "Flexible metal grating based optical fiber probe for photonic integrated circuits," Appl. Phys. Lett. 92, 031104 (2008).

A. Partovi, D. Peale, M. Wuttig, C. A. Murray, G. Zydzik, L. Hopkins, K. Baldwin, W. S. Hobson, J. Wynn, J. Lopata, L. Dhar, R. Chichester, J. H. Yeh, "High-power laser light source for near-field optics and its application to high-density optical data storage," Appl. Phys. Lett. 75, 1515-1517 (1999).

F. Chen, A. Itagi, J. A. Bain, D. D. Stancil, T. E. Schlesinger, L. Stebounova, G. C. Walker, B. B. Akhremitchev, "Imaging of optical field confinement in ridge waveguides fabricated on a Very Small Aperture Laser (VSAL)," Appl. Phys. Lett. 83, 3245-3247 (2003).

Electron. Lett. (1)

J. Viheriala, T. Niemi, J. Kontio, T. Rytkonen, M. Pessa, "Fabrication of surface reliefs on facets of singlemode optical fibres using nanoimprint lithography," Electron. Lett. 43, 150-152 (2007).

J. of Microscopy (1)

G. M. Kim, B. J. Kim, E. S. Ten Have, F. Segerink, N. F. Van Hulst, J. Brugger, "Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould," J. of Microscopy 209, 267-271 (2002).

J. Vac. Sci. Technol. A (1)

P. S. Kelkar, J. Beauvais, E. Lavallee, D. Drouin, M. Cloutier, D. Turcotte, P. Yang, L. K. Mun, R. Legario, Y. Awad, V. Aimez, "Nano patterning on optical fiber and laser diode facet with dry resist," J. Vac. Sci. Technol. A 22, 743-746 (2004).

Microelectron. Eng. (1)

M. Bender, M. Otto, B. Hadam, B. Spangenberg, H. Kurz, "Multiple imprinting in UV-based nanoimprint lithography: Related material issues," Microelectron. Eng. 61โ€“62, 407-413 (2002).

Nano Lett. (1)

D. A. Genov, A. K. Sarychev, V. M. Shalaev, A. Wei, "Resonant field enhancements from metal nanoparticle arrays," Nano Lett. 4, 153-158 (2004).

Nature (1)

W. L Barnes, A. Dereux, T. W. Ebbesen, "Surface plasmon subwavelength optics," Nature 424, 824-830 (2003).

Opt. Exp. (2)

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets, "Efficient, broadband and compact metal grating couplers for silicon-on-insulator waveguides," Opt. Exp. 15, 9639-9644 (2007).

E. J. Smythe, E. Cubukcu, F. Capasso, "Optical properties of surface plasmon resonances of coupled metallic nanorods," Opt. Exp. 15, 7439-7447 (2007).

Opt. Quantum Electron. (1)

P. Bienstman, R. Baets, "Optical modeling of photonic crystals and VCSEL's using eigenmode expansion and perfectly matched layers," Opt. Quantum Electron. 349-354 (2001).

Optics Exp. (1)

S. Scheerlinck, J. Schrauwen, F. Van Laere, D. Taillaert, D. Van Thourhout, R. Baets, Optics Exp. 15, 9639 (2007).

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