Abstract

An ultracompact widely tunable thermooptical (TO) microring resonator (MRR) filter based on Si nanowires is presented. The Si nanowire waveguide has a SiO<sub>2</sub> insulator, Si core, a SiO<sub>2</sub> up-cladding, and a thin metal film at the top. The metal circuit along the microring is used as a submicrometer heater which has the same width as the Si nanowire waveguide. The up-cladding is optimized to reduce the light absorption of the metal as well as to have a good heat-conduction from the heater to the Si core. Two pads used as the contact points for the probes connecting to the electrical power are perpendicularly connected to the microring by using optimized T-junctions (with a low excess loss of about 0.06 dB per T-junction). With such a design, the present thermally tunable microring resonator (MRR) can be fabricated by using a standard fabrication process with a single lithography process, which is much simpler than the fabrication with double lithography processes used for the conventional TO components. Finally, the simulation results show that the designed MRR has a wide tuning range of about 20 nm with a low heating power of 5 mW.

© 2008 IEEE

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2007 (1)

2006 (5)

Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator," IEEE Photon. Technol. Lett. 18 , 538-540 (2006).

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, S. Itabashi, "Low-loss Si wire waveguides and their application to thermooptic switches," Jpn. J. Appl. Phys. Part 1 45 , 6658-6662 (2006).

D. Dai, Y. Shi, S. He, "Characteristic analysis of nanosilicon rectangular waveguides for planar light-wave circuits of high integration," Appl. Opt. 45, 4941-4946 (2006).

D. Dai, L. Liu, L. Wosinski, S. He, "Design and fabrication of an ultra-small overlapped awg demultiplexer based on a-Si nanowire waveguides," Electron. Lett. 42, 400-402 (2006).

L. Martinez, M. Lipson, "High confinement suspended micro-ring resonators in silicon-on-insulator," Opt. Express 14, 6259-6263 (2006).

2005 (7)

T. Chu, H. Yamada, S. Ishida, Y. Arakawa, "Compact 1×N thermo-optic switches based on silicon photonic wire waveguides," Opt. Express 13, 10110-10114 (2005).

K. Sasaki, F. Ohno, A. M. Baba, "Arrayed waveguide grating of 70 x 60 µm2 size based on Si photonic wire waveguides," Electron. Lett. 41, 801-802 (2005).

G. Sekiguchi, S. Yamagata, Y. Kokubun, "Polarization-independent tuning of widely tunable vertically coupled microring resonator using thermo-optic effect," Jpn. J. Appl. Phys. 44, 1792-1796 (2005).

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, "Microphotonics devices based on silicon microfabrication technology," IEEE J. Sel. Topics Quantum Electron. 11, 232-240 (2005).

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. V. Campenhout, P. Bienstman, D. V. Thourhout, "Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology," J. Lightw. Technol. 23, 401-412 (2005).

Y. Kokubun, Y. Hatakeyama, M. Ogata, S. S. Zaizen, "Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radius," IEEE J. Sel. Topics Quantum Electron. 11, 4-10 (2005).

Q. F. Xu, B. Schmidt, S. Pradhan, M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435 , 325-327 (2005).

2004 (3)

S. Yamagata, Y. Yanagase, Y. Kokubuny, "Wide-range tunable microring resonator filter by thermo-optic effect in polymer waveguide," Jpn. J. Appl. Phys. 43, 5766-5770 (2004).

T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 1 43, 646-647 (2004).

Y. A. Vlasov, S. J. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Express 12, 1622-1631 (2004).

2003 (2)

R. L. Espinola, M.-C. Tsai, J. T. Yardley, R. M. Osgood, "Fast and low-power thermooptic switch on thin silicon-on-Insulator," IEEE Photon. Technol. Lett. 15, 1366-1368 (2003).

P. Rabiei, W. H. Steier, "Tunable polymer double micro-ring filters," IEEE Photon. Technol. Lett. 15, 1255-1257 (2003).

2000 (1)

A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36, 321-322 (2000).

1999 (1)

G. Cocorullo, F. G. D. Corte, I. Rendina, "Temperature dependence of the thermo-optic coefficient in crystalline silicon between room temperature and 550 K at the wavelength of 1523 nm," Appl. Phys. Lett. 74, 3338-3340 (1999).

1998 (1)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).

Appl. Opt. (1)

Appl. Phys. Lett. (1)

G. Cocorullo, F. G. D. Corte, I. Rendina, "Temperature dependence of the thermo-optic coefficient in crystalline silicon between room temperature and 550 K at the wavelength of 1523 nm," Appl. Phys. Lett. 74, 3338-3340 (1999).

Electron. Lett. (2)

K. Sasaki, F. Ohno, A. M. Baba, "Arrayed waveguide grating of 70 x 60 µm2 size based on Si photonic wire waveguides," Electron. Lett. 41, 801-802 (2005).

A. Yariv, "Universal relations for coupling of optical power between microresonators and dielectric waveguides," Electron. Lett. 36, 321-322 (2000).

Electron. Lett. (1)

D. Dai, L. Liu, L. Wosinski, S. He, "Design and fabrication of an ultra-small overlapped awg demultiplexer based on a-Si nanowire waveguides," Electron. Lett. 42, 400-402 (2006).

IEEE Photon. Technol. Lett. (1)

Y. Goebuchi, T. Kato, Y. Kokubun, "Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator," IEEE Photon. Technol. Lett. 18 , 538-540 (2006).

IEEE J. Sel. Topics Quantum Electron. (2)

Y. Kokubun, Y. Hatakeyama, M. Ogata, S. S. Zaizen, "Fabrication technologies for vertically coupled microring resonator with multilevel crossing busline and ultracompact-ring radius," IEEE J. Sel. Topics Quantum Electron. 11, 4-10 (2005).

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, J. Takahashi, M. Takahashi, T. Shoji, E. Tamechika, S. Itabashi, H. Morita, "Microphotonics devices based on silicon microfabrication technology," IEEE J. Sel. Topics Quantum Electron. 11, 232-240 (2005).

IEEE Photon. Technol. Lett. (1)

R. L. Espinola, M.-C. Tsai, J. T. Yardley, R. M. Osgood, "Fast and low-power thermooptic switch on thin silicon-on-Insulator," IEEE Photon. Technol. Lett. 15, 1366-1368 (2003).

IEEE Photon. Technol. Lett. (2)

B. E. Little, J. S. Foresi, G. Steinmeyer, E. R. Thoen, S. T. Chu, H. A. Haus, E. P. Ippen, L. C. Kimerling, W. Greene, "Ultra-compact Si-SiO2 microring resonator optical channel dropping filters," IEEE Photon. Technol. Lett. 10, 549-551 (1998).

P. Rabiei, W. H. Steier, "Tunable polymer double micro-ring filters," IEEE Photon. Technol. Lett. 15, 1255-1257 (2003).

J. Lightw. Technol. (1)

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. V. Campenhout, P. Bienstman, D. V. Thourhout, "Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology," J. Lightw. Technol. 23, 401-412 (2005).

Jpn. J. Appl. Phys. (1)

G. Sekiguchi, S. Yamagata, Y. Kokubun, "Polarization-independent tuning of widely tunable vertically coupled microring resonator using thermo-optic effect," Jpn. J. Appl. Phys. 44, 1792-1796 (2005).

Jpn. J. Appl. Phys. 1 (1)

T. Fukazawa, T. Hirano, F. Ohno, T. Baba, "Low loss intersection of Si photonic wire waveguides," Jpn. J. Appl. Phys. 1 43, 646-647 (2004).

Jpn. J. Appl. Phys. (1)

S. Yamagata, Y. Yanagase, Y. Kokubuny, "Wide-range tunable microring resonator filter by thermo-optic effect in polymer waveguide," Jpn. J. Appl. Phys. 43, 5766-5770 (2004).

Jpn. J. Appl. Phys. Part 1 (1)

T. Tsuchizawa, K. Yamada, H. Fukuda, T. Watanabe, S. Uchiyama, S. Itabashi, "Low-loss Si wire waveguides and their application to thermooptic switches," Jpn. J. Appl. Phys. Part 1 45 , 6658-6662 (2006).

Nature (1)

Q. F. Xu, B. Schmidt, S. Pradhan, M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435 , 325-327 (2005).

Opt. Express (1)

T. Chu, H. Yamada, S. Ishida, Y. Arakawa, "Compact 1×N thermo-optic switches based on silicon photonic wire waveguides," Opt. Express 13, 10110-10114 (2005).

Opt. Express (3)

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