Abstract
In this paper, the design, fabrication, and application of a highly tolerant polarization-independent
optical-waveguide structure suited for operation in the third communication window is presented. The waveguide
structure has been optimized toward minimized sensitivity to technological tolerances and low fabrication
complexity. The tolerance analysis has been based on the typical processing tolerances of the widely applied
silicon-oxynitride technology, being ±3×
10<sup>-4</sup> in
refractive index, ±1% in thickness, and
±0.1μm in channel width. The optimized waveguide
design fulfills the criterion of a channel birefringence within 5×
10<sup>-5</sup>, including processing tolerance. It also enables a fiber-to-chip coupling loss below 1
dB/facet and is suited for the realization of low-loss bends with a radius down to 600 µm. Based on this waveguide design, a passband-flattened optical wavelength filter
with 50-GHz free spectral range has been realized and tested. The measured TE–TM shift of 0.03 nm confirms the
polarization dependence of the optical waveguides being as low as 3 x 10<sup>-5</sup>.
© 2007 IEEE
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