Abstract
We demonstrate a technique of applying the prism-coupler method to the characterization of dielectric films
that are too thin to support enough guided modes in air for the normal application of the method. The technique is
based on applying suitable index-matching liquids on the surface of the thin film to increase the number of
effective indexes available for the determination of the refractive index and the thickness of the film. With this
technique, even thin films that do not support any guided modes in air can be characterized. We apply the technique
to the characterization of polymer thin films as thin as 100–200 nm and discuss its performance and
limitation.
© 2007 IEEE
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