Abstract

We report on the design, fabrication, and optical characterization of silicon-on-insulator-based one-dimensional (1-D) photonic crystal (PhC) microcavities. The scope of this paper lies on filters for communication systems around 1.55-μm wavelength. Detailed calculations of filter performance against the relevant device layout parameters are given. Resonant cavity modes with quality factors as high as Q≈630 in the 1.55-μm wavelength band were measured for filters comprised of two PhC mirrors containing 2 × 5 holes, that were 200 nm in diameter. This is the highest Q-value reported of such a filter up to now.

© 2007 IEEE

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  1. J. D. Joannopoulos, R. D. Meade, J. N. Winn, Photonic Crystals: Molding the Flow of Light (Princeton Univ. Press, 1995).
  2. D. J. Ripin, "One-dimensional photonic bandgap microcavities for strong optical confinement in GaAs and GaAs/ ${\rm Al}_x{\rm O}_y$ semiconductor waveguides," J. Lightw. Technol. 17, 2152-2160 (1999).
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2005 (1)

D. Gerace, M. Agio, L. C. Andreani, P. Lalanne, "Cavity modes in one-dimensional photonic crystal slabs," Opt. Quantum Electron. 37, 277-292 (2005).

2003 (1)

Y. Akahane, T. Asano, B. S. Song, S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425, 944-947 (2003).

2001 (1)

2000 (1)

M. Loncar, T. Doll, J. Vuckovic, A. Scherer, "Design and fabrication of silicon photonic crystal optical waveguides," J. Lightw. Technol. 18, 1402-1411 (2000).

1999 (2)

D. J. Ripin, "One-dimensional photonic bandgap microcavities for strong optical confinement in GaAs and GaAs/ ${\rm Al}_x{\rm O}_y$ semiconductor waveguides," J. Lightw. Technol. 17, 2152-2160 (1999).

K.-Y. Lim, D. J. Ripin, G. S. Petrich, L. A. Kolodziejski, E. P. Ippen, M. Mondol, H. I. Smith, "Photonic band-gap waveguide microcavities: Monorail and air bridges," J. Vac. Sci. Technol. B, Microelectron. 17, 1171-1174 (1999).

1998 (1)

P. R. Villeneuve, S. Fan, S. G. Johnson, J. D. Joannopoulos, "Three-dimensional photon confinement in photonic crystals of low-dimensional periodicity ," Proc. Inst. Electr. Eng.—Optoelectron. 145, 384-390 (1998).

1997 (3)

J. S. Foresi, "Photonic-bandgap microcavities in optical waveguides," Nature 390, 143-145 (1997).

T. F. Krauss, B. Vögele, C. R. Stanley, R. M. De La Rue, "Waveguide microcavity based on photonic microstructure," IEEE Photon. Technol. Lett. 9, 176-178 (1997).

M. Kimizuka, Y. Ozaki, Y. Watanabe, "Effect of plasma polymerization film on reducing damage of reactive ion etched silicon substrates with $\hbox{CHF}_{3}\!+\!\hbox{O}_{2}$ plasmas," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. 15, 66-69 (1997).

1996 (1)

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tibori, R. M. Joseph, A. Taflove, C. W. Tu, S. T. Ho, "Nanofabrication of 1-D photonic bandgap structures along a photonic wire," IEEE Photon. Technol. Lett. 8, 491-493 (1996).

1995 (1)

P. R. Villeneuve, S. Fan, J. D. Joannopoulos, K.-Y. Lim, G. S. Petrich, L. A. Kolodziejski, R. Reif, "Air-bridge microcavities," Appl. Phys. Lett. 67, 167-169 (1995).

Appl. Phys. Lett. (1)

P. R. Villeneuve, S. Fan, J. D. Joannopoulos, K.-Y. Lim, G. S. Petrich, L. A. Kolodziejski, R. Reif, "Air-bridge microcavities," Appl. Phys. Lett. 67, 167-169 (1995).

IEEE Photon. Technol. Lett. (2)

J. P. Zhang, D. Y. Chu, S. L. Wu, W. G. Bi, R. C. Tibori, R. M. Joseph, A. Taflove, C. W. Tu, S. T. Ho, "Nanofabrication of 1-D photonic bandgap structures along a photonic wire," IEEE Photon. Technol. Lett. 8, 491-493 (1996).

T. F. Krauss, B. Vögele, C. R. Stanley, R. M. De La Rue, "Waveguide microcavity based on photonic microstructure," IEEE Photon. Technol. Lett. 9, 176-178 (1997).

J. Lightw. Technol. (2)

M. Loncar, T. Doll, J. Vuckovic, A. Scherer, "Design and fabrication of silicon photonic crystal optical waveguides," J. Lightw. Technol. 18, 1402-1411 (2000).

D. J. Ripin, "One-dimensional photonic bandgap microcavities for strong optical confinement in GaAs and GaAs/ ${\rm Al}_x{\rm O}_y$ semiconductor waveguides," J. Lightw. Technol. 17, 2152-2160 (1999).

J. Vac. Sci. Technol. B, Microelectron. (1)

K.-Y. Lim, D. J. Ripin, G. S. Petrich, L. A. Kolodziejski, E. P. Ippen, M. Mondol, H. I. Smith, "Photonic band-gap waveguide microcavities: Monorail and air bridges," J. Vac. Sci. Technol. B, Microelectron. 17, 1171-1174 (1999).

J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. (1)

M. Kimizuka, Y. Ozaki, Y. Watanabe, "Effect of plasma polymerization film on reducing damage of reactive ion etched silicon substrates with $\hbox{CHF}_{3}\!+\!\hbox{O}_{2}$ plasmas," J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. 15, 66-69 (1997).

Nature (2)

J. S. Foresi, "Photonic-bandgap microcavities in optical waveguides," Nature 390, 143-145 (1997).

Y. Akahane, T. Asano, B. S. Song, S. Noda, "High-Q photonic nanocavity in a two-dimensional photonic crystal," Nature 425, 944-947 (2003).

Opt. Lett. (1)

Opt. Quantum Electron. (1)

D. Gerace, M. Agio, L. C. Andreani, P. Lalanne, "Cavity modes in one-dimensional photonic crystal slabs," Opt. Quantum Electron. 37, 277-292 (2005).

Proc. Inst. Electr. Eng.—Optoelectron. (1)

P. R. Villeneuve, S. Fan, S. G. Johnson, J. D. Joannopoulos, "Three-dimensional photon confinement in photonic crystals of low-dimensional periodicity ," Proc. Inst. Electr. Eng.—Optoelectron. 145, 384-390 (1998).

Other (5)

J. D. Joannopoulos, R. D. Meade, J. N. Winn, Photonic Crystals: Molding the Flow of Light (Princeton Univ. Press, 1995).

A. S. Jugessur, R. M. De La Rue, P. Pottier, P. Viktorovitch, "One-dimensional photonic crystal microcavity with enhanced transmission," Integrated Photonics Research (IPR) Conf. VancouverBCCanada (2002) Paper IFD2.

D. Van Thourhout, P. Dumon, W. Bogaerts, G. Roelkens, D. Taillaert, G. Priem, R. Paets, "Recent progress in SOI nanophotonic waveguides," Eur. Conf. Optical Commun. (ECOC) GlasgowU.K. (2005) Paper TU 3.6.2.

G. Przyrembel, B. Kuhlow, S. Schlüter, "Higher order PBG flat-top transmission waveguide filters in SOI," Eur. Conf. Optical Commun. (ECOC) RiminiItaly (2003) Paper Tu1.1.6.

G. Przyrembel, B. Kuhlow, S. Schlüter, "Flat-top transmission waveguide filter with multiple cavities," Proc. Workshop and EOS Top. Meeting 2D Photonic Cryst. (2002) pp. 1-20.

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