Abstract

We present high-efficiency grating couplers for coupling between a single-mode fiber and nanophotonic waveguides, fabricated both in silicon-on-insulator (SOI) and InP membranes using BenzoCycloButene wafer bonding. The coupling efficiency is substantially increased by adding a gold bottom mirror to the structures. The measured coupling efficiency to fiber is 69% for SOI grating couplers and 56% for bonded InP membrane grating couplers.

© 2007 IEEE

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2006 (2)

F. Van Laere, M. Ayre, D. Taillaert, D. Van Thourhout, T. F. Krauss, R. Baets, "Compact and efficient fibre-to-waveguide grating couplers in InP membrane," Electron. Lett. 42, 343-345 (2006).

H. T. Hattori, C. Seassal, E. Touraille, P. Rojo-Rmeo, X. Letartre, G. Hollinger, P. Viktorovitch, L. Di Cioccio, M. Zussy, L. El Melhaoui, J. M. Fedeli, "Heterogeneous integration of microdisk lasers on silicon strip waveguides for optical interconnects," IEEE Photon. Technol. Lett. 18, 223-225 (2006).

2005 (2)

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, "Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography ," IEEE Photon. Technol. Lett. 17, 2613-2615 (2005).

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. Van Thourhout, "Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology," J. Lightw. Technol. 23, 401-412 (2005).

2004 (1)

2003 (3)

2002 (1)

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, H. Morita, "Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres," Electron. Lett. 38, 1669-1670 (2002).

2001 (1)

P. Bienstman, R. Baets, "Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers," Opt. Quantum Electron. 33, 327-341 (2001).

2000 (2)

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, M. R. Josey, "Effects of grating heights on highly efficient unibond SOI waveguide grating couplers ," IEEE Photon. Technol. Lett. 12, 59-61 (2000).

R. Orobtchouk, A. Layadi, H. Gualous, D. Pascal, A. Koster, S. Laval, "High-efficiency light coupling in a submicrometric silicon-on-insulator waveguide," Appl. Opt. 39, 5773-5777 (2000).

1992 (1)

R. M. Emmons, D. G. Hall, "Buried-oxide silicon-on-insulator structures. 2. Wave-guide grating couplers," IEEE J. Quantum Electron. 28, 164-175 (1992).

1986 (1)

T. Suhara, H. Nishihara, "Integrated-optics components and devices using periodic structures," IEEE J. Quantum Electron. QE-22, 845-867 (1986).

Appl. Opt. (1)

Electron. Lett. (2)

F. Van Laere, M. Ayre, D. Taillaert, D. Van Thourhout, T. F. Krauss, R. Baets, "Compact and efficient fibre-to-waveguide grating couplers in InP membrane," Electron. Lett. 42, 343-345 (2006).

T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, H. Morita, "Low loss mode size converter from 0.3 μm square Si wire waveguides to singlemode fibres," Electron. Lett. 38, 1669-1670 (2002).

IEEE J. Quantum Electron. (2)

T. Suhara, H. Nishihara, "Integrated-optics components and devices using periodic structures," IEEE J. Quantum Electron. QE-22, 845-867 (1986).

R. M. Emmons, D. G. Hall, "Buried-oxide silicon-on-insulator structures. 2. Wave-guide grating couplers," IEEE J. Quantum Electron. 28, 164-175 (1992).

IEEE Photon. Technol. Lett. (4)

T. W. Ang, G. T. Reed, A. Vonsovici, A. G. R. Evans, P. R. Routley, M. R. Josey, "Effects of grating heights on highly efficient unibond SOI waveguide grating couplers ," IEEE Photon. Technol. Lett. 12, 59-61 (2000).

D. Taillaert, H. Chong, P. Borel, L. Frandsen, R. M. De La Rue, R. Baets, "A compact two-dimensional grating coupler used as a polarisation splitter," IEEE Photon. Technol. Lett. 15, 1249-1251 (2003).

H. T. Hattori, C. Seassal, E. Touraille, P. Rojo-Rmeo, X. Letartre, G. Hollinger, P. Viktorovitch, L. Di Cioccio, M. Zussy, L. El Melhaoui, J. M. Fedeli, "Heterogeneous integration of microdisk lasers on silicon strip waveguides for optical interconnects," IEEE Photon. Technol. Lett. 18, 223-225 (2006).

G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, R. Baets, "Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography ," IEEE Photon. Technol. Lett. 17, 2613-2615 (2005).

J. Lightw. Technol. (1)

W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, P. Bienstman, D. Van Thourhout, "Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology," J. Lightw. Technol. 23, 401-412 (2005).

Opt. Express (1)

Opt. Lett. (2)

Opt. Quantum Electron. (1)

P. Bienstman, R. Baets, "Optical modelling of photonic crystals and VCSELs using eigenmode expansion and perfectly matched layers," Opt. Quantum Electron. 33, 327-341 (2001).

Other (1)

D. Taillaert, R. Baets, P. Dumon, W. Bogaerts, D. Van Thourhout, B. Luyssaert, V. Wiaux, S. Beckx, J. Wouters, "Silicon-on-insulator platform for integrated wavelength-selective components," Proc. IEEE/LEOS Workshop Fibres and Opt. Passive (2005) pp. 115-120.

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