Abstract

In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices, Δλ of the stopband at a transmission below 10% is 5.06 nm.

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  19. Y. Ding and R. Magnusson, "Resonant leaky-mode spectral-band engineering and device applications," Opt. Express, vol. 12, no. 23, pp. 5661-5674, Nov. 2003.
  20. S. Tibuleac and R. Magnusson, "Narrow-linewidth bandpass filter with diffractive thin-film layers," Opt. Lett., vol. 26, no. 9, pp. 584-586, May 2001.
  21. D. K. Jacob, S. C. Dunn and M. G. Moharam, "Flat-top narrow-band spectral response obtained from cascaded resonant grating reflection filters," Appl. Opt., vol. 41, no. 7, pp. 1241-1245, Mar. 2002.
  22. D. Kim and K. Burke, "Design of a grating-based thin-film filter for broadband spectropolarimetry," Appl. Opt., vol. 42, no. 31, pp. 6321-6326, Nov. 2003.
  23. D. L. Brundrett, E. N. Glytsis and T. K. Gaylord, "Homogeneous layer models for high-spatial frequency dielectric surface relief gratings: Conical diffraction and antireflection designs," Appl. Opt., vol. 33, no. 13, pp. 2695-2706, May 1994.

Other (23)

C. Rossi, D. Estève and C. Minguès, "Pyrotechnic actuator: A new generation of Si integrated actuator," Sens. Actuators A, Phys., vol. 74, no. 1-3, pp. 211-215, Apr. 1999.

C. Rossi, P. Temple-Boyer and D. Estève, "Realization and performance of thin SiO2/SiNx membrane for microheater applications," Sens. Actuators A, Phys., vol. 64, no. 3, pp. 241-245, Jan. 1998.

F. Mailly, A. Giani, A. Martinez, R. Bonnot, P. Temple-Boyer and A. Boyer, "Micromachined thermal accelerometer," Sens. Actuators A, Phys., vol. 103, no. 3, pp. 359-363, Feb. 2003.

A. W. van Herwaarden, F. G. van Herwaarden, S. A. Molenaar, E. J. G. Goudena, M. Laros, P. M. Sarro, C. A. Schot, W. van der Vlist, L. Blarre and J. P. Krebs, "Design and fabrication of infrared detector arrays for satellite attitude control," Sens. Actuators A, Phys., vol. 83, no. 1-3, pp. 101-108, May 2000.

F. Mailly, A. Giani, R. Bonnot, P. Temple-Boyer, F. Pascal-Delannoy, A. Foucaran and A. Boyer, "Anemometer with hot platinum thin film," Sens. Actuators A, Phys., vol. 94, no. 1-2, pp. 32-38, Oct. 2001.

J. E. Ford, V. Aksyuk, D. J. Bishop and J. A. Walker, "Wavelength add-drop switching using tilting micromirrors," J. Lightw. Technol., vol. 17, no. 5, pp. 904-911, May 1999.

T. R. Ohnstein, J. D. Zook and H. B. French, "Tunable IR filters with integral electromagnetic actuators," in Proc. SPIE Solid-State Sensor and Actuator Workshop, 1996, pp. 196-199.

Z. S. Liu, S. Tibuleac, D. Shin, P. P. Young and R. Magnusson, "High-efficiency guided-mode resonance filter," Opt. Lett., vol. 23, no. 19, pp. 1556-1558, Oct. 1998.

Z. Hegedus and R. Netterfield, "Low sideband guided-mode resonance filter," Appl. Opt., vol. 39, no. 10, pp. 1469-1473, Apr. 2000.

S. S. Wang and R. Magnusson, "Design of waveguide-grating filters with symmetrical line shapes and low sideband," Opt. Lett., vol. 19, no. 12, pp. 919-921, Jun. 1994.

A. Sharon, D. Rosenblatt and A. A. Friesem, "Narrow spectral bandwidths with grating waveguide structures," Appl. Phys. Lett., vol. 69, no. 27, pp. 4154-4156, Dec. 1996.

S. T. Thurman and G. M. Morris, "Controlling the spectral response in guided-mode resonance filter design," Appl. Opt., vol. 42, no. 16, pp. 3225-3233, Jun. 2003.

A. Sharon, D. Rosenblatt, A. A. Friesem, H. G. Webber, H. Engel and R. Steingrueber, "Light modulation with resonant grating-waveguide structures," Opt. Lett., vol. 21, no. 19, pp. 1564-1566, Oct. 1996.

R. Magnusson, D. Shin and Z. S. Liu, "Guided-mode resonance Brewster filter," Opt. Lett., vol. 23, no. 8, pp. 612-614, Apr. 1998.

D. L. Brundrett, E. N. Glytsis and T. K. Gaylord, "Normal-incidence guided-mode resonant grating filters: Design and experimental demonstration," Opt. Lett., vol. 23, no. 9, pp. 700-702, May 1998.

R. J. Stockermans and P. L. Rochon, "Narrow-band resonant grating waveguide filters constructed with azobenzene polymers," Appl. Opt., vol. 38, no. 17, pp. 3714-3719, Jun. 1999.

R. Magnusson and S. S. Wang, "New principle for optical filters," Appl. Phys. Lett., vol. 61, no. 9, pp. 1022-1024, Aug. 1992.

Y. Nie, L. Wang, Z. Wang and C. Lai, "Beam selector dependent on incident angle by guided-mode resonant subwavelength grating," Opt. Eng., vol. 41, no. 11, pp. 2966-2969, Nov. 2002.

Y. Ding and R. Magnusson, "Resonant leaky-mode spectral-band engineering and device applications," Opt. Express, vol. 12, no. 23, pp. 5661-5674, Nov. 2003.

S. Tibuleac and R. Magnusson, "Narrow-linewidth bandpass filter with diffractive thin-film layers," Opt. Lett., vol. 26, no. 9, pp. 584-586, May 2001.

D. K. Jacob, S. C. Dunn and M. G. Moharam, "Flat-top narrow-band spectral response obtained from cascaded resonant grating reflection filters," Appl. Opt., vol. 41, no. 7, pp. 1241-1245, Mar. 2002.

D. Kim and K. Burke, "Design of a grating-based thin-film filter for broadband spectropolarimetry," Appl. Opt., vol. 42, no. 31, pp. 6321-6326, Nov. 2003.

D. L. Brundrett, E. N. Glytsis and T. K. Gaylord, "Homogeneous layer models for high-spatial frequency dielectric surface relief gratings: Conical diffraction and antireflection designs," Appl. Opt., vol. 33, no. 13, pp. 2695-2706, May 1994.

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