Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Journal of Lightwave Technology
  • Vol. 24,
  • Issue 4,
  • pp. 1922-
  • (2006)

Bulk-Micromachined Optical Filter Based on Guided-Mode Resonance in Silicon-Nitride Membrane

Not Accessible

Your library or personal account may give you access

Abstract

In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices, Δλ of the stopband at a transmission below 10% is 5.06 nm.

© 2006 IEEE

PDF Article
More Like This
Silicon-based and suspended-membrane-type guided-mode resonance filters with a spectrum-modifying layer design

Mount-Learn Wu, Che-Lung Hsu, Yung-Chih Liu, Chih-Ming Wang, and Jenq-Yang Chang
Opt. Lett. 31(22) 3333-3335 (2006)

Authentication labels based on guided-mode resonant filters

Mount-Learn Wu, Che-Lung Hsu, Hsiao-Chin Lan, Hung-I Huang, Yung-Chih Liu, Zong-Ru Tu, Chien-Chieh Lee, Jian-Shian Lin, Chih-Chieh Su, and Jenq-Yang Chang
Opt. Lett. 32(12) 1614-1616 (2007)

Tunable two-dimensional optical filter based on guided-mode resonance

Atefe Taheri and Mehrdad Shokooh-Saremi
J. Opt. Soc. Am. A 36(7) 1109-1116 (2019)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved