Abstract

This paper presents a miniature fiber-optic high-temperature pressure sensor fabricated on the tip of a singlemode (SM) fiber by means of fusion splicing, cleaving, and wet chemical etching. A new approach was developed to simplify the fabrication and greatly improve the sensitivity. The sensor is made entirely of fused silica, whose high-temperature sensing capability is explored in detail for the first time. Two sensors were tested up to 611 °C and 710 °C, respectively, showing excellent repeatability better than 0.62% and 1.4%. The maximum operating temperature is limited by the mechanical creep of the fused silica diaphragm.

© 2006 IEEE

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  1. A. D. Kurtz, A. A. Ned, S. Goodman and A. H. Epstein, "Latest ruggedized high temperature piezoresistive transducers", presented at the NASA Propulsion Measurement Sensor Development Workshop, Huntsville, AL, May 13-15, 2003.
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  5. M. Soeda, T. Kataoka, Y. Ishikura, S. Kimura, T. Masuda, Y. Yoshikawa and M. Nagata, "Sapphire-based capacitive pressure sensor for high temperature and harsh environment application", in Proc. IEEE Sensors, vol. 2, Orlando, FL, 2002, pp. 950-953.
  6. K. C. Holmes, J. L. Davidson, W. P. Kang and A. L. Sternberg, "Diamond microelectromechanical sensors for pressure and accelerating sensing", in Proc. Microelectromechanical Systems Conf., Berkeley, CA, 2001, pp. 45-49.
  7. W. Pulliam, P. Russler, R. Mlcak, K. Murphy and C. Kozikowski, "Micromachined, SiC fiber optic pressure sensors for high-temperature aerospace applications", in Proc. SPIE, Boston, MA, 2000, pp. 21-30.
  8. Y. Zhu and A. Wang, "Miniature fiber-optic pressure sensor", IEEE Photon. Technol. Lett., vol. 17, no. 2, pp. 447-449, Feb. 2005.
  9. T. Pangaribuan, K. Yamada, S. Jiang, H. Ohsawa and M. Ohtsu, "Reproducible fabrication technique of nanometric tip diameter fibre probe for photon scanning tunneling microscope", Jpn. J. Appl. Phys., vol. 31, no. 9A, pp. 1302-1304, 1992.
  10. E. Cibula, D. Donlagic and C. Stropnik, "Miniature fiber optic pressure sensor for medical applications", in Proc. IEEE Sensors, 1st IEEE Int. Conf. Sensors, vol. 1, Orlando, FL, 2002, pp. 711-714.
  11. M. Di Giovanni, Flat and Corrugated Diaphragm Design Handbook, New York: Marcel Dekker, 1982.
  12. B. Qi, G. R. Pickrell, J. Xu, P. Zhang, Y. Duan and W. Peng, et al. "Novel data processing techniques for dispersive white light interferometer", Opt. Eng., vol. 42, no. 11, pp. 3165-3171, Nov. 2003.
  13. M. Fukuhara and A. Sanpei, "High temperature-elastic moduli and internal dilational and shear frictions of fused quartz", Jpn. J. Appl. Phys., vol. 33, no. 5B, pp. 2890-2893, 1992.

Other (13)

A. D. Kurtz, A. A. Ned, S. Goodman and A. H. Epstein, "Latest ruggedized high temperature piezoresistive transducers", presented at the NASA Propulsion Measurement Sensor Development Workshop, Huntsville, AL, May 13-15, 2003.

R. S. Okojie, A. A. Ned and A. D. Kurtz, "Operation of \alpha (6H)-SiC pressure sensor at 500 °C", Sens. Actuators A, Phys., vol. 66, no. 1-3, pp. 200-204, Apr. 1998.

J. von Berg, R. Ziermann, W. Reichert, E. Obermeier, M. Eickhoff, G. Krotz, U. Thoma, C. Cavalloni and J. P. Nendza, "Measurement of the cylinder pressure in combustion engines with a piezoresistive \beta -SiC-on-SOI pressure sensor", in Proc. High Temperature Electronics Conf., Albuquerque, NM, 1998, pp. 245-249.

M. A. Fonseca, J. M. English, M. von Arx and M. G. Allen, "Wireless micromachined ceramic pressure sensor for high-temperature application", J. Microelectromech. Syst., vol. 11, no. 4, pp. 337-343, Aug. 2002.

M. Soeda, T. Kataoka, Y. Ishikura, S. Kimura, T. Masuda, Y. Yoshikawa and M. Nagata, "Sapphire-based capacitive pressure sensor for high temperature and harsh environment application", in Proc. IEEE Sensors, vol. 2, Orlando, FL, 2002, pp. 950-953.

K. C. Holmes, J. L. Davidson, W. P. Kang and A. L. Sternberg, "Diamond microelectromechanical sensors for pressure and accelerating sensing", in Proc. Microelectromechanical Systems Conf., Berkeley, CA, 2001, pp. 45-49.

W. Pulliam, P. Russler, R. Mlcak, K. Murphy and C. Kozikowski, "Micromachined, SiC fiber optic pressure sensors for high-temperature aerospace applications", in Proc. SPIE, Boston, MA, 2000, pp. 21-30.

Y. Zhu and A. Wang, "Miniature fiber-optic pressure sensor", IEEE Photon. Technol. Lett., vol. 17, no. 2, pp. 447-449, Feb. 2005.

T. Pangaribuan, K. Yamada, S. Jiang, H. Ohsawa and M. Ohtsu, "Reproducible fabrication technique of nanometric tip diameter fibre probe for photon scanning tunneling microscope", Jpn. J. Appl. Phys., vol. 31, no. 9A, pp. 1302-1304, 1992.

E. Cibula, D. Donlagic and C. Stropnik, "Miniature fiber optic pressure sensor for medical applications", in Proc. IEEE Sensors, 1st IEEE Int. Conf. Sensors, vol. 1, Orlando, FL, 2002, pp. 711-714.

M. Di Giovanni, Flat and Corrugated Diaphragm Design Handbook, New York: Marcel Dekker, 1982.

B. Qi, G. R. Pickrell, J. Xu, P. Zhang, Y. Duan and W. Peng, et al. "Novel data processing techniques for dispersive white light interferometer", Opt. Eng., vol. 42, no. 11, pp. 3165-3171, Nov. 2003.

M. Fukuhara and A. Sanpei, "High temperature-elastic moduli and internal dilational and shear frictions of fused quartz", Jpn. J. Appl. Phys., vol. 33, no. 5B, pp. 2890-2893, 1992.

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