Abstract

Novel folding 8 × 8 matrix switches based on silicon on insulator were demonstrated. In the design, single-mode rib waveguides and multimode interferences are connected by optimized tapered waveguides to reduce the mode coupling loss between the two types of waveguides. The self-aligned method was applied to the key integrated turning mirrors for perfect positions and low loss of them. A mixed etching process including inductively coupled plasma and chemical etching was employed to etch waveguides and mirrors, respectively. The compact size of the device is only 20 × 3.2 mm<sup>2</sup>. The switch element with high switching speed and low power consumption is presented in the matrix. The average insertion loss of the matrix is about -21 dB, and the excess loss of one mirror is measured of -1.4 dB. The worst crosstalk is larger than 21 dB. Experimental results illuminate that some of the main characteristics of optical matrix switches are developed in the modified design, which is in accord with theoretic analyses.

© 2006 IEEE

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IEEE J. Quantum. Electron. (1)

R. A. Soref, J. Schmidtchen, K. Petermann, "Large single-mode rib waveguides in GeSi-Si and Si-on-$\hbox{SiO}_{2}$," IEEE J. Quantum. Electron. 27, 1971-1974 (1991).

IEEE J. Sel. Topics Quantum Electron. (1)

E. Cassan, S. Laval, S. Larenois, "On-chip optical interconnects with compact and low-loss light distribution in silicon-on-insulator rib waveguides," IEEE J. Sel. Topics Quantum Electron. 9, 460-464 (2003).

IEEE Photon. Technol. Lett. (2)

Y. Z. Tang, W. H. Wang, T. Li, "Integrated waveguide turning mirror in silicon-on-insulator," IEEE Photon. Technol. Lett. 14, 68-70 (2002).

J. Liu, J. Yu, S. Chen, "Integrated folding 4 $\times$ 4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching," IEEE Photon. Technol. Lett. 17, 1187-1189 (2005).

J. Lightw. Technol. (2)

E. J. Murphy, T. O. Murphy, A. F. Ambrose, "16 $\times$ 16 strictly nonblocking guided-wave optical switching system," J. Lightw. Technol. 14, 352-358 (1996).

K. Komatsu, K. Hamamoto, M. Sugimoto, "4 $\times$ 4 GaAs/AlGaAs optical matrix switches with uniform device characteristics using alternating $\Delta\beta$ electrooptical guided-wave directional couplers," J. Lightw. Technol. 9, 871-878 (1991).

Opt. Eng. (1)

J. Xia, J. Yu, Y. Li, "Single-mode condition for silicon rib waveguides with large cross-sections," Opt. Eng. 43, 1953-1954 (2004).

Opt. Lett. (1)

Other (2)

R. M. Lorenzo, C. Lorente, E. J. Abril, "Improved self-imaging characteristics in 1 $\times$ N multimode couplers," Proc. Inst. Electr. Eng.—Optoelectronics (1998) pp. 65-69.

A. House, R. Whitemen, L. Kling, "Silicon waveguide integrated optical switching with microsecond switching speed," Proc. OFC 2003 pp. 449-450.

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