C. L. Coleman, Y. C. Chen, X. Wang, H. Welch and B. TeKolste, "Diffractive optics in a parallel fiber transmitter module," in Diffractive Optics and Micro-Optics, Washington, DC: OSA, 2002, pp. 249-252.
E. G. Johnson, J. Stack, C. Koehler and T. J. Suleski, "Diffractive vortex lens for mode-matching graded index fiber," in Diffractive Optics and Micro-Optics, Washington, DC: OSA, 2000, pp. 205-207.
E. G. Johnson, J. Stack and C. Koehler, "Light coupling by a vortex lens into graded index fiber", J. Lightwave. Tech., vol. 19, no. 5, pp. 753-758, May 2001.
M. Born and E. Wolf, Principles of Optics, 6th ed. Cambridge, MA: Cambridge Univ. Press, 1980.
C. Palmer, Diffraction Grating Handbook, Rochester, NY: Milton Roy, 1994.
B. Guenther, "Manufacturing: The key to binary optics", in Proc. Conf. Binary Optics: An Opportunity for Technical Exchange, vol. 3227, Huntsville, AL, 1993, pp. 1-17.
J. R. Meyers-Arendt, Introduction to Classical and Modern Optics, 4th ed. Upper Saddle River, NJ: Prentice-Hall, 1995.
B. R. Brown and A. W. Lohmann, "Complex spatial filtering with binary masks", Appl. Opt. , vol. 5, pp. 967-969, 1966.
A. W. Lohmann and D. P. Paris, "Binary Fraunhofer holograms, generated by computer", Appl. Opt., vol. 6, p. 1739, 1967.
L. Lesem, P. Hirsch and J. Jordan, "The kinoform: A new wavefront reconstruction device", IBM J. Res. Dev., vol. 13, p. 150, 1969.
W. H. Lee, "Computer generated holograms: Techniques and applications," in Progress in Optics Vol. XVI, E. Wolf, Ed. Amsterdam: The Netherlands: North-Holland, 1978, pp. 121-232.
L. d'Auria, J. P. Huignard, A. M. Roy and E. Spitz, "Photolithographic fabrication of thin film lenses", Opt. Comm., vol. 5, pp. 232-235, 1972.
J. J. Clair and C. I. Abitbol, "Recent advances in phase profile generation," in Progress in Optics Vol. XVI, E. Wolf, Ed. Amsterdam: The Netherlands: North-Holland, 1978, pp. 73 -117.
O. K. Ersoy, "Construction of point images with the scanning electron microscope: A simple algorithm", Optik, vol. 46, pp. 61-66, 1976.
M. T. Gale and K. Knop, "The fabrication of fine lens arrays by laser beam writing", in Proc. SPIE Industrial Applications of Laser Technology, vol. 398, 1983, pp. 347-353.
W. B. Veldkamp and G. J. Swanson, "Developments in fabrication of binary optics", in Proc. Int. Conf. Computer Generated Holography, vol. 437, 1983, pp. 54-59.
G. J. Swanson, "Binary optics technology: The theory and design of multi-level diffractive optical elements", MIT, Cambridge, MA, ser. LC-2400A, MIT Lincoln Lab. Rep. 854, 1989.
M. B. Stern, "Binary optics fabrication," in Micro-Optics:Elements, Systems, and Applications, H. P. Herzig, Ed. London: U.K.: Taylor Francis, 1997, pp. 53-85.
P. P. Clark and C. Londoño, "Production of kinoforms by single-point diamond machining", Opt. News, pp. 39-40, 1989.
D. Daly, R. F. Stevens, M. C. Hutley and N. Davies, "The manufacture of microlenses by melting photoresist", Meas. Sci. Technol., vol. 1, pp. 759-766, 1990.
H. P. Herzig, Ed. "Micro-Optics: Elements, Systems, and Applications", ser. LC-2400A, Taylor Francis, London, U.K., 1997.
H. O. Sankur and M. E. Motamedi, "Microoptics development in the past decade", in Proc. SPIE Micromachining Technology for Micro-Optics, vol. 4179, 2000, pp. 30-55.
T. J. Suleski and R. D. Te Kolste, "A roadmap for micro-optics fabrication", in Proc. SPIE Lithographic and Micromachining Techniques for Optical Component Fabrication, vol. 4440, 2001, pp. 1- 15.
J. Mait, "From ink bottles to E-beams: A historical perspective of diffractive optics", in Proc. SPIE Optical Processing and Computing: A Tribute to Adolf Lohmann, vol. 4392, 2001.
X. Gao, J. Bates, D. Pustai and D. W. Prather, "Integrated micro 4 f -optical imaging system for the characterization of mesoscopic DOEs", in Proc. SPIE Gradient Index, Miniature and Diffractive Optical Systems II, vol. 4437, 2001, pp. 172-180.
D. C. O'Shea, T. J. Suleski, A. D. Kathman and D. W. Prather, Diffractive Optics: Design, Fabrication, and Test, Bellingham, WA: SPIE, 2003.
T. J. Suleski, "Diffractive optics fabrication," in Encyclopedia of Optical Engineering, R. G. Driggers, Ed. New York: Marcel Dekker, 2003, pp. 374-387.
M. Okai, S. Tsuji, N. Chinone and T. Harada, "Novel method to fabricate corrugation for a lambda /4 -shifted distributed feedback laser using a grating photomask", Appl. Phys. Lett., vol. 55, pp. 415-417, 1989.
J. N. Mait and D. W. Prather, Selected Papers on Subwavelength Diffractive Optics, Bellingham, WA: SPIE Optical Engineering, 2001,vol. MS 166.
E. Yablonovitch, "Photonic band-gap structures", J. Opt. Soc. Amer. B, vol. 10, p. 283, 1993.
J. D. Joannopoulos, R. D. Meade and J. N. Winn, Photonic Crystals: Molding the Flow of Light, Princeton, NJ: Princeton Univ. Press, 1995.
S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz and J. Bur, "A three-dimensional photonic crystal operating at infrared wavelengths", Nature, vol. 394, pp. 251-253, 1998.
M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning and A. J. Tuberfield, "Fabrication of photonic crystals for the visible spectrum by holographic lithography", Nature, vol. 404, pp. 53-56, 2000.
X. Zhao, Y. Xia and G. M. Whitesides, "Fabrication of three-dimensional micro-structures: Microtransfer molding", Adv. Mater., vol. 8, pp. 837 -840, 1996.
M. T. Gale, "Replication," in Micro-Optics: Elements,Systems, and Applications, H. P. Herzig, Ed. London: U.K.: Taylor and Francis, 1997, pp. 153-177.
P. Nussbaum, I. Philipoussis, A. Husser and H. P. Herzig, "Simple technique for replication of micro-optical elements", Opt. Eng., vol. 37, pp. 1804-1808, 1998.
T. J. Suleski, B. Baggett, H. Miller, B. Delaney and J. Pagan, "Wafer-scale replication of glass micro-optics for optical communications," in Diffractive Optics and Micro-Optics, Washington, DC: OSA, 2000, pp. 231-233.
E. Goldstein, L.-Y. Lin and J. Walker, "Lightwave micromachines for optical networks", Opt. Photon. News, pp. 60-64, 2001.
K. Bergman, N. Bonadeo, I. Brener and K. Chiang, "Ultra-high capacity MEMS based optical cross-connects", in Proc. SPIE Design, Test, Integration and Packaging of MEMS/MOEMS 2001, vol. 4408, 2001, pp. 2-5.
D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk and J. V. Gates, "256 x 256 port optical cross-connect subsystem", J. Lightwave Technol. , vol. 22, no. 6, pp. 1499-1509, Jun. 2004.
G. Kim and R. T. Chen, "Crosstalk analysis for optical backplane using two-dimensional beam array from VCSEL and microlens array", in Proc. SPIE Optoelectronic Interconnects VII; Photonic Packaging and Integration II, vol. 3952, 2000, pp. 286-295.
M. R. Feldman, T. J. Suleski and W. F. Delaney, "Fabricating optical elements using a photoresist formed from contact printing of a gray level mask", U.S. Patent #6 071 652,
M. C. Hutley, "Refractive lenslet arrays," in Micro-Optics:Elements, Systems, and Applications, H. P. Herzig, Ed. London: U.K.: Taylor and Francis, 1997, pp. 127-152.
D. Flamm, A. Schindler, T. Harzendorf and E.-B. Kley, "Fabrication of microlens arrays in CaF2 by ion milling", in Proc. SPIE Micromachining Technology for Micro-Optics, vol. 4179, 2000, pp. 108-116.
M. K. Poutous, M. D. Himel, W. F. Delaney, J. D. Stack, A. D. Kathman, A. S. Fedor, R. E. Hutchins and J. L. Leonard, "Design and fabrication of customized illumination patterns for low k1 lithography: A diffractive approach: II. Calcium fluoride controlled-angle diffusers", in Proc. SPIE Optical Microlithography XV, vol. 4691, 2002, pp. 1556 -1562.
G. R. Nash, T. Ashley, D. T. Dutton, N. T. Gordon and T. J. PHillips, "Micromachined optical concentrators for IR LEDs", in Proc. SPIE Micromachining Technology for Micro-Optics, vol. 4179, 2000, pp. 117-122.
T. Erdogan, O. King, G. W. Wicks, D. G. Hall, E. H. Anderson and M. J. Rooks, "Circularly symmetric operation of a concentric-circle-grating surface-emitting, AlGaAs/GaAs quantum well semiconductor laser", Appl. Phys. Lett., vol. 60, pp. 1921-1923, 1992.
R. A. Morgan, J. A. Cox, R. Wilke and C. Ford, "Applications of guided mode resonance filters to VCSELs," in Diffractive Optics and Micro-Optics, Washington, DC: OSA, 1998, pp. 18-20.
S. G. Johnson and J. D. Joannopoulos, Photonic Crystals: The Road from Theory to Practice, Norwell, MA: Kluwer, 2002.
G. J. Schneider, J. Murakowski, S. Venkataraman and D. W. Prather, "Combination lithography for photonic crystal circuits", J. Vac. Sci. Technol. B., vol. 22, pp. 146-151, 2004.
S. Astilean, P. Lalanne, P. Chavel, E. Cambril and H. Launois, "High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm", Opt. Lett. , vol. 23, pp. 552-554, 1998.
S. A. Jenekhe and X. L. Chen, "Self-assembly of ordered microporous materials from rod-coil block copolymers", Science, vol. 283, pp. 372-375, 1999.
G. Subramanian, V. N. Manoharan, J. D. Thorne and D. J. Pine, "Ordered macroporous materials by colloidal self-assembly: A possible route to photonic bandgap materials", Adv. Mater. , vol. 11, pp. 1261-1265, 1999.
M. D. Levenson, N. S. Viswanathan and R. A. Simpson, "Improving resolution in photolithography with a phase-shifting mask", IEEE Trans. Electron Devices, vol. ED-29, pp. 1828-1836, 1982.
M. D. Himel, R. E. Hutchins, J. C. Colvin, M. K. Poutous, A. D. Kathman and A. S. Fedor, "Design and fabrication of customized illumination patterns for low k1 lithography: A diffractive approach", in Proc. SPIE Optical Microlithography XIV, vol. 4346, 2001, pp. 1436 -1442.
M. S. Hibbs, "System overview of optical steppers and scanners," in Microlithography Science and Technology , J. R. Sheats, and B. W. Smith, Eds. New York: Marcel Dekker, 1998, pp. 1-107.
W. H. Arnold, "Immersion lithography: Introduction to the special issue", J. Microlith. Microfab., Microsyst., vol. 3, p. 8, 2003.
S. D. Berger and J. M. Gibson, "New approach to projection-electron lithography with demonstrated 0.1 µ m linewidth", Appl. Phys. Lett., vol. 57, p. 153, 1990.
T. H. P. Chang, D. P. Kern and L. P. Murray, "Arrayed miniature electron beam columns for high throughput sub-100 nm lithography", J. Vac. Sci. Technol. B, vol. 10, p. 2743, 1992.
D. Spears and H. I. Smith, "100 years of x-rays: Impact on micro and nanofabrication", J. Vac. Sci. Technol. B, vol. 13, p. 2323, 1995.
J. L. Wilbur, A. Kumar, E. Kim and G. M. Whitesides, "Microfabrication by microcontact printing of self-assembled monolayers", Advan. Mat., vol. 6, pp. 600-604, 1994.
Y. Xia and G. M. Whitesides, "Soft lithography", Angew. Chem. Int. Ed., vol. 37, pp. 550-575, 1998.
S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo and L. Zhuang, "Sub-10 nm imprint lithography and applications", J. Vac. Sci. Technol. B., vol. 15, pp. 2897-2904, 1997.
M. D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S. A. Lyon and S. Y. Chou, "Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography", Appl. Phys. Lett., vol. 84, pp. 5299-5301, 2004.
S. Y. Chou, P. R. Krauss and P. J. Renstrom, "Nanoimprint lithography", J. Vac. Sci. Technol. B., vol. 14, pp. 4129-4133, 1996.
T. J. Suleski, B. Baggett, W. F. Delaney and A. D. Kathman, "Emerging fabrication methods for diffractive optical elements", in Proc. SPIE Diffractive and Holographic Technologies, Systems and Spatial Light Modulators VI, vol. 3633, 1999, pp. 26-34.
P. I. Jensen and A. Sudbo, "Bragg gratings for 1.55-µ m wavelength fabricated on semiconductor material by grating-period doubling using a phase mask", IEEE Photon. Technol. Lett., vol. 7, no. 7, pp. 783 -785, Jul. 1995.
C. Londoño, "Design and fabrication of surface relief diffractive optical elements,or kinoforms, with examples for optical athermalization", Ph.D. dissertation, Tufts Univ., Somerville, MA, 1992.
M. A. Davies, C. J. Evans, R. R. Vohra, B. C. Bergner and S. R. Patterson, "Application of precision diamond machining to the manufacture of microphotonics components", in Proc. SPIE Lithographic and Micromachining Techniques for Optical Component Fabrication II, vol. 5183, 2003, pp. 94-108.
R. A. Shelby, D. R. Smith and S. Schultz, "Experimental verification of a negative index of refraction", Science, vol. 292, pp. 77-79, 2001.
J. B. Pendry, "Negative refraction makes a perfect lens", Phys. Rev. Lett., vol. 85, pp. 3966-3969, 2000.
W. B. Veldkamp, "Overview of micro-optics: Past, present and future", in Proc. SPIE Miniature and Micro-Optics: Fabrication and System Applications , vol. 1544, 1991, pp. 287-299.
W. Singer and K. H. Brenner, "Stacked micro-optical systems," in Micro-Optics:Elements, Systems, and Applications, H. P. Herzig, Ed. London: U.K.: Taylor and Francis, 1997, pp. 199-221.
J. Jahns, "Planar integrated free-space optics," in Micro-Optics:Elements, Systems, and Applications, H. P. Herzig, Ed. Ed. London: U.K.: Taylor and Francis, 1997, pp. 179-198.
M. R. Feldman and Y. C. Lee, Micro-Optics Integration and Assemblies, Bellingham, WA: SPIE, 1998,vol. 3289.
M. R. Feldman, J. G. Grote and M. K. Hibbs-Brenner, Optoelectronic Integrated Circuits and Packaging III, Bellingham, WA: SPIE, 1999,vol. 3631.
T. J. Suleski, Gradient Index, Miniature, and Diffractive Optical Systems II, Bellingham, WA: SPIE, 2001,vol. 4437.
T. J. Suleski, Gradient Index, Miniature, and Diffractive Optical Systems III, Bellingham, WA: SPIE, 2003,vol. 5177.
M. R. Feldman, A. D. Kathman and W. H. Welch, "Integrated micro-optical systems", U.S. Patent #6 061 169,
M. R. Feldman, A. D. Kathman and W. H. Welch, "Integrated optical apparatus and associated methods", U.S. Patent #6 104 690,
A. Schilling, P. Nussbaum, I. Philipoussis, H. P. Herzig, L. Stauffer, M. Rossi and E.-B. Kley, "Fabrication technologies for micro-optical elements with arbitrary surfaces", in Proc. SPIE Micromachining Technology for Micro-Optics, vol. 4179, 2000, pp. 65- 72.
M. G. Moharam and T. K. Gaylord, "Diffraction analysis of dielectric surface relief gratings", J. Opt. Soc. Amer., vol. 72, pp. 1385-1392, 1982.
J. B. D. Soole, A. Scherer, H. Leblanc, N. Andreadakis, R. Bhat and M. Koza, "Monolithic InP-based grating spectrometer for wavelength-division multiplexed systems at 1.5 µ m", Electron. Lett., vol. 27, pp. 132-134, 1991.