A uni-traveling-carrier photodiode (UTC-PD) is monolithically integrated with a wideband log-periodic toothed antenna for generating millimeter and submillimeter waves at frequencies of up to terahertz range. A module with a quasi-optical output port fabricated for practical use operates up to 1.5 THz and generates an output power of 2.3 µW at 1.04 THz with good linearity. The output power level and the operation frequency are records for wideband PD modules operating at 1.55 µm. An investigation of the operational characteristics of the UTC-PD reveals that the effective use of the electron-velocity overshoot in the junction depletion layer is important for maximizing the output power in the terahertz range.
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