Abstract

Using a rigorous coupled-wave analysis, a (2 × 2) matrix method in homogenous layered media is generalized for a grating-embedded multilayer structure with (2M × 2M) dynamic and propagation matrices in both transverse-electric and transverse-magnetic polarizations, where M is the number of harmonics retained in the field expansion. A numerically stable algorithm to implement the method is described. Numerical results are presented for a diffraction-based optoacoustic sensor that consists of a reflective movable membrane and fixed grating fingers on a transparent quartz substrate and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar approach.

© 2004 IEEE

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Appl. Opt. (1)

Opt. Lett. (2)

Other (11)

W. Lee and F. L. Degertekin, "Rigorous coupled-wave analysis for multilayered grating structures", in Proc. 2003 Symp. Integrated Optics: Devices, Materials and Technologies VII, vol. 4987, 2003, pp. 264-273.

N. A. Hall and F. L. Degertekin, "Integrated optical interferometric detection method for micromachined capacitive acoustic transducers", Appl. Phys. Lett., vol. 80, pp. 3859-3861, 2002.

G. Granet and B. Guizal, "Efficient implementation of the coupled-wave method for metallic lamellar gratings in TM polarization", J. Opt. Soc. Amer. A, vol. 13, pp. 1019-1023, 1996.

P. Yeh, Optical Waves in Layered Media, New York: Wiley, 1988.

L. Li, "Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings", J. Opt. Soc. Amer. A, vol. 13, pp. 1024-1035, 1996.

C. F. R. Mateus, M. C. Y. Huang, Y. Deng, A. R. Neureuther and C. J. Chang-Hasnain, "Ultrabroadband mirror using low-index cladded subwavelength grating", IEEE Photon. Technol. Lett., vol. 16, pp. 518-520, 2004.

Y. Zhao, M. Mao, R. Horowitz, A. Majumdar, J. Varesi, P. Norton and J. Kitching, "Optomechanical uncooled infrared imaging system: Design, microfabrication and performance", J. Microelectromech. Syst., vol. 11, pp. 136-146, 2002.

G. G. Yaralioglu, A. Atalar, S. R. Manalis and C. F. Quate, "Analysis and design of an interdigital cantilever as a displacement sensor", J. Appl. Phys., vol. 83, pp. 7405-7415, 1998.

W. Lee, N. A. Hall and F. L. Degertekin, "Micromachined acoustic sensor array with diffraction-based optical interferometric detection", in Proc. 2003 SPIE Symp. MOEMS Display and Imaging Systems, vol. 4985, 2003, pp. 140-151.

M. G. Moharam, E. B. Grann, D. A. Pommet and T. K. Gaylord, "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings", J. Opt. Soc. Amer. A, vol. 12, pp. 1068-1076, 1995.

M. G. Moharam, D. A. Pommet, E. B. Grann and T. K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach", J. Opt. Soc. Amer. A, vol. 12, pp. 1077-1086, 1995.

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