Two-photon absorption (TPA) provides the ability to confine photochemical and physical reactions to the order of laser wavelength in three dimensions. For applying TPA to laser precision microfabrication, we proposed a two-photon photopolymerization technique, by which photonic crystals and various micromachines with near-diffraction-limit features have been produced. Here we show that the diffraction limit was exceeded by utilizing nonlinear laser-matter interaction processes, and spatial resolutions far smaller than the diffraction limit were achieved. The super resolution, combined with other technologies newly developed by us including three-dimensional imaging of voxels, rapid surface profile scanning, device functionalization and its mechanical driving with a laser trapping force, and dye-doping polymerization for three-dimensional microdiagnosis, makes the technique quite compelling for nanophotonic and optical microelectromechanical (MEMS) applications.


PDF Article


  • View by:
  • |

  1. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan and E. Mazur, "Three-dimensional optical storage inside transparent materials", Opt. Lett., vol. 21, pp. 2023-2025, 1996.
  2. H.-B. Sun, Y. Xu, S. Juodkazis, K. Sun, M. Watanabe, J. Nishii, S. Matsuo and H. Misawa, "Arbitrary-lattice photonic crystals created by multiphoton microfabrication", Opt. Lett., vol. 26, pp. 325-327, 2001.
  3. S. Maruo, O. Nakamura and S. Kawata, "Three-dimensional microfabrication with two-photon-absorbed photopolymerization", Opt. Lett., vol. 22, pp. 132-134, 1997.
  4. H.-B. Sun, T. Kawakami, Y. Xu, J.-Y. Ye, S. Matuso, H. Misawa, M. Miwa and R. Kaneko, "Real three-dimensional microstructures fabricated using photopolymerization of resins through two-photon absorption", Opt. Lett., vol. 25, pp. 1110-1112, 2000.
  5. A. S. Kewitsch and A. Yariv, "Self-focusing and self-trapping of optical beams upon photopolymerization", Opt. Lett., vol. 21, pp. 24-26, 1996 .

Cited By

OSA participates in Crossref's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.